• Title/Summary/Keyword: Optical Interferometry

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Measurement of Deformations in Micro-Area Using High Resolution AFM Scanning Moiré Technique (고분해능 원자 현미경 스캐닝 무아레 기법을 이용한 미소 영역의 변형량 측정)

  • Park, Jin-Hyoung;Lee, Soon-Bok
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.6 s.261
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    • pp.659-664
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    • 2007
  • $Moire\'{e}$ interferometry is a useful technique to assess the reliability of electronic package because $Moire\'{e}$ interferometry can measure the whole-field and real-time deformations. The shear strain of a small crack site is important to the reliability assessment of electronic package. The optical limitation of $Moire\'{e}$ interferometry makes ambiguous the shear strain of a small area. An atomic force microscope (AFM) is used to measure the profile of a micro site. High resolution of AFM can apply to the $Moire\'{e}$ technique. AFM $Moire\'{e}$ technique is useful to measure the shear strain of a small area. In this research, the method to accurately measure the deformation of a small area by using AFM $Moire\'{e}$ is proposed. A phase-shifting method is applied to improve the resolution of AFM $Moire\'{e}$.

A Study on Measurement and Analysis of In-Plane Deformations by Using Laser Speckle Interferometry (I) (레이저 스페클 간섭법을 이용한 면내 변형 측정 및 해석에 대한 연구 (I))

  • 강영준;노경완;강형수
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.11
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    • pp.121-129
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    • 1998
  • In-plane ESPI(Electronic Speckle Pattern Interferometry) was devised to measure in-plane deformations and rotation of a specimen with laser in this study. ESPI is a optical measuring method to be able to measure the deformations of engineering components and materials in industrial fields. The conventional measuring methods of surface deformations such as the strain gauge have many demerits because they are contact and point-to-point measuring ones. But that ESPI is noncontact, nondestructive and whole field measuring method can overcome previous disadvantages. We used ESPI which is sensitive to in-plane displacement for measuring in-plane deformations of a disk. And the 4-frame phase shifting method was used for the quantitative analysis. First of all, the system calibration was done due to an in-plane rotation before getting deformations of a disk. Finally we showed good agreement between the experiment results and those of the FEA(Finite Element Analysis).

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Generating a True Color Image with Data from Scanning White-Light Interferometry by Using a Fourier Transform

  • Kim, Jin-Yong;Kim, Seungjae;Kim, Min-Gyu;Pahk, Heui Jae
    • Current Optics and Photonics
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    • v.3 no.5
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    • pp.408-414
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    • 2019
  • In this paper we propose a method to generate a true color image in scanning white-light interferometry (SWLI). Previously, a true color image was obtained by using a color camera, or an RGB multichannel light source. Here we focused on acquiring a true color image without any hardware changes in basic SWLI, in which a monochrome camera is utilized. A Fourier transform method was used to obtain the spectral intensity distributions of the light reflected from the sample. RGB filtering was applied to the intensity distributions, to determine RGB values from the spectral intensity. Through color corrections, a true color image was generated from the RGB values. The image generated by the proposed method was verified on the basis of the RGB distance and peak signal-to-noise ratio analysis for its effectiveness.

A Study on the Measurement of Vibration Mode Shape using Holographic interferometry (홀로그래픽 간섭법을 이용한 진동모드의 계측에 관한 연구)

  • 김광래
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.9 no.3
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    • pp.130-135
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    • 2000
  • In this study the vibration behavior of the stiffened double cylinder was experimently analyzed. Due to the complex structure of the double cylinder the outside cylinder frequency responses to the exciting forces applied on various posi-tions were analyzed by using spectrum analyzer in conjunction with an accelerometer and the natural frequencies were obtained. The technique of time-averaged holographic interferometry is applied to study the vibration characteristics of outside cylinder with stiffening T frame. The experimental data showed that the T frame had salient effect of damping on the testing structure at most of resonances. however the experimental results also revealed interesting phenomenon. At some particular frequencies the T frame. The experimental data showed that the T frame had salient effect of damping on the testing structure at most of resonances. However the experimental results also revealed interesting phenomenon. At some particular frequencies the T frame seemed to behave as a transmitter. In addition it has been successfully demon-started that optical method such as holographic interferometry is well suited for the identification of mode shapes. They can give us a whole-field non-contact measurement instead of the point-wise measurement by accelerometer in classical modal testing.

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Thickness Measurement of a Transparent Thin Film Using Phase Change in White-Light Phase-Shift Interferometry

  • Kim, Jaeho;Kim, Kwangrak;Pahk, Heui Jae
    • Current Optics and Photonics
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    • v.1 no.5
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    • pp.505-513
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    • 2017
  • Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

Correcting the Elastic-modulus Error of Quartz Glass Using Digital Speckle-pattern Interferometry

  • Ziyang Song;Weixian Li;Sijin Wu;Lianxiang Yang
    • Current Optics and Photonics
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    • v.7 no.4
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    • pp.337-344
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    • 2023
  • Three-point bending is the main method for measuring the elastic modulus of a thin plate. Although various displacement transducers may be used to measure the bending, these are single-point measurements, and it is difficult to eliminate the error caused by eccentric load and shear force. Error-correction models for the elastic modulus of quartz glass using digital speckle interferometry are proposed for eccentric load and shear force. First, the positional misalignment between maximum deflection and load is analyzed, and the error caused by eccentric load is corrected. Then, the additional displacement caused by shear force at different positions of the quartz glass plate is explored. The effect of shear deformation is also corrected, by measuring two points. Since digital speckle interferometry has the advantage of full-field measurement, it can simultaneously obtain deflection data for multiple points to realize error correction. Experimental results are presented to demonstrate that the proposed model can effectively correct the measurement error of the elastic modulus.

Adaptive Extraction Method for Phase Foreground Region in Laser Interferometry of Gear

  • Xian Wang;Yichao Zhao;Chaoyang Ju;Chaoyong Zhang
    • Current Optics and Photonics
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    • v.7 no.4
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    • pp.387-397
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    • 2023
  • Tooth surface shape error is an important parameter in gear accuracy evaluation. When tooth surface shape error is measured by laser interferometry, the gear interferogram is highly distorted and the gray level distribution is not uniform. Therefore, it is important for gear interferometry to extract the foreground region from the gear interference fringe image directly and accurately. This paper presents an approach for foreground extraction in gear interference images by leveraging the sinusoidal variation characteristics shown by the interference fringes. A gray level mask with an adaptive threshold is established to capture the relevant features, while a local variance evaluation function is employed to analyze the fluctuation state of the interference image and derive a repair mask. By combining these masks, the foreground region is directly extracted. Comparative evaluations using qualitative and quantitative assessment methods are performed to compare the proposed algorithm with both reference results and traditional approaches. The experimental findings reveal a remarkable degree of matching between the algorithm and the reference results. As a result, this method shows great potential for widespread application in the foreground extraction of gear interference images.

Measurement of Refractive Index Profile of GRIN plastic optical fiber using Moire interferometry (모아레 간섭 방법을 이용한 GRIN 플라스틱 광 섬유의 굴절률 측정에 관한 연구)

  • 이현호;유장훈;채규민;주홍렬;박승한
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.204-205
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    • 2002
  • 근래 활발히 연구되고 있는 광통신 분야에서 광섬유는 중요한 위치를 차지하고 있으며 현재까지 여러 가지 연구가 되어져 왔다. 광섬유 중 플라스틱 광섬유는 근거리 광통신 분야에 사용을 위해서 활발한 연구와 개발이 이루어지고 있다. 이러한 광섬유의 특성을 결정짓는 중요한 요소 중 하나가 광섬유의 굴절률 분포이다. 광섬유의 굴절률 분포는 광 전송특성을 결정짓는 요소로서 이러한 이유 때문에 좋은 전송특성을 위해 GRIN 광섬유의 개발과 연구가 이루어져 왔다. (중략)

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Improvement of Contour Fringes by using Addition of Incremental Images (화상 증분 축적법을 이용한 등고선 간섭무늬의 개선)

  • Kang, Young-June;Kim, Gye-Sung;Ryu, Weon-Jae;Kwon, Yong-Ki
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.12
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    • pp.190-197
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    • 1999
  • Electronic speckle contouring(ESC) is the optical method for measuring shape by using fringe-projection techniques in electronic speckle pattern interferometry. It has the advantage of being non-contacting and can also give a field view of the surface under investigation. Fringes in ESC represent the difference in depth along the view direction between the master wavefront and the test component. The contour maps of three-dimensional diffuse objects are obtained by small shifts of optical fiber carrying the dual-object-beams and 4-frame phase shift. We proposed the contouring method by shifting the collimated illumination beams through optical fiber in order to obtain the contour fringe patterns. And also, we performed addition of incremental addition of images and experiments based on it. we obtained both quantitative increment without decorrelation effect and qualitative improvement by reducing the noise of contour fringes.

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