• Title/Summary/Keyword: Optical and structural properties

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Role of Crystallographic Tilt Angle of GaAs Substrate Surface on Elastic Characteristics and Crystal Quality of InGaP Epilayers (GaAs 기판표면의 Tilt각도가 InGaP 에피막의 탄성특성 및 결정질에 미치는 영향)

  • 이종원;이철로;김창수;오명석;임성욱
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.1
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    • pp.1-10
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    • 1999
  • InGaP epilayers were grown on the flat, $2^{\circ}$off, $6^{\circ}$ off, and $10^{\circ}$off GaAs substrates by organo-metallic vapor phase epitaxy, and influences of crystallographic misorientation of the substrate on the structural and optical properties such as lattice mismatch, elastic strain, lattice curvature, misfit stress, and PL intensity /line-width were investigated in this study. Material characterizations were carried out by TXRD( tripple-axis x-ray diffractometer) and low temperature (11K) PL (photoluminescence). With increase of the substrate misorientation angle (S.M.A.), the relative incorporation of Ga atoms on the substrate surface was found to be enhanced. Also, with increase of the S. M. A., the x-ray line-width of the InGaP epilayer was reduced, indicating that the crystal quality of the epilayer could be improved tilth a misoriented substrate. It was also found that the elastic accommodation of the strain-free lattice misfit was more remarkable in a misoriented sample. PL intensity increased, and PL line-width and emission wavelength decreased with the increase of S. M. A. The results conclude that the elastic characteristics and the crystal quality of the InGaP epilayer could be remarkably enhanced when the misoriented substrates were employed.

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Effect of O2 Concentration and Annealing Temperature on the Characteristics of Indium Zinc Oxide Thin Films (Indium Zinc Oxide 박막 특성에 대한 O2 농도와 열처리 온도의 영향)

  • Cho, Han Na;Li, Yue Long;Min, Su Ryun;Chung, Chee Won
    • Applied Chemistry for Engineering
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    • v.17 no.6
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    • pp.644-647
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    • 2006
  • The indium zinc oxide (IZO) thin films were deposited using a radio frequency reactive magnetron sputtering method. Among the various processing variables, $O_{2}$ concentration and annealing temperature after deposition were selected and the optical, electrical, and structural properties of IZO thin films were investigated. As the $O_{2}$ concentration increased, the deposition rate of IZO thin films decreased, the resistivity increased and the transmittance slightly increased. According to atomic force microscopy analysis, the IZO films deposited at pure Ar showed rough surface and those deposited with $O_{2}$ addition exhibited relatively smooth surface. The IZO thin films deposited at pure Ar were annealed at 250, 350, and $450^{\circ}C$, respectively. The IZO thin film deposited at pure Ar showed the lowest transmittance and resistivity and resistivity greatly increased at the annealing temperature exceeding $250^{\circ}C$. The higher annealing temperature IZO films were annealed at, the smoother surface the films showed. The x-ray diffraction revealed that IZO films annealed at higher temperature had better crystalline structures.

Scientific Investigation for Conservation Methodology of Bracket Mural Paintings of Daeungjeon Hall in Jikjisa Temple (직지사 대웅전 포벽화 보존방안을 위한 과학적 조사)

  • Lee, Hwa Soo;Kim, Seol Hui;Han, Kyeong Soon
    • Journal of Conservation Science
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    • v.34 no.2
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    • pp.107-118
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    • 2018
  • This report does studied for making the method of conserving bracket murals in Daeungjeon of Jikjisa Temple, through the scientific way. Results of evaluated the conservation status at the braket mural paintings, most serious damage is structural damage like cracks, breakage, and delamination. After optical investigation, a characteristic point wasn't found such as underdrawing or traces of a coat of paint. The ultrasonic examination speed by each wall painting was measured from about 195.8 m/s to 392.7 m/s, according to the location of the surface, and it was able to compare the surface properties according to the location. In Infrared-thermal image measurement shows that wall layer separation and paint layer delamination are closely detected, therefore it was able to judge of damage on the objective way. Material analysis revealed that the walls were made by sand and weathering soil. The wall layer combined sand with less than fine sand size by nearly 5:5, and the finishing layer was found to have mixed medium sand and fine sand at approximately 6:4 rates. However, In case of finishing layer, mixing ratios of sizes less than very fine sand were found to be significantly lower than wall. Therefore, it is estimated that the plysical damage such as the separation between the layers of the walls created in the braket mural paintings, is continuously caused by changes in the internal stresses and volume ratio caused by the density differences between the wall and the finishing layers.

Correlationship of the electrical, optical and structural properties of P-doped ZnO films grown by magnetron sputtering (마그네트론 스퍼터링에 의해 phosphorous 도핑된 ZnO 박막의 전기적, 광학적, 구조적 특성의 연관성)

  • Ahn, Cheol-Hyoun;Kim, Young-Yi;Kang, Si-Woo;Kong, Bo-Hyun;Han, Won-Suk;Cho, Hyung-Koun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.177-177
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    • 2007
  • ZnO는 3.36eV의 넓은 밴드캡을 가지는 II-IV족 반도체로써 태양전지, LED와 같은 광학적 소자로 이용이 기대가 되는 물질이다. 더욱이, 상온에서의 60meV에 해당하는 큰 엑시톤 에너지와 밴드캡 에지니어링이 가능하다는 장점 때문에 광학적 소자로 널리 이용되고 있는 GaN을 대체할 수 있는 물질로 주목을 받고 있다. 하지만, p-type ZnO는 형성이 어렵고 낮은 이동도와 케리어 농도의 특성을 보이고, 대기 중에 장시간 노출할 경우 n-type ZnO의 특성으로 돌아가는 불안정성을 보이고 있다. 최근에 몇몇의 연구자들에 의해 V족의 원소인 P(phosphorous), N(nitrogen), As(arsenic))를 도핑하여 p-type ZnO의 형성에 대한 논문이 발표되고 있다. 또한, V족 원소 중에 P는 p-type ZnO 형성에 효과적인 도핑 물질로 보고되 고 있다. 본 연구는 마그네트론 스퍼터링을 이용하여 다양한 온도에서 성장된 P도핑 ZnO 박막의 특성에 대해 연구하였다. P도핑된 ZnO 박막은 사파이어 기판에 buffer층을 사용한 Insulator 특성의 ZnO박막위에 400, 500, 600, $700^{\circ}C$에서 성장되 었다. 박막의 특성 분석에는 325nm의 파장을 가지는 He-Cd의 레이져 광원을 사용하여 10K의 저온 PL과 0.5T의 자기장을 사용한 van der Pauw configuration에 의한 Hall effect측정, 그리고 결정성 분석에는 XRD와 TEM을 이용하였다. 상온 Hall-effect 측정 결과, $400{\sim}600^{\circ}C$ 에서 성장된 박막은 n-type의 특성을 보였고, $700^{\circ}C$에서 성장된 Phosphorous 도핑 ZnO박막은 $1.19{\times}10^{17}$의 캐리어 농도를 가지는 p-type의 특성을 보였다. 그리고 XRD분석과 TEM분석을 통하여 박막의 성장온도가 증가 할수록 P도핑된 ZnO박막의 결정성이 향상되는 것을 알 수 있었다. 또한 10K의 저온 PL분석을 통해 p도핑에 의한 액셉터에 관련된 피크들을 관찰할 수 있었다.

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Characteristics of c-axis oriented sol-gel derived ZnO films (C-축으로 정렬된 sol-gel ZnO 박막의 특성)

  • 김상수;장기완;김인성;송호준;박일우;이건환;권식철
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.11 no.2
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    • pp.49-55
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    • 2001
  • ZnO films were fabricated on p-type Si(100) wafer ITO glass and quartz glass by the sol-gel process using zinc acetate dihydrate as starting material. A homogeneous and stable solution was prepared by dissolving the zinc acetate dihydrate in a solution of 2-methoxyethanol and monoethanolamine (MEA). ZnO films were deposited by spin-coating at 2800 rpm for 25 s and were dried on a hot plate at $250^{\circ}C$ for 10 min. Crystallization of the films was carried out at $400^{\circ}C$~$800^{\circ}C$ for 1 h in air. X-ray diffraction (XRD) analysis, scanning electron microscopy (SEM), UV-vis transmittance spectroscopy, FTIR transmittance spectroscopy and Photoluminescence (PL) spectroscopy measurements have been used to study the structural and optical properties of the films. ZnO films highly oriented along the (002)plane were obtained. In all cases the films were found to be transparent (above 70%) in visible range with a sharp absorption edge at wavelengths of about 380nm, which is very close to the intrinsic band-gap of ZnO(3.2 eV). The low temperature band-edge photoluminescence revealed a complicated multi-line structure in terms of bound exciton complexes and the phonon replicas.

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Characteristics of Mineralogy and Nanocrystals of Ingredient Materials of $Lumilite^{(R)}$ for Water Treatment (수질개선제 $Lumilite^{(R)}$ 원료광물의 광물학적 및 나노결정학적의 특징)

  • Lee, Jin-Kook;Park, Hi-Ho;Choo, Chang-Oh
    • Journal of the Mineralogical Society of Korea
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    • v.21 no.1
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    • pp.27-35
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    • 2008
  • Characterization of mineralogy and nanocrystals of ingredient materials of $Lumilite^{(R)}$ used for water treatment was made using optical microscopy, XRD, SEM, FTIR, and XRF analyses. Constituent minerals identified by XRD and microscope are clinoptilolite, illite, quartz, and albite, characterized by dense and fine texture. The cross section of nanocrystals with the size $70{$\sim}100\;nm$ is generally round or subround. Numerous spheroids with few nanometers in diameter are extensively formed on the surface of nanocrystals. Bulk chemistry is $SiO_2$ $74.22{\sim}75.65\;wt.%$, $Al_2O_3$ $13.25{\sim}13.72\;wt.%$, CaO $4.23{\sim}5.15\;wt.%$, with other major elements being minimal. When heated to $700^{\circ}C$, the crystal structure was mostly destroyed, though it persisted to $500^{\circ}C$. It is likely that high capacity and applications of $Lumilite^{(R)}$ for water treatment are originated from its structural properties such as development of nanocrystals and various tiny pores.

Effect of Cd Concentration on Characteristics of CdS Thin Films Prepared by Chemical Bath Deposition (화학용액증착법에 의하여 증착된 CdS 박막의 특성에 대한 Cd 농도의 영향)

  • Jung, SungHee;Chung, CheeWon
    • Applied Chemistry for Engineering
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    • v.23 no.4
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    • pp.377-382
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    • 2012
  • CdS thin films have been widely used as a buffer layer of CIGS semiconductor solar cells to reduce the lattice mismatch between transparent electrode and absorber layer. In order to prepare the CdS films with high transparency and low resistivity, they were deposited by varying Cd concentration with the constant S concentration in the solution using chemical bath deposition method. They were analyzed in terms of structural, optical and electrical properties of CdS films according to the $[S^{2-}]/[Cd^{2+}]$ ratio. In the case of Cd concentration higher than S concectration, CdS thin films were formed mainly by cluster- by-cluster formation due to the homogeneous reaction between Cd and S in the solution. Therefore the grain size increased and the transmittance decreased. On the other hand, in the case of Cd concentration lower than S concentration, CdS films were formed by heterogeneous reaction on the substrate rather than in the solution. The CdS films have the grains with the uniform circular shape of a few hundreds ${\AA}$. As the Cd concentration increased in the solution, the $[S^{2-}]/[Cd^{2+}]$ ratio decreased and the resistivity decreased by the increase in the carrier concentration due to the formation S vacancy by the excess Cd.

The Crystallization and the Photoluminescence Characteristics of ZnO Thin Film Fabricated by Sol-gel Method (Sol-gel 법으로 제작된 ZnO 박막의 결정화 및 PL 특성에 관한 연구)

  • Choi Byeong Kyun;Chang Dong Hoon;Kang Seong Jun;Yoon Yung Sup
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.43 no.2 s.344
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    • pp.8-12
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    • 2006
  • We have fabricated ZnO thin film on $Pt/TiO-2/SiO_2/Si$ substrate by the sol-gel method and have investigated the effect of annealing temperature on the structural morphology and optical properties of ZnO thin films. The ZnO thin film annealed at $600^{\circ}C$ exhibits the highest c-axis orientation and its FWHM of X-ray peak is $0.4360^{\circ}C$. In the results of surface morphology investigation of ZnO thin film by using Am it is observed that ZnO thin film annealed at $600^{\circ}C$ exhibits the largest UV (ultraviolet) exciton emission at around 378nm and the smallest visible emission at around 510nm among these of ZnO thin films annealed at various temperatures. It is deduced that the ZnO thim film annealed at $600^{\circ}C$ is formed most stoichiometrically since the visible emission at around 510nm comes from oxygen vacancy or impurities.

Growth of semi-polar (1-101) InGaN/GaN MQW structures on $8^{\circ}$ off -axis (100) patterned Si substrate by MOVPE ($8^{\circ}$-off (100) Si 기판위의 반극성을 가지는 (1-101) InGaN/GaN 다중양자우물 구조의 MOVPE 성장)

  • Han, Y.H.;Jean, H.S.;Hong, S.H.;Kim, E.J.;Lee, A.R.;Kim, K.H.;Ahn, H.S.;Yang, M.;Tanikawa, T.;Honda, Y.;Yamaguchi, M.;Sawaki, N.
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.1
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    • pp.1-5
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    • 2009
  • In this study, we performed growth of InGaN/GaN multi quantum well (MQW) structures on semi-polar (1-10]) GaN facet on 8-degree off oriented stripe patterned (100) Si substratcs by MOVPE. The structural and optical properties of the InGaN/GaN multi quantum well (MQW) structures grown on (1-101) GaN stripe depend on $NH_3$ flow rate, TMI flow rate and growth temperature are characterized by cathodoluminescence (CL) and scanning electron microscopy (SEM). With the decrease of $NH_3$ flow rate, the threading dislocation of (1-101) GaN is considerably reduced. We could control the transition wavelength of InGaN/GaN MQW structures from 391.5 nm to 541.2 nm depend on the growth conditions.

Investigation on the optical, structural and electrical properties of the RF sputtered layers obtained from CuInSe2 single precursors (CuInSe2 단일전구체에서 스퍼터링된 박막의 광학적, 구조적 및 전기적 특성평가)

  • Jeong, Chaehwan;Kim, Saerok;Kim, Jinhyeok;Kim, Kwangbok
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.78.2-78.2
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    • 2010
  • Cu(In,Ga)Se2 (CIGS)박막태양전지는 간단한구조와 가격경쟁력 및 고효율화 가능성에 대한 기대감에 의해 많은 연구가 수행되어오고 있다. 특히 높은 흡수계수와 적절한 밴드갭, 큰 결정크기와 같은 물질의 특성들이 장점으로 작용하고 있기 때문이다. 또한 CIGS박막태양전지는 다른 태양전지에 비해 광열화가 적다는 장점도 가지고 있다. CIGS 박막은 CuInSe2내의 In 사이트에 Ga을 도핑함으로서 형성이 되는데 그때의 밴드갭은 약 1.4eV이며 이를 형성하기 위해 많은 방법들이 제안되고 있는데, CIGS박막 형성 시 가장 중요시 여겨야 될 인자는 구성원소로부터 최적화된 조성비를 찾는 것이다. 이러한 관점에서 볼때 evaporation법이나 sputtering법같은 진공방식의 공정법이 비진공방식에 비해 최적의 조성비를 찾는 것이 수월할 것으로 생각된다. selenization을 하기전에, 동시증착이나 다층박막형성을 통해 Cu-In-Se의 조합이 일반적으로 이루어진다. 어떤방법이든 Se의 부가적인 공급이 이루어지는데 시작 전구체의 조합에서 그 해법을 제시하는 것에 대한 논의가 많이 부족한 현실로서, CuInSe2의 단일전구체에 의한 박막형성과 특성평가에 대해 구체적인 논의가 필요하다. 본 실험에서는 Cu-In-Se 전구체를 CuInSe2 단일 타겟에서부터 RF 마그네트론 스퍼터링법을 이용하여 박막증착을 하여 Se의 Rapid Thermal Process(RTA)법을 통해 Se이 순차적으로 공급되었다. 이때 형성되는 박막의 태양전지 흡수층 적용을 위한 광학적, 전기적 및 구조적에 대한 논의된다. Soda lime glass(SLG)와 Corning 1737 유리를 기판으로 하여 아세톤-에탄올을 이용, 초음파세척을 실시하였다. 스퍼터 공정을 하기전에 흡착된 물분자를 제거하기 위하여 약 30분간 $120^{\circ}C$로 열을 가해주었으며, 공정을 위한 총 아르곤 가스의 양은 약 50sccm이며 이때의 공정압력은 20mtorr로 고정하였다. 우선 RF power와 기판온도에 따른 단일전구체 형성을 관찰하기 위하여 각각 30~80W, RT~$400^{\circ}C$로 변화를 주어 박막을 형성한 후 모든 sample에 대하여 $500^{\circ}C$분위기에 effusion cell을 이용하여 Se 분위기에서 결정화를 실시하였다. 샘플의 두께는 Surface profiler로 측정하였고 단면은 전자주사현미경으로 관찰되었다. 동시에 SEM이미지를 통하여 morphology와 grain size 및 EDX를 통하여 조성분석을 하였다. 밴드갭, 투과율 및 흡수계수는 UV-VIS-NIR분광분석법을 통하여 수행되었으며, 전기적 특성분석을 위해 4-point-probe와 Hall effect측정을 수행하였다. 공정변수에 따른 단일타겟으로 얻어 결정화된 CuInSe2박막의 자세한 결과와 논의에 대하여 발표한다.

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