• 제목/요약/키워드: Optical and electrical properties

검색결과 2,227건 처리시간 0.028초

Effects on Heat Treatment Methods in Indium-Tin-Oxide Films by DC Magnetron Sputter of Powder Target

  • Kim, H.H.;Shin, J.H.;Baek, J.Y.;Shin, S.H.;Park, K.J.
    • Transactions on Electrical and Electronic Materials
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    • 제2권1호
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    • pp.22-26
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    • 2001
  • ITO (Indium-tin-oxide) thin films were deposited on glass substrates by a dc magnetron sputtering system using ITO powder target. The methods of heat treatment are important factor to obtain high quality ITO films with low electrical resistivity and good optical transmittance. Therefore, both methods of the substrate temperature and post-deposition annealing temperature have been compared on the film structural, electrical and optical properties. A preferred orientations shifts from (411) to (222) peak at annealing temperature of 200$\^{C}$. Minimum resistivity of ITO film is approximately 8.7$\times$10$\^$-4/ Ωcm at substrate temperature of 450$\^{C}$. Optical transmittances at post annealing temperature above 200$\^{C}$ are 90%. As a result, the minimum value of annealing temperature that is required for the recrystallization of as-deposited ITo thin films is 200$\^{C}$.

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Electrical/Optical Characterization of Zn-Sn-O Thin Films Deposited through RF Sputtering

  • Park, Chan-Rok;Yeop, Moon-Su;Lee, Bo-Ram;Kim, Ji-Soo;Hwang, Jin-Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.360-360
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    • 2012
  • Zn-Sn-O (Zinc-Tin-Oxide; ZTO) thin films have been gaining extensive academic and industrial attentions owing to a semiconducting channel materials applicable to large-sized flat-panel displays. Due to the constituent oxides i.e., ZnO and SnO2, the resultant Zn-Sn-O thin films possess artificially controllable bandgaps and transmittances especially effective in the visible regime. The current approach employed RF sputtering in depositing the Zn-Sn-O thin films onto glass substrates at ambient conditions. This work places its main emphases on the electrical/optical features which are closely related to the combinations of processing variables. The electrical characterizations are performed using dc-based current-voltage characteristics and ac-based impedance spectroscopy. The optical constants, i.e., refractive index and extinction coefficient, are calculated through spectroscopic ellipsometry along with the estimation of bandgaps. The charge transport of the deposited ZTO thin films is based on electrons characteristic of n-type conduction. In addition to the basic electrical/optical information, the delicate manipulation of n-type conduction is indispensible in diversifying the industrial applications of the ZTO thin films as active devices in information and energy products. Ultimately, the electrical properties are correlated to the processing variables along with the underlying mechanism which largely determines the electrical and optical properties.

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Bias 전압에 따른 ZnO:Al 투명전도막의 전기적 특성 (Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering)

  • 박강일;김병섭;임동건;이수호;곽동주
    • 한국전기전자재료학회논문지
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    • 제17권7호
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    • pp.738-746
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    • 2004
  • Recently zinc oxide(ZnO) has emerged as one of the most promising transparent conducting films with a strong demand of low cost and high performance optoelectronic devices, ZnO film has many advantages such as high chemical and mechanical stabilities, and abundance in nature. In this paper, in order to obtain the excellent transparent conducting film with low resistivity and high optical transmittance for Plasma Display Pannel(PDP), aluminium doped zinc oxide films were deposited on Corning glass substrate by dc magnetron sputtering method. The effects of the discharge power and doping amounts of $Al_2$$O_3$ on the electrical and optical properties were investigated experimentally. Particularly in order to lower the electrical resistivity, positive and negative bias voltages were applied on the substrate, and the effect of bias voltage on the electrical properties of ZnO:Al thin film were also studied and discussed. Films with lowest resistivity of $4.3 \times 10 ^{-4} \Omega-cm$ and good transmittance of 91.46 % have been achieved for the films deposited at 1 mtorr, $400^{\circ}C$, 40 W, Al content of 2 wt% with a substrate bias of +30 V for about 800 nm in film thickness.

Electrical and Optical Properties of Ga-doped SnO2 Thin Films Via Pulsed Laser Deposition

  • Sung, Chang-Hoon;Kim, Geun-Woo;Seo, Yong-Jun;Heo, Si-Nae;Huh, Seok-Hwan;Chang, Ji-Ho;Koo, Bon-Heun
    • 한국표면공학회지
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    • 제44권4호
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    • pp.144-148
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    • 2011
  • $Ga_2O_3$ doped $SnO_2$ thin films were grown by using pulsed laser deposition (PLD) technique on glass substrate. The optical and electrical properties of these films were investigated for different doping concentrations, oxygen partial pressures, substrate temperatures, and film thickness. The films were deposited at different substrate temperatures (room temperature to $600^{\circ}C$). The best opto-electrical properties is shown by the film deposited at substrate temperature of $300^{\circ}C$ with oxygen partial pressure of 80 m Torr and the gallium concentration of 2 wt%. The as obtained lowest resistivity is $9.57{\times}10^{-3}\;{\Omega}cm$ with the average transmission of 80% in the visible region and an optical band gap (indirect allowed) of 4.26 eV.

Ga$_2$O$_3$첨가에 따른 다성분계 Optical Glass Fiber의 특성에 관한 연구 (The Study on Properties of Multicomponent Optical Glass Fiber by Adding Ga$_2$O)

  • 윤상하;강원호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 추계학술대회 논문집
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    • pp.128-134
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    • 1996
  • In this study, the thermal and optical properties of multicomponent glass optical fiber by adding heavy metal oxide Ga$_2$O$_3$were investigated. The fiber samples were made by rod in tube method. The optical loss of fiber was measured in 0.3~1.8${\mu}{\textrm}{m}$ wavelength region. As Ga$_2$O$_3$increased up to 20wt%, the transition and softening temperature of bulk glass were increased from 495$^{\circ}C$ to 579$^{\circ}C$ and from 548$^{\circ}C$ to 641$^{\circ}C$respectively. Whereas the thermal expansion coefficient was decreased from 102 to 79.1$\times$10$^{-7}$ $^{\circ}C$. The refractive index was increased from 1.621 to 1.665, and IR cut-off wavelength was enlarged from 4.64${\mu}{\textrm}{m}$ to 6.1${\mu}{\textrm}{m}$. The optical loss of fiber was decreased and more remarkably decreased in 1.146${\mu}{\textrm}{m}$~1.8${\mu}{\textrm}{m}$ wavelength region.

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Structural, electrical and optical properties of Al-doped ZnO thin films by pulsed DC magnetron sputtering

  • Ko, Hyung-Duk;Lee, Choong-Sun;Kim, Ki-Chul;Lee, Jae-Seok;Tai, Weon-Pil;Suh, Su-Jeong;Kim, Young-Sung
    • 한국결정성장학회지
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    • 제14권4호
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    • pp.145-150
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    • 2004
  • We have investigated the structural, electrical and optical properties of Al-doped ZnO (AZO) thin films grown on glass substrate by pulsed DC magnetron sputtering as functions of pulse frequency and substrate temperature. A highly c-axis oriented AZO thin film is grown in perpendicular to the substrate when pulse frequency of 30 kHz and substrate temperature of $400^{\circ}C$ was applied. Under this optimized growth condition, the resistivity of AZO thin films exhibited $7.40\times 10^{-4}\Omega \textrm{cm}$. This indicated that the decrease of film resistivity resulted from the improvement of film crystallinity. The optical transmittance spectra of the films showed a very high transmittance of 85∼90 % in the visible wavelength region and exhibited the absorption edge of about 350 nm. The results show the potential application for transparent conductivity oxide (TCO) thin films.

Reliability and Degradation Mechanism of White GaN-Based Light-Emitting Diodes

  • 김현수;정은진
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 춘계학술발표대회
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    • pp.22.2-22.2
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    • 2011
  • Reliability and degradation mechanism of conventional phosphor-converted white GaN-based light-emitting diodes (LEDs) were investigated. Under electro-thermal stress condition, the optical output degraded rapidly at the initial stress time accompanied by the change of chromatic properties. This could be attributed to the optical degradation of packaged materials, in particular, the browning of encapsulants and the darkening of reflective packages. At longer stress times, the optical output gradually decreased according to the degree of the reverse leakage currents, namely, the generation ofnonradiative recombination defects. This indicates that the optical degradation of white LEDs are dominated by the darkening of packaged materials and the generation of defects depending on the injection current and ambient temperatures. Using analyses of electroluminescence spectra, optical microscopy, electrical, optical, and thermal properties, optical degradations of white LEDs are discussed.

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3전극형 전자종이 디스플레이에서 하부전극 간격이 패널의 광특성에 미치는 영향 (Effect of Electrode Space on Optical Property in Three-Electrode Type E-paper Display)

  • 이상일;홍연찬;김영조
    • 한국전기전자재료학회논문지
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    • 제29권4호
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    • pp.231-236
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    • 2016
  • A three-electrode type reflective display (electronic paper) is designed to apply an independent electric field to each three electrodes of the cell including two electric-type of particles and electrically neutral color fluid, so single color realization is possible. In particular, the movement of particles and optical properties are decided by the electric field between two electrodes on the lower substrate. So, the effect of electric field by the distance between two electrodes on the lower substrate is studied with electrode spacing with $10{\mu}m$, $15{\mu}m$, $20{\mu}m$, and $25{\mu}m$. By our experimentation, the driving voltage induces more reliable movement of charged particles and the optical properties as compared with the threshold voltage. We ascertain the single color realization and non-inverted particle separation is possible. So the more desirable optical properties are observed in case of the short electrode like $10{\mu}m$.

Te-Ge-Sb계 박막의 결정화에 따른 광학적 특성 (The Optical Properties of Te-Ge-Sb Thin Films with Crystallization)

  • 정홍배;임숙;이영종
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 추계학술대회 논문집
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    • pp.143-146
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    • 1996
  • In (GeTe)$_{100-x}$(Sb$_2$Te$_3$)$_{x}$(x=33.5, 50, 66.5, 80 at.%) thin films, the optical properties of amorphous and crystalline thin film, XRD were studied. Also, the application for the phase change optical recording materials with the high stability and rapid erasing ability were studied. In the (GeTe)$_{100-x}$(Sb$_2$Te$_{3}$)$_{x}$ the transmittance was decreased with the increase of x. In all thin films, the transmittance was decreased and the reflectance was increased by annealing and particularly, the reflectance before and after annealing showed the large reflectance ratio. The XRD pattern, it was confined that these change of optical properties was due to the crystallization of amorphous thin films. The reflectance change was investigated using isothermal annealing condition.ion.ion.

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LED 조명용 Collimator Lens 설계변수에 따른 광학적 특성 변화에 관한 연구 (Study on the Optical Properties Change according to the LED Illumination Collimator Lens Design Parameters)

  • 원예림;박광일;장재현;김종태;유영문
    • 조명전기설비학회논문지
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    • 제30권3호
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    • pp.21-29
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    • 2016
  • In this paper, optical tracking and analysis was carried out to find the optical properties with respect to various geometric design parameters of collimator lens which is very efficient when collect the light. As a result, a whole, ellipse incident part can obtain a high light efficiency and a narrow beam angle, and angled cylinder incident part is confirmed to obtain high efficiency and a narrow beam angle at a certain height or more. When Transmission part have a specific surface which can reflect the light in forward direction, a good optical properties was confirmed.