• 전산구조공학
• /
• 제17권3호
• /
• pp.53-56
• /
• 2004

• 한국자기학회:학술대회 개요집
• /
• 한국자기학회 1994년도 춘계연구발표회 논문개요집
• /
• pp.74-75
• /
• 1994

• 한국전자통신학회논문지
• /
• 제12권5호
• /
• pp.731-736
• /
• 2017

본 논문에서는 광통신용 공진기에 필요한 광섬유의 오목한 면 제작에 관한 연구를 진행하였다. 불산(Hydrofluoric acid) 용액과 이 용액에 잘 흡수될 수 있는 파장인 $1.55{\mu}m$의 레이저를 인가하여 광열효과를 유도하였고, 식각 용액에서의 광열효과를 통해 광섬유 끝단의 곡률 반경을 자유롭게 변경할 수 있는 점을 현미경 사진 촬영으로 확인하였다. 빔 프로파일러를 이용하여 제작한 결과물의 끝단에서 방사되는 빔의 크기 변화를 관측하여 유효성을 검증하였고 본 논문의 저자들은 제시한 방식이 광통신용 공진기에 적용 가능성이 있을 것으로 보고 있다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1522-1526
• /
• 2005

In this study, the fabrication of large area silicon mirror is accomplished by anisotropic etching using MEMS for implementation of integrated optical pickup and the process condition is also established for improving the mirror surface roughness. Until now, few results have been reported about the production of highly stepped $9.74^{\circ}$ off-axis-cut silicon wafer using wet etching. In addition rough surface of the mirror is achieved in case of long etching time. Hence a novel method called magnetorheolocal finishing is introduced to enhancing the surface quality of the mirror plane. Finally, areal peak to valley surface roughness of mirror plane is reduced about 100nm in large area of $mm^2$ and it is applicable to optical pickup using infrared wavelength.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1995년도 추계학술대회 논문집
• /
• pp.351-356
• /
• 1995

A optical switch which on the LiNbO$_3$substrate is fabricated by using proton exchange method and self-alignet method. The annealing at 400[$^{\circ}C$] was carried out to control waveguide width and depth. A self-aligned method, which doesn\`t need the additional mask precesses, was applied to simplify the fabrication processes and to maximize efficiency of electric field application. The depths of the two annealed optical waveguides, which were measured by using ${\alpha}$-step, ware 1.435[K${\AA}$] and 1,380[K${\AA}$]. Using ${\alpha}$-step facility, we examined that the width of waveguides is increased from 5[$\mu\textrm{m}$] to 6.45[$\mu\textrm{m}$] and 6.3[$\mu\textrm{m}$] due to the annealing effects. The process of proton exchange was done at 400[$^{\circ}C$] for 60[min] and annealing process was done at 400[$^{\circ}C$] for 60[min]. The high speed optical modulator has very good figures of merits: the measured voltage of the input waveguide power is 3.5[V], the voltage of the coupling waveguide power is 3.9[mV], and -29.5[dB] crosstalk and 8[V] switching voltage were achieved.

• Journal of the Optical Society of Korea
• /
• 제15권4호
• /
• pp.394-397
• /
• 2011

For the purpose of fabricating off-axis aspheric optics, we propose an 8-axis-polishing machine combined with a testing tower whose height is up to 9 m. The proposed polishing machine was designed and analyzed by using a well-known finite element method. The eight axes of the machine have a synchronized motion generated by a computer, and each axis was calibrated by a heterodyne laser interferometer or an optical encoder. After calibration, the maximum positioning error of the machine was less than 2 ${\mu}m$ within a whole 2 m ${\times}$ 2 m area. A typical fabrication result of a ${\phi}1.5$ m concave mirror was also described in this manuscript.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2001년도 춘계학술대회 논문집
• /
• pp.865-868
• /
• 2001

We designed and fabricated a planner-type thermoelastic microactuator with a latch-up operation for optical switching. Latch-up actuation is prerequisite to implement an optical switch with low power consumption and high reliability. The proposed microactuator consists of four cantilever-shaped thermal actuators, four displacement linkages, two shallow arch-shaped leaf springs, a mobile shuttle mass with a micromirror, and four elastic boundaries. The structural layer of the planar microactuator is phosphorous-doped 12$\mu\textrm{m}$-thick polysilicon, and the sacrificial layer is LTO(Low Temperature Oxide) of 3$\mu\textrm{m}$thickness. The displacement of actuator is as large as 3$\mu\textrm{m}$when the length of actuation bar is 100$\mu\textrm{m}$in length at 5V input voltage. The proposed microactuators have advantages of easy assembly with other optical component by way of fiber alignment in the substrate plane, and its fabrication process features simplicity while retaining batch-fabrication economy.

• 한국전자파학회논문지
• /
• 제28권1호
• /
• pp.25-32
• /
• 2017

본 논문에서는 플루오린화 수소산(hydrofluoric acid)과 표면 장력을 이용한 손실이 낮은 광섬유형 방향성 결합기 제작 방법을 제안한다. 제안한 방향성 결합기 제작 방법은 기존에 일반적으로 이용하던 열원을 이용한 제작 방법과는 다르게 다양한 장비들이 요구되지 않으며, 마멸을 이용한 방법보다 손실이 낮으며, 제작 과정이 매우 쉽다. 또한, 제작된 결과물은 테이퍼드(tapered) 형태의 아디아바틱(adiabatic)한 구조로 인해 광통신에서 널리 이용되는 C-band 영역에서 파장 의존성이 낮아 광통신에서 유망한 역할을 맡을 수 있다.

• Applied Science and Convergence Technology
• /
• 제24권6호
• /
• pp.250-253
• /
• 2015

High contrast grating (HCG) is the structure made up of the sub-wavelength grating of high-index and the surrounding layer of low-index, which reveals high contrast between two materials. Its advantages include high reflectivity over a broad bandwidth, polarization and wavelength selectivity, optical high-Q resonator, and phase modulation. In this work, the HCG structure comprising of indium tin oxide (ITO) and Silicon (Si), for the surrounding layer and the grating layer respectively, was studied. Its theoretical model was established, and transmittance, phase and optical behavior were calculated by rigorous coupled-wave analysis and finite element method. Furthermore, the established structure was fabricated to validate its feasibility. The fabricated structure shows the focusing capability whose length is about $10{\mu}m$, and the feasibility of the structure was demonstrated. It is also meaningful that ITO layer can contribute to the fabrication of the HCG structure, leading to enable the structure to be electrical-driven.

• 전자공학회논문지A
• /
• 제31A권6호
• /
• pp.88-97
• /
• 1994

We describe the design, fabrication, and performance of the optical fiber-photodiode 1$\times$12 arry module using mesa-type InS10.53T GaS10.47TAS/INP 1$\times$12 PIN photodiode array. We fabricated the PIN PD array for high-speed optical fiber parallel data link optimizing quantum efficiency, operating speed sensitivity from the PIN-FET structure, and electrical AC crosstalk. For each element of the array, the diameter of the photodetective area is 80 $\mu$m, the diameter of the p-metal pad is 90 $\mu$m, and the photodiode seperation is 250 $\mu$m to use Si v-groove. Ground conductor line is placed around diodes and p-metal pads are formed in zigzag to reduce Ac capacitance coupling between array elements. The dark current (IS1dT) is I nA and the capacitance(CS1pDT) is 0.9 pF at -5 V. No signifcant variations of IS1dT and CPD from element to element in the array were observed. We calulated the coupling efficiency for 10/125 SMF and 50/125 GI MMF, and measured the responsivity of the PD array at the wavelength is 1.55 $\mu$ m. Responsivities are 0.93 A/W for SMF and 0.96 A/W for MMF. The optical fiber-PD array module is useful in numerous high speed digital and analog photonic system applications.