• 한국기계가공학회지
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• 제2권1호
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• pp.75-84
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• 2003

In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.

• 한국기계가공학회지
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• 제2권3호
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• pp.56-61
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• 2003

This paper described about on-machine profile measurement of aspheric surfaces using contact probing technique in ultra precision machine. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime using a circle leaf spring mechanism and a capacitive-type sensor. The contact probe which is installed on the z-axis is In touch with the aspheric objects which is fixed on the spindle of the diamond turning machine(DTM) during the measuring procedure. The x, z-axis motions of the machine are monitored by a set of two orthogonal plane mirror type laser interferometers. As a results, the developed contact probe on-machine measurement system showed 10 nanometers repeatability with a ${\pm}2{\sigma}$ and uncertainty of 200 nmPv.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.400-407
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• 1995

The straightness property is one of fundamental geometric tolerances to be strictly controlled for guideways of machine tools and measuring machines. The staightness measurement for long guideways was usually difficult to perform, and it needed additional equipments or special treatment with limited application. In this paper, a new approach is proposed using the profile matching technique for the long guideways, which can be applicable to most of straghtness measurements. An edge of relativelly sthort length is located along a divided section of a long guideway, and the local straightness measurement is performed. The edge is then moved to the next section with several positions overlap. After thelocal straightness profile is measured for every section along the long guideway with overlap, the global straightness profile is constructed using the profile matching technique based on theleast squares method. The proposed techinique is numerically tested for two cases of known global straightness profile arc profile and irregular profile and those profiles with and without random error intervention, respectively. When norandom errors are involved, the constructed golval profile is identical to the original profile. When the random errors are involved, the effect of the number of overlap points are investigated, and it is also found that the difference between the difference between the constructed and original profiles is very close to the limit of random uncertainty with juist few overlap points. The developed technique has been practically applied to a vertical milling machine of moving table type, and showed good performance. Thus the accuracy and efficiency of the proposed method are demonstrated, and shows great potential for variety of application for most of straightness measuirement cases using straight edges, laser optics, and angular measurement equipments.

• Journal of Mechanical Science and Technology
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• 제19권8호
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• pp.1576-1581
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• 2005

Generally, the optical components are fabricated by grinding, lapping, and polishing. And, those processes take long time to obtain such a high surface quality. Therefore, in the case of large optical component, the on-machine inspection (OMI) is essential. Because, the work piece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm method for measuring surface profile of large optical concave mirror. The measuring accuracy and uncertainty for suggested method are studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $3\~5\;{\mu}m$. Those inspection data are provided for correcting the residual figuring error in lapping or polishing processes.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.838-841
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• 2000

To improve the accuracy of products and improve the product quality, we need to enhance the machining accuracy of the machine tools. To this point of view, measurement and inspection of finished part as well as error analysis of machine tools has been studied for last several decades. OMM(On the Machine Measurement) has been issued to alternate with CMM, pointing out disadvantages of high expenses and lots of setting time in CMM. In this paper, we study 1) the spherical surface manufacturing by volumetric error compensation of machine tool, 2) the system development of OMM without detaching work piece from a bed of machine tool after working. 3) the generation of the finished part profile by On the machine measurement. Furthermore, the output of OMM is compared with that of CMM, and verified the feasibility of the measurement system.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.288-293
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• 2005

A earn profile grinding machine is a mandatory machine tool for manufacture of high precision contoured cam. Experimental evaluation of modal analysis is an effective tool to investigate dynamic behavior of a machine. This paper presents the measurement system and experimental investigation on the modal analysis of a grinding machine. The weak part of the machine is found by the experimental evaluation. The results provide structure modification data for good dynamic behaviors. And safety of the machine was confirmed by the modal analysis of modified machine design. Finally, the cam profile grinding machine was successfully developed.

• 대한기계학회논문집A
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• 제30권12호
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• pp.1649-1657
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• 2006

Fizeau interferometer is well known optical instrument for measuring the lens profile accurately. The object of this study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for astronomical purpose. Measuring of large optical lens, the object could not be moved as small one but the measuring instrument must be moved for the alignment, because of the geometric conditions and the accuracy of the stage. Therefore, a five axis stage is designed to align the Interferometer instead of the measuring object. This instrument will be used for an on machine measuring system in polishing machine for large optical lens.

• 한국기계가공학회지
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• 제12권3호
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• pp.61-68
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• 2013

Automatic measurement system is required since cycle time and cost of production are increased by various factors in manual systems. This paper presents a machine vision based prototype measurement system for the automotive axisymmetric shape parts which are generally measured by a manual system that is required the tolerance of the part is very small on each machined surface. This measurement system adopts a method in which optical lens is transferred along the profile of the part to minimize measurement cycle time. The main interest of this paper is a development of an optimum measurement algorithm to the outside diameter of the parts that can be applied to various combinations of hardware. The operating system used to implement the whole system is Window XP and corresponding environment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.391-395
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• 2002

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on the single point diamond turning machine(SPDTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of On-machine Measurement System in this investigation is capable of providing a repeatability of 20 nanometers with a $\pm$20 uncertainty of 300 nanometers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.109-110
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• 2009