Investigation of Physical Properties of N-doped DLC Film and Its Application to Mo-tip FEA Devices (질소가 도핑된 DLC 막의 물성 조사 및 Mo-tip FEA 소자에의 응용)
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- The Transactions of the Korean Institute of Electrical Engineers C
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- v.48 no.1
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- pp.19-22
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- 1999