• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.247-247
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• 2010

DLC(diamond-like carbon)는 비정질 고상 탄소의 하나로 다이아몬드의 유사한 높은 경도, 내마모성, 윤활성, 전기절연성, 화학적 안정성을 가지고 있는 재료이다. 이러한 우수한 특성 때문에 DLC는 박막의 형태로 여러 종류의 보호코팅에 많이 응용되고 있다. DLC의 광범위한 응용에 있어 가장 큰 문제점은 박막이 갖는 높은 잔류응력과 이에 따른 기판과의 낮은 접착성으로 알려져 있다. 최근 연구에 의하면, plasma pre-treatment를 통해 PTFE기판에 DLC박막의 adhesion strength를 증진 시킬 수 있다고 보고하였다. 또한 ion beam technique를 이용하여 잔류응력을 줄이고 기판과의 접착력을 높일 수 있다는 것도 보고 되었다. 이에 기인하여 pre-treatment가 DLC합성에 잔류응력을 낮추고 기판과의 접착성을 높이는 효과를 보일 것이라고 가정하고 연구하였다. 본 연구에서 pre-treatment가 Diamond-like Carbon의 stainless steel 합성시 stress와 adhesion에 어떤 효과가 있는지 알아보기 위해, pre-treatment시와 synthesis of DLC film시에 13.56MHz 150W RF플라즈마 화학기상 증착 (RF-PECVD) 법을 통해 합성되었다. pre-treatment시에 H2(80 sccm), O2(10 sccm), N2(20 sccm)의 가스 종류를 다르게 하였고, synthesis of DLC film시에는 CH4 (20 sccm), H2 (80 sccm)가스의 유량을 고정하였다. 합성된 DLC 박막은 Contact Angle Analyze, Raman spectroscopy, Scratch tester를 이용하여 접촉각, D peak Position, G peak Position, ID/IG ratio, 접착력을 측정하였다.

• Journal of the Korean institute of surface engineering
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• v.53 no.5
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• pp.201-206
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• 2020

A SiOxCy(-H) thin film was synthesized by atmospheric pressure dielectric barrier discharge(APDBD), and a SiO₂-like layer was formed on the surface of the film by oxidation treatment using oxygen plasma. Hexamethylcyclotrisiloxane was used as a precursor for the SiOxCy(-H) synthesis, and He gas was used for stabilizing APDBD. Oxygen permeability was evaluated by forming an oxidized SiOxCy(-H) thin film on a PET film. When the single-layer oxidized SiOxCy(-H) film was coated on the PET, the oxygen gas permeability decreased by 46% compared with bare PET. In case of three-layer oxidized SiOxCy(-H) film, the oxygen gas permeability decreased by 73%. The oxygen permeability was affected by the thickness of the SiO₂-like layer formed by oxidation treatment rather than the thickness of the SiOxCy(-H) film. The excellent corrosion resistance was demonstrated by coating an oxidized SiOxCy(-H) thin film on the silver-coated aluminum PCB for light emitting diode (LED).

• Korean Journal of Materials Research
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• v.26 no.8
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• pp.427-429
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• 2016

A multi-step deposition process for the gap-filling of submicrometer trenches using dimethyldimethoxysilane (DMDMOS), $(CH_3)_2Si(OCH_3)_2$, and $C_xH_yO_z$ by plasma enhanced chemical vapor deposition (PECVD) is presented. The multi-step process consisted of pre-treatment, deposition, and post-treatment in each deposition step. We obtained low-k films with superior gap-filling properties on the trench patterns without voids or delamination. The newly developed technique for the gap-filling of submicrometer features will have a great impact on inter metal dielectric (IMD) and shallow trench isolation (STI) processes for the next generation of microelectronic devices. Moreover, this bottom up gap-fill mode is expected to be universally for other chemical vapor deposition systems.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.569-572
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• 2001

Selective. highly stable determination of epinephrine(adrenalin) was achieved in cyclic voltammetric measurement carried out at electrochemically treated conductive boron-doped diamond electrode. Boron-doped diamond electrodes were prepared on single crystal Si wafers by microwave plasma chemical vapor deposition and $B_{2}O_{3}$ was dissolved in acetone/methanol(9:1) mixture solution so that the B/C weight ratio ca. $10^{4}ppm$. Epinephrine is a kind of catecholamines, which secreted from adrenal marrow cells. The serious problem to detection of epinephrine is the interference phenomena of electroactive constituent. including AA. In this study. electrochemical treatment of BDD was carried out to discriminate between epinephrine and AA responses. Experimental results showed that the peak potential of AA oxidation shift to the positive direction and the oxidation peak of epinephrine was unchanged. The effect of electrochemical treatment was maintained up to 40hrs.

• Journal of Powder Materials
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• v.7 no.2
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• pp.63-70
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• 2000

Thermal spray coating process has proven to be effective at producing hard, dense, wear resistance coatings on the relatively mild substrates. Among several spraying techniques, HVOF (High Velocity Oxygen Fuel) and plasma coating processes, which are preferentially used for the wear resistance application such as capstans, have been applied in this study. The effects of pre-treatment, it-process and post-treatment parameters on the wear and mechanical properties of WC+12%Co, Cr3C2 and Al2O3 powder coatings have been investigated and correlated with the microstructures. The results indicated that the carbide coating was more preferable to the oxide coatings and the post-treatments consisting of vacuum annealing and sealing on carbide coatings led to significant improvements in wear resistance, adhesive strength and coating phase stabilization over the other processing techniques in this application.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.428-428
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• 2013

Red color light emitting diodes were fabricated using CdSe/CdS/ZnS quantum dots (QDs). Patterned indium-tin-oxide (ITO) was used as a transparent anode, and oxygen plasma treatment on a surface of ITO was performed. Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) was spin coated on the ITO surface as a hole injection layer. Then CdSe/CdS/ZnS QDs was spin coated and thermal treatment was performed for the cross-linking of QDs. TiO2 was coated on the QDs as an electron transport layer, and 150 nm of aluminum cathode was formed using thermal evaporator and shadow mask. The device shows a pure red color emission at 606 nm wavelength. Device characteristics will be presented in detail.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.12
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• pp.824-828
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• 2016

In this study, effects of ICP (inductively coupled plasma) treatment on PAR thin film have been investigated. A maximum etch rate of the PAR thin films and the selectivity of PAR to PR were obtained as 110 nm/minand 1.1 in the $CF_4/O_2$ (5:15 sccm) gas mixture. We present the surface properties of PAR thin film with various treatment conditions. The surface morphology and cross section of the PAR thin film was observed by AFM (atomic force microscopy) and FE-SEM (filed emission scanning electron microscopy).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.569-572
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• 2001

Selective, highly stable determination of epinephrine(adrenalin) was achieved in cyclic voltammetric measurement carried out at electrochemically treated conductive boron-doped diamond electrode. Boron-doped diamond electrodes were prepared on single crystal Si wafers by microwave plasma chemical vapor deposition and B$_2$O$_3$ was dissolved in acetone/methanol(1:1) mixture solution so that the B/C weight ratio ca. 10$^3$ppm.. Epinephrine is a kind of catecholamines, which secreted from adrenal marrow cells. The serious problem to detection of epinephrine is the interference phenomena of electroactive constituent, including AA. In this study, electrochemical treatment of BDD was carried out to discriminate between epinephrine and AA responses. Experimental results showed that the peak potential of AA oxidation shift to the positive direction and the oxidation peak of epinephrine was unchanged. The effect of electrochemical treatment was maintained up to 40hrs.

• Nano
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• v.13 no.10
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• pp.1850120.1-1850120.9
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• 2018

Two-dimensional poly(dimethylsiloxane) (PDMS) films with wavy patterns were studied in order to investigate reversible and irreversible wetting effects. Pre-strained, surface oxidized layers of PDMS were used to form relieved wavy geometries, on which hydrophobic functionalization was carried out in order to produce irreversible wetting effects. Wavy-patterned PDMS films showed time-dependent reversible wetting effects. The degree of surface wettability could be tuned by the choice of wavy groove geometries. And the groove geometries were controlled via $O_2$ plasma treatment and mechanical pre-straining. The pre-strained, buckled PDMS films were applied to the fabrication of hydrophobic polystyrene nano-patterns using colloidal self-assembly, where the colloids were arrayed in two-dimensional way. The wavy polystyrene films were found to be more hydrophobic relative to flat polystyrene films. The grooving methodology used in this study could be applied to enhancing the hydrophobicity of other types of polymeric thin films, eliminating the need for chemical treatment.

• Korean journal of food and cookery science
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• v.13 no.4
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• pp.500-506
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• 1997

The purpose of this study was to investigate the effect of H$_2$O fraction of Dioscorea japonica Thunb (DJT) with vitamin E on blood glucose and fat metabolism in streptozotocin (STZ) diabetic rats. Sprague-Dawley rats (200∼230 g) weighing were divided into five groups; the normal group, the STZ-control group, the DJT group, the DJT-vitamin E group and the vitamin E group. Diabetes was induced in the male rats by injection of STZ into tail vein at a dose of 45 mg/kg body weight. The H$_2$O fraction of DR (500 mg/kg) and 10 mg/kg of vitamin E (㎗-${\alpha}$-tocopherol) given orally were administered for 14 days. The body weight was monitored and levels of hematocrit, protein and glucose were determined. The plasma concentrations of cholesterol; triglyceride, free fatty acid and HDL-cholesterol were measured. The activities of aminotranseferase were analysed. The body weight gain was shown no significantly higher in the normal group than all STZ groups. The administration of H$_2$O fraction of DJT and vitamin E showed a significant increase in plasma protein concentrations. The all STZ group was formed to be effective in decreasing blood glucose levels. Plasma insulin concentrations were highered in diabetic rats fed on H$_2$O fraction of DJT. Plasma triglyceride and free fatty acid levels were lower in the vitamin E group than the STZ-control group. The plasma cholesterol levels of all STZ groups were not significantly different and HDL-cholesterol levels were increased in all STZ groups fed on H$_2$O fraction of DJT and vitamin E, specially in the DJT-vit. E group. The all STZ group does not significantly change aminotransferase activity of diabetic rats. These results indicated that DJT was a potential candidate for a treatment of diabetes which can enhance insulin activity The effect of vitamin E on insulin activity will be examined in more detail.