• Title/Summary/Keyword: Optical Measurement

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Design of an Asymmetric-custom-surface Imaging Optical System for Two-dimensional Temperature-field Measurement

  • Guanghai Liu;Ming Gao;Jixiang Zhao;Yang Chen
    • Current Optics and Photonics
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    • v.8 no.5
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    • pp.484-492
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    • 2024
  • In response to the difficulty of synchronously obtaining multiwavelength images for fast two-dimensional (2D) temperature measurement, a multispectral framing imaging optical system is designed, based on the segmented-aperture imaging method and asymmetric surface shape. The system adopts a common-aperture four-channel array structure to synchronously collect multiwavelength temperature-field images. To solve the problem of asymmetric aberration caused by being off-axis, a model of the relationship between incident and outgoing rays is established to calculate the asymmetric custom surface. The designed focal length of the optical system is 80 mm, the F-number is 1:3.8, and the operating wavelength range is 0.48-0.65 ㎛. The system is divided into four channels, corresponding to wavelengths of 0.48, 0.55, 0.58, and 0.65 ㎛ respectively. The modulation transfer function value of a single channel lens is higher than 0.6 in the full field of view at 35 lp/mm. The experimental results show that the asymmetric-custom-surface imaging system can capture clear multiwavelength images of a temperature field. The framing imaging system can capture clear images of multiwavelength temperature fields, with high consistency in images of different wavelengths. The designed optical system can provide reliable multiwavelength image data for 2D temperature-field measurement.

A New Method of Noncontact Measurement for 3D Microtopography in Semiconductor Wafer Implementing a New Optical Probe based on the Precision Defocus Measurement (비초점 정밀 계측 방식에 의한 새로운 광학 프로브를 이용한 반도체 웨이퍼의 삼차원 미소형상 측정 기술)

  • 박희재;안우정
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.1
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    • pp.129-137
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    • 2000
  • In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

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Measurement of the effective optical thickness of optical media using intermode beat interferometer scheme (두 종모드 레이저 빛 사이의 맥놀이 신호를 이용한 간섭계에 의한 유효 광학 두께 측정)

  • 윤신영;조규만;이용산
    • Korean Journal of Optics and Photonics
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    • v.8 no.1
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    • pp.26-30
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    • 1997
  • A wide dynamic range heterodyne interferometer scheme using intermode beat between a stabilized, dual frequency He-Ne laser beam has been applied for a measurement of optical thickness of an optical medium. Resolution of the optical thickness measurement is about $\pm$ 1.74 ${\mu}{\textrm}{m}$. Using this technique, we are able to determine the optical thickness of an organic dye film. We also obtain a map of the optical thickness variations over a surface of the film

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Phase Bias Independent Fade-free Optical Fiber Interferometric Vibration Sensor

  • Youngwoong Kim;Jongyeol Kim;Younggwan Hwang;Gukbeen Ryu;Young Ho Kim;Myoung Jin Kim
    • Current Optics and Photonics
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    • v.8 no.5
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    • pp.456-462
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    • 2024
  • We propose a novel fade-free optical fiber interferometric vibration sensor using a simple setup with a 90° optical hybrid. The interferometer consists of all-optical components without the phase modulators and complex demodulation processes that were previously used to compensate for signal fading induced by phase bias change. Fade-free output was successfully obtained by in-phase and quadrature detection with a π/2 phase shifting scheme. Theoretical analysis and measurement results showed that the proposed interferometric vibration sensor operates independently of the phase bias state of interfering waves.

A Study of the Boring Bar Vibration Measurement using Optical Fiber Sensor (보링바 고유진동 계측을 위한 광섬유 진동센서 연구)

  • Song, Doo-Sang;Hong, Jun-Hee;Jeong, Hwang-Young;Kang, Dae-Hwa;Kim, Byung-In
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.4
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    • pp.107-113
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    • 2009
  • In this paper, we studied of measurement the vibration of natural frequency using optical fiber sensor. The boring bar for measurement of vibration in use optical fiber sensor has the advantage of direct measure for the frequency than accelerometer. Because it deal with output value on electrical signal of optical fiber in physical disturbance when it measures the frequency of vibration. The optical fiber sensor measured the vibration of boring bar by the gap in sensing jig while optical fiber just kept contact with boring bar. A prototype system was composed of jig part with gap and optical system part. In this paper, we found out the possibility to measurement of vibration by the gap in use optical fiber.

A Study of the Real-time Sensing by the Optical Current Sensor for GIS

  • Park, Won-Zoo;Kim, Yeong-Min
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.23 no.7
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    • pp.75-80
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    • 2009
  • In this study, a Web server was constructed using LabVIEW's DataSocket, which makes possible acquisition, analysis, and saving in real time. The output value of the optical current sensor at the web server PC was measured and the output value was displayed using the Web browser of the client PC. DataSocket by LabVIEW makes the construction of a Web server easier than other languages and is compatible with other application programs. An optical current sensor was composed using a 1310 [nm] laser diode, and 9/125 [${\mu}m$] standard single mode optical fiber and was created to be a close type sensor. Data measurement using Web servers has the advantage of monitoring electric power systems at a great distance and can fuse IT technology and electric power systems. Also, this measurement uses inexpensive mounting and programming when compared to existing measurement equipment allowing the construction of a measurement system in any situation or surrounding.

Measurement of Multimode Fiber Bandwidth by the Fourth-Order Spectra of Amplified Spontaneous Emission

  • Moon, Sucbei;Kim, Dug Young
    • Journal of the Optical Society of Korea
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    • v.18 no.1
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    • pp.15-22
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    • 2014
  • We present a novel bandwidth measurement scheme for multimode optical fibers. Amplified spontaneous emission (ASE) radiation was utilized for a source of intrinsically modulated light with a wide modulation bandwidth. In our measurement scheme, the continuous-wave (CW) ASE light that passed through a multimode fiber (MMF) under test was analyzed by the fourth-order power with a high-speed photodetector and an electric spectrum analyzer. The modulation transfer function of the multimode fiber could be directly measured with the photoelectric spectra in the modulation frequency domain. The measurement result of our method was experimentally compared to that of the conventional measurement scheme based on the impulse response measurement. It has been found that our scheme provides a stable measurement means of MMF characterization that is suitable for the field testing due to the simplicity of the system.