• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1376-1383
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• 2001

Modem technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.19 no.4
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• pp.165-171
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• 2009

In this study, ruby single crystals were successfully grown by flux method using an alumina crucible. The alumina crucible can be a substitute for the platinum crucible of high price. The ruby single crystals were grown in the temperature range of $915{\sim}1350^{\circ}C$ for 240 h, using $PbO-B_2O_3$ mixture. The grown ruby crystals with 9.02 ${\times}$ 6.36 mm in size exhibited red color and were transparent. The optical and structural properties were examined by UV-VIS spectrometry, FTIR and XRD. The optical properties of theses crystals were similar to those of the natural ruby and synthetic ruby grown by other methods.

• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.138-147
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• 2008

$SiO_2/TiO_2/ZrO_2$ broadband anti-reflective multi-layer thin films were prepared at room temperature by RF sputtering system. Optical constants and structural properties on each layer of films were analyzed by spectroscopic ellipsometer and transmittance spectra of the films were measured by $UV-V_{is}$ spectrophotometer in the range of 300$\sim$900 nm. To evaluate the films, we compared the measured and analyzed spectra with designed spectra. We investigated influence of discrepancy of thickness and refractive indices of each layer on changes of the transmittance spectra. It was found that refractive indices and shape of dispersion of deposition materials are more contributed to changes of the transmittance spectra than thickness of layer.

• Smart Structures and Systems
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• v.20 no.3
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• pp.343-350
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• 2017

An experimental study is presented of the application of fiber Bragg grating (FBG) interrogation method based on optical time-domain reflectometery (OTDR) to monitoring strain in bent reinforced concrete beams. The results obtained with the OTDR-based method are shown to agree well with the direct spectral measurements. Strain sensitivity, resolution and measurement range amounted to $0.0028dB/{\mu}strain$; $30{\mu}strain$; $4000{\mu}strain$, correspondingly. Significant differences are observed in surface and inner deformations of the test beams which can be attributed to different mechanical properties of concrete and steel reinforcement. The prospects of using OTDR-based FBG interrogation technique in real-life applications are discussed.

• Proceedings of the Korea Crystallographic Association Conference
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• 2000.11a
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• pp.21-21
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• 2000

• Journal of the Korea institute for structural maintenance and inspection
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• v.23 no.7
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• pp.40-48
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• 2019

New concept of fine dust measurement method is suggested based on ultrasonic scattering. These days, fine dust has been social problem in Korea, and many researches has been conducted including the area structural maintenance. Conventional measurement system such as optical scattering and semiconductor has a limit from environmental factors like relative humidity. However, ultrasound is based on mechanical waves, which perturb mechanical properties of medium such as density and elastic constants. Using the advantage, the algorithm for fine dust measurement is derived and evaluated using 2-D finite difference method. The numerical analysis simulates ultrasonic wave propagation inside multiple scattering medium like fine dust in air. Signal processing scheme is also suggested and the results show that the error of the algorithm is around minimum of 0.7 and maximum of 24.9 in the number density unit. It is shown that cross-section of fine dust is a key parameter to improve the accuracy of algorithm.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1998.04a
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• pp.302-307
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• 1998

In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.08a
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• pp.128-128
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• 2003

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.24-24
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• 2009

투명전극 (TCO Transparent Conductive Oxide)은 Solar cell, Touch panel, Sensor 등 많은 분야에 이용되어지고 있다. ZnO 그리고 $SnO_2$는 ITO룰 대체하기 위하여 오래전부터 연구가 되어지고 있다. 하지만 ZnO가 가지고 있는 많은 장점에도 불구하고 ITO를 대체하기 위한 전기적 특성이 충분하지 않다. 따라서 ZnO에 Al를 도핑하는 등 다양한 연구가 진행되어왔다. 본 실험은 우수한 광학특성 및 전기적 (10-5) 특성을 확보하기 위하여 AZO/Ag/AZO 다층박막구조 형성하였다. 또한 염료감응 태양전지에 적용하기 위하여 다층박막구조를 이용한 안정성 테스트를 진행하였다.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.1546-1549
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• 2005

Al-doped ZnO (ZnO:Al) thin films were grown on corning 1737 glass substrates by dc magnetron sputtering. The structural, electrical and optical properties of the films were investigated as a function of various discharge power. The obtained films were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity is $6.0{\times}10^{-4}$ Ocm with the carrier concentration of $2.694{\times}10^{20}$ $cm^{-3}$ and Hall mobility of $20.426cm^2/Vs$. The average transmittance in the visible range was above 90%.