• Journal of the Korean Society of Manufacturing Process Engineers
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• v.6 no.4
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• pp.28-35
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• 2007

Currently, most of all valves using at the semiconductor & LCD manufacturing process are packless type. Such valves are needed to have the functions to protect perfectly from the leakage of fluid by using bellows and diaphragm instead of the grand packing. But not only those valves made in Korea are not available at this point, but also advanced foreign manufacturers do not open enough their data on the basic technology. Otherwise although they open the data a little, they are almost data about stainless steel for pneumatic valves. In this paper, it was focused on the fluid valves for chemical & DI water based on the data of steel valves which are already using commercially. And also this study concentrated to collect the basic developing data of Eco-On/Off diaphragm valve by ourselves.