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자화된 $SF_6$ 유도결합형 플라즈마를 이용한 SiC 식각 특성에 관한 연구

  • 이효영;김동우;박병재;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.14-14
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    • 2003
  • Silicon carbide (SiC)는 높은 power 영역과 높은 온도영역에서도 작동 가능한 우수한 반도체 물질이다. 또한 우수한 열적 화학적, 안정성을 가지고 있어 가흑한 조건에서의 소자로써도 사용 가능하다. 현재 SiC 적용분야로는 우수한 전기적, 기계적 성질을 이용한 미세소자(MEMS)와 GaN 와 거의 유사한 격자상수를 가지는 것을 이용한 GaN epitaxial 성장의 기판으로도 사용되어진다. 그러나 SiC 는 기존의 습식식각 용매에 대해 화학적 안정성을 가지고 있기 때문에 전자소자의 제작에 있어서 플라즈마를 이용한 건식식각의 중요성이 대두되어지고 있다. 소자제작에 있어 이러한 건식식각시 식각 단면의 제어, 이온에 의한 낮은 손상 정도, 매끄러운 식각 표면, 그리고 고속의 식각 속도둥이 요구되어진다. 본 실험에서는 식각 속도의 증가와 수직한 식각 단면둥을 획득하기 위하여 SF6 플라즈마에서 Source power, dc bias voltage, 그리고 외부에서 인가되는 자속의 세기를 변화시쳐가며 식각 속도, 식각 마스크와의 식각 션택비, 식각 단면둥과 같은 SiC 의 식각 특성을 관찰하였다. 식각 후 식각 단면은 주사전자 현미경(SEM)을 통해 관찰하였다. 본 실험에서의 가장 높은 식각 속도는 분당 1850n 로써 이때의 공정조건은 1400W 의 inductive power, -600V 의 dc bias voltage, 20G 의 외부자속 세기이었다. 또한, 높은 inductive power 조건과 낮은 dc bias voltage 조건에서 Cu는 $SF_6$ 플라즈마 내에서 식각부산물의 증착으로 인해 SiC 와 무한대의 식각선택비를 보였다. 이러한 Cu 마스크를 사용한 SiC 의 식각에서는 식각 후 수직한 식각 단변을 관찰할 수 있었다. 것올 알 수 있다. 따라서, 기존의 pve 보다 세라믹 기판의 경우가 수분 흡수율이 높아 더 오랫동안 전류를 흐르게 하여 방식성이 개선된 것으로 판단된다.을 통해 경도가 증가한 시편의 경우 석출상의 크기가 5nm 이하로 매우 작고 대체로 기지와 연속적인 계면을 형성하나, 열처리가 진행될수록 석 출상의 크기가 커지고 임계크기 이상에 이르면 연속적인 계면은 거의 발견되지 않고, 대부 분 불연속적이고 확연한 계면을 형성함을 관찰 할 수 있었다. 알루미나(${\alpha}-Al_2O_3$) 기판 위에 증착한 $(Ti_{1-x}AI_{x})N$ 피막은 마찬가지로 (200) 우선 방위를 나타내었으나, 그 입자의 크기가 수십 nm로 고속도강위에 증착한 피막에 비해 상당히 크게 형성되었다. 또한 열처리 후에 AIN의 석출이 진행됨에도 불구하고 경도 증가는 나타나지 않고, 열처리가 진행됨에 따라 경도가 감소하는 양상만을 나타내었다. 결국 $(Ti_{1-x}AI_{x})N$ 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에

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Association of Estrogen Receptor Alpha and Interleukin 6 Polymorphisms with Lymphovascular Invasion, Extranodal Extension, and Lower Disease-Free Survival in Thai Breast Cancer Patients

  • Sa-Nguanraksa, Doonyapat;Suntiparpluacha, Monthira;Kulprom, Anchalee;Kummalue, Tanawan;Chuangsuwanich, Tuenjai;Avirutnan, Panissadee;O-Charoenrat, Pornchai
    • Asian Pacific Journal of Cancer Prevention
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    • v.17 no.6
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    • pp.2935-2940
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    • 2016
  • Breast cancer is the most frequent type of cancer diagnosed among women worldwide and also in Thailand. Estrogen and estrogen receptors exert important roles in its genesis and progression. Several cytokines have been reported to be involved in the microenvironment that promotes distant metastasis via modulation of immune and inflammatory responses to tumor cells. Estrogen receptor genetic polymorphisms and several cytokines have been reported to be associated with breast cancer susceptibility and aggressiveness. To investigate roles of genetic polymorphisms in estrogen receptor alpha (ESR1) and interleukin 6 (IL6), breast cancer patients and control subjects were recruited from the Division of Head, Neck and Breast Surgery (Siriraj Hospital, Bangkok, Thailand). Polymorphisms in ESR1 (rs3798577) and IL6 (rs1800795 and rs1800797) were evaluated by real-time PCR in 391 breast cancer patients and 79 healthy controls. Associations between genetic polymorphisms and clinicopathological data were determined. There was no association between genetic polymorphisms and breast cancer susceptibility. However the ESR1 rs3798577 CT genotype was associated with presence of lymphovascular invasion (OR=2.07, 95%CI 1.20-3.56, p=0.009) when compared to the TT genotype. IL6 rs1800795 CC genotype was associated with presence of extranodal extension (OR= 2.30, 95%CI 1.23-4.31, p=0.009) when compared to the GG genotype. Survival analysis showed that IL6 rs1800797 AG or AA genotypes were associated with lower disease-free survival. These findings indicate that polymorphisms in ESR1 and IL6 contribute to aggressiveness of breast cancer and may be used to identify high risk patients.

Monitoring on Extraction Yields and Functional Properties of Onion (Allium cepa) Extracts by Using Response Surface Methodology (반응표면분석을 이용한 양파의 추출효율 및 기능성에 대한 모니터링)

  • Lim, Tae-Soo;Do, Jeong-Ryong;Kwon, O-Jun;Kim, Hyun-Ku
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.36 no.1
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    • pp.105-110
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    • 2007
  • Extraction characteristics of onion (Allium cepa) and the functional properties of corresponding extracts were monitored by the response surface methodology (RSM). The maximum extraction yield of 44.02% was obtained under the specific extraction conditions, such as microwave power of 143.13 W, ethanol concentration of 61.77% and extraction time of 3.39 min. The maximum electron donating ability (EDA) was found as 45.85% at the conditions of 143.55 W microwave power, 27.52% ethanol concentration and 4.86 min extraction time. The maximum inhibitory effect on tyrosinase was 65.40% at 132.29 W, 36.47% and 7.62 min. The maximum superoxide dismutase (SOD)-like activity was 69.84% under the extraction conditions of 99.41 W, 8.47% and 7.13 min. Based on superimposition of four dimensional RSM with respect to extraction yield, electron donating ability and SOD-like activity obtained under the various extraction conditions, the optimum ranges of extraction conditions were found to be microwave power of 0$\sim$120 W, ethanol concentration of 70$\sim$80% and extraction time of 2$\sim$10 min.

Effects of Al and Mn on the Growth, Nutrient Status and Gas Exchange Rates of Pinus densiflora Seedlings (소나무 묘목(苗木)의 생장(生長), 영양상태(營養狀態) 및 가스교환속도(交換速度)에 미치는 Al과 Mn의 영향(影響))

  • Lee, Choong Hwa;Jin, Hyun-O;Kim, Young-Kul
    • Journal of Korean Society of Forest Science
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    • v.90 no.1
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    • pp.74-82
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    • 2001
  • The effects of Al and Mn concentration on dry weight growth, nutrient status and gas exchange rates of 2-Year-old Japanese red pine(Pinus densiflora) seedlings grown in a nutrient culture solution were investigated. Al was added as aluminum chloride at 0, 10, 30 or 60ppm, and Mn was added as manganese chloride at 0, 30 or 60ppm to the nutrient culture solution. The pH of the solution was maintained at 4.0 by adding HCl or NaOH solution. The seedlings were transplanted into the nutrient culture solution, then they were grown in a greenhouse for 90 days. The interactive effects of Al and Mn on the dry weight growth of the seedlings were not significant. There were a main effect of Al or Mn on the dry weight growth and element concentrations of the seedlings. The treatment with Al of ${\geq}10ppm$ or that with Mn of 60ppm induced a significant reduction in the dry weight growth, which indicates that the effect of Al is stronger than that of Mn. The chlorophyll content of needles was not affected by Al treatment, but was significantly reduced by treatment with Mn of 60ppm. Furthermore, the treatment with Al of 60ppm or that with Mn of ${\geq}30ppm$ caused a significant reduction in the dark respiration rate of the roots. The net photosynthetic rate of the seedlings reduced with increasing the concentration of Al or Mn in the nutrient culture solution, which suggests that Al or Mn induced reductions in the relative growth rate(RGR) and net assimilation rate(NAR) of the seedlings were mainly due to the decrease of net photosynthesis.

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Comparison of Dental Biofilm Reduction between Rolling Method and Modified Stillman Method (회전법과 변형스틸맨법의 치면세균막 감소 효과 비교)

  • Han, Ye-Seul;Lim, Soon-Ryun;Cho, Young-Sik
    • Journal of dental hygiene science
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    • v.12 no.6
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    • pp.660-665
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    • 2012
  • The purpose of this study was to use basic data of dental hygiene curriculum by comparing the rolling method and modified stillman method. Plaque measurement method, Q-ray examination of the clinical utilization value shall review. True experimental design is randomized controlled trial to the intervention group and the control group. Measurements are plaque control record (PCR; O'Leary index) measurements and Quantitative Light induced fluorescnece Digital (QLFD) shooting as a pre-test was conducted. Intervention group is modified stillman method, control group is rolling method. Intervention after 5 weeks, PCR measurement and QLFD shooting was carried out as a post-test. Rolling method and modified stillman method plaque reduction did not differ. Intervention before and after the results of the comparison showed reduced plaque score after brushing law education. Also, Plaque reduction differences were more pronounced modified stillman method than rolling method. PCR and QLFD values of the correlation was not confirmed but SPS Score and the lower value of the ${\Delta}R$ value of the correlation. Plaque of maturity tooth that are not observed visually.

Petrogenesis of Mesozoic granites at Garorim Bay, South Korea: evidence for an exotic block within the southwestern Gyeonggi massif?

  • Kim, Ji In;Choi, Sung Hi;Yi, Keewook
    • Geosciences Journal
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    • v.23 no.1
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    • pp.1-20
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    • 2019
  • We present data from the Mesozoic Keumkang, Palbong, and Baekhwa granites in Garorim Bay, in the southwestern part of the Gyeonggi massif, South Korea. Using major and trace element concentrations, Sr-Nd-Pb isotopic compositions, and sensitive high-resolution ion microprobe (SHRIMP) zircon U-Pb ages, we aim to constrain the petrogenesis of the granites and explain their origin within a broader regional geological context. SHRIMP U-Pb zircon ages of $232.8{\pm}3.2$, $175.9{\pm}1.2$, and $176.8{\pm}9.8$ Ma were obtained from the Keumkang, Palbong and Baekhwa granites, respectively. The Late Triassic Keumkang granites belong to the shoshonite series and show an overall enrichment in large ion lithophile elements (LILE), a depletion in high field strength elements (HFSE) relative to primitive mantle, compared with neighboring elements in the primitive mantle-normalized incompatible trace element diagram with notable high Ba and Sr contents, and negligible Eu anomalies. The Keumkang granites are typified by highly radiogenic Sr and unradiogenic Nd and Pb isotopic compositions: $(^{87}Sr/^{86}Sr)_i=0.70931-0.70959$, $(^{143}Nd/^{144}Nd)_i=0.511472-0.511484$ [$({\varepsilon}_{Nd})_i=-17.0$ to -16.7], and $(^{206}Pb/^{204}Pb)=17.26-17.27$. The Middle Jurassic Palbong and Baekhwa granites belong to the medium- to high-K calc-alkaline series, and show LILE enrichment and HFSE depletion similar to the Keumkang granites, but exhibit significant negative anomalies in Ba, Sr, and Eu. Furthermore, they have elevated Y and Yb contents at any given $SiO_2$ content compared with other Jurassic granitoids from the Gyeonggi massif. The Palbong and Baekhwa granites have slightly less radiogenic Sr and more radiogenic Nd and Pb isotopic compositions [$(^{87}Sr/^{86}Sr)_i=0.70396-0.70908$, $(^{143}Nd/^{144}Nd)_i=0.511622-0.511660$, $({\varepsilon}_{Nd})_i=-15.4$ to -14.7, $(^{206}Pb/^{204}Pb)=17.56-17.76$] relative to the Keumkang granites. The Keumkang granites are considered to have formed in a post-collisional environment following the Permo-Triassic Songrim orogeny that records continent-continent collision between the North and South China blocks, and may have formed by fractional crystallization of metasomatized lithospheric mantle-derived mafic melts. The Palbong and Baekhwa granites may have been produced from a gabbroic assemblage at pressures of less than ~15 kbar, associated with subduction of the paleo-Pacific (Izanagi) plate at the Eurasian continental margin. Elevated ${\varepsilon}_{Nd}(t)$ values in the granitoids from the southwestern part of the Gyeonggi massif relative to those of the central and northern parts, together with the comparatively shallow depth of origin, imply the presence of an exotic block in the Korean lithosphere.

Effect of a Silicate Fertilizer Supplemented to a Medium on the Growth and Development of Potted Plants (배지에 첨가한 규산질 비료가 분식물의 발근과 생육에 미치는 영향)

  • Bae, Min Ji;Park, Yoo Gyeong;Jeong, Byoung Ryong
    • FLOWER RESEARCH JOURNAL
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    • v.18 no.1
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    • pp.50-56
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    • 2010
  • This experiment was carried out to examine the effect of a silicate fertilizer on the growth and development of potted plants. Cutting of Kalanchoe blossfeldiana 'Kaluna' and 'Taos', and Dianthus caryophyllus L. 'Kazan' and 'Tula' were grown in 50 and 128-cell plug trays, respectively. Rooted cuttings transplanted to the mixture of a commercial medium and perlite (5:1, v/v) supplemented with a silicate fertilizer at 0, 40, 80, 120 or $160g{\cdot}L^{-1}$ medium was evaluated. A silicate fertilizer supplementation at $40g{\cdot}L^{-1}$ medium resulted in the greatest plant height, leaf thickness, and root fresh and dry weights in both kalanchoe and carnation. However, plant height was suppressed in the treatment of a silicate fertilizer supplementation at higher concentrations in both kalanchoe and carnation. According to the scanning electron microscope images of transversal sections of tissues of roots and leaves in kalanchoe and carnation, the treatment of a silicate fertilizer supplementation at $40g{\cdot}L^{-1}$ medium resulted in plants with more compact tissue than the control.

The Origin of Thinking Mind (우리는 왜 생각하는 존재가 되었는가?)

  • Park, Man-joon
    • Journal of Korean Philosophical Society
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    • v.131
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    • pp.131-163
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    • 2014
  • This Paper aims to elaborate on the origin of thinking mind. And this is a cooperative project between philosophy and neuroscience and brain science. I have written this paper in admiration for the achievements of twentieth century neuroscience and brain science, and out of desire to assist the subject in future. Much of the history of modern philosophy, from Descartes and Kant forward, consists of failed models of brain. As Edward O. Wilson precisely said, the shortcoming is not the fault of the philosophers, who have doggedly pushed their methods to the limit, but a straightforward consequence of the biological evolution of the brain. Guiding that investigation down pathways that will illuminate brain research is a task of neuroscience and brain science. Investigating logical relations among concepts is a philosophical task. If we are to understand the neural structures and dynamics that make perception, thought, intentional behaviour possible, clarity about these concepts and categories and their relations is essential. Hence our joint venture of philosophy and science. Sure, it is human beings that perceives, not parts of its brain. And it is human beings that who think and reason, not their brain. But the brain and its activities make it possible for human beings-not for it-to perceive and think, to feel emotions, and to form and pursue projects. Thus We try to investigate and reveal the origin of thinking mind as follow: 1) The difference between chimpanzee and human beings 2) brain and mind 3) the origin of thinking 4) the wisdom of nature.

Characterizing the Structure of China's Passenger Railway Network Based on the Social Network Analysis(SNA) Approaches : Focused on the 2008, 2013, and 2018 Railway Service Data, Respectively (사회 네트워크 분석 방법론에 기초한 중국의 여객 철도 네트워크 특성 분석 : 2008년, 2013년, 2018년 운행 데이터를 중심으로)

  • Zhao, Pei-Song;Lee, Jin-Hee;Lee, Man-Hyung
    • The Journal of the Korea Contents Association
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    • v.19 no.10
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    • pp.685-697
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    • 2019
  • The study aimed to analyze the structure of China's passenger railway network in the years of 2008, 2013, and 2018, respectively. At the same time, it tried to investigate its derivative impact on the patterns of Chinese urban network. The analytical tool was based on the NetMiner4.0. In order to measure network characteristics of China's passenger railway network, it primarily focused on the degree centrality, betweenness centrality, and closeness centrality. First of all, the higher degree centralities, with a few exceptions, were observed in BeiJing, ShangHai, GuangZhou, WuHan, XiAn, ChengDu, HaErBin, and ShenYang over a decade. In contrast, the higher betweenness centralities were recorded in cities of higher development potential including WuLuMuQi, GuiYang, ShenYang, and KunMing. The closeness centrality analyses confirmed the fact that most metropoles like BeiJing, ShangHai, and GuangZhou kept the highest train accessibility during the same research period. At the same time, the opening up of a new stretch of high speed railway network has consecutively strengthened connectivity between BeiJing and TianJin. Owing to unprecedented development of railway traffic and its extensive operations, this study believes that Chinese major cities, without interruption, would pursue a series of urban policy alternatives geared towards railway stations-oriented networking and competitively try to extend their network ranges.

Influence of Shading on Early Growth of Cardamine komarovii Nakai (차광조건이 는쟁이냉이 초기생육에 미치는 영향)

  • Kim, Do Hyun;Kim, Sang Geun;Song, Chi Hyeon;Im, Hyeon Jeong;Choi, Kyu Seung;Oh, Beom Seok;Kim, Yang Su;Song, Ki Seon;Won, Chang O
    • Proceedings of the Plant Resources Society of Korea Conference
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    • 2019.10a
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    • pp.40-40
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    • 2019
  • 는쟁이냉이는 전국 각지 산지의 응달이나 물가에서 자생하는 여러해살이풀이다. 3월 경 눈을 뚫고나와 가장 이른 봄나물로 식용하기도 한다. 특유의 매운 맛이 있어 식용작물로 발전가능성이 높은 식물종이다. 따라서 본 연구는 는쟁이냉이 재배기술 정립을 위한 기초자료 수집의 일환으로 수행되었다. 차광에 따른 는쟁이냉이 생육특성을 비교 분석하기 위해 경북 봉화군 소재 국립백두대간수목원 양묘장 노지에 무차광, 40% 차광, 55%차광, 65%차광 처리구를 배치 후, 실험을 진행하였다. 생육특성의 비교를 위해 초장, 초폭, 엽 수, 엽길이, 엽너비, 엽병길이, SPAD 값 총 7가지 항목에 대해 생장기(6월), 휴면기(9월) 두 차례 측정하였다. 측정 결과, 모든 측정값이 차광구가 무차광구보다 높게 나타났다. 또한 무차광구는 6월 조사 이후, 7월 말까지 생장량이 줄어들다가 전량 지상부 고사가 발생하여 는쟁이냉이 재배를 위해서는 차광처리가 필수적으로 필요하다는 것을 확인할 수 있었다. 측정항목 중 초장, 초폭, 엽길이, 엽너비, 엽병길이는 차광율이 높을수록 증가하는 경향을 보였다. 그러나 엽록소함량을 추정할 수 있는 SPAD 값은 40% 차광구가 가장 높았고 55%차광구, 65%차광구에서는 오히려 감소하는 경향을 보였다. 또한 엽 수도 40% 차광구가 가장 높았다. 위 결과를 종합해볼 때, 는쟁이냉이 재배 시 55% 이상의 차광율을 적용하면 잎 자체의 크기 증대를 기대할 수 있으며, 40% 수준의 차광율을 적용하면 잎 수와 혁질의 잎을 생산할 수 있을 것으로 여겨진다. 다만, 본 실험은 는쟁이냉이 재배 생산량에 대한 부분에 집중하였고 상품화를 위해서는 품질에 관한 연구가 추가적으로 이루어져야 할 것으로 판단된다.

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