• Title/Summary/Keyword: O-plasma treatment

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Improvement in the bias stability of zinc oxide thin-film transistors using an $O_2$ plasma-treated silicon nitride insulator

  • Kim, Ung-Seon;Mun, Yeon-Geon;Gwon, Tae-Seok;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.180-180
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    • 2010
  • Thin film transistors (TFTs) based on oxide semiconductors have emerged as a promising technology, particularly for active-matrix TFT-based backplanes. Currently, an amorphous oxide semiconductor, such as InGaZnO, has been adopted as the channel layer due to its higher electron mobility. However, accurate and repeatable control of this complex material in mass production is not easy. Therefore, simpler polycrystalline materials, such as ZnO and $SnO_2$, remain possible candidates as the channel layer. Inparticular, ZnO-based TFTs have attracted considerable attention, because of their superior properties that include wide bandgap (3.37eV), transparency, and high field effect mobility when compared with conventional amorphous silicon and polycrystalline silicon TFTs. There are some technical challenges to overcome to achieve manufacturability of ZnO-based TFTs. One of the problems, the stability of ZnO-based TFTs, is as yet unsolved since ZnO-based TFTs usually contain defects in the ZnO channel layer and deep level defects in the channel/dielectric interface that cause problems in device operation. The quality of the interface between the channel and dielectric plays a crucial role in transistor performance, and several insulators have been reported that reduce the number of defects in the channel and the interfacial charge trap defects. Additionally, ZnO TFTs using a high quality interface fabricated by a two step atomic layer deposition (ALD) process showed improvement in device performance In this study, we report the fabrication of high performance ZnO TFTs with a $Si_3N_4$ gate insulator treated using plasma. The interface treatment using electron cyclotron resonance (ECR) $O_2$ plasma improves the interface quality by lowering the interface trap density. This process can be easily adapted for industrial applications because the device structure and fabrication process in this paper are compatible with those of a-Si TFTs.

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Optimization of polymer substrate's surface treatment for improvement of transparent conducting oxide thin film (투명전도막의 특성향상을 위한 기판 표면처리법의 최적화)

  • Choi, Woo-Jin;Kim, Ji-Hoon;Jung, Ki-Young;Darma, Jessie;Choo, Young-Bae;Sung, Youl-Moon;Kwak, Dong-Joo
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1425_1426
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    • 2009
  • In this study, commercially available polyethylene terephthalate(PET), which is widely used as a substrate of flexible electronic devices, was modified by dielectric barrier discharge(DBD) method in an air condition at atmospheric pressure, and aluminium - doped zinc oxide (ZnO:Al) transparent conducting film was deposited on PET substrate by r. f. magnetron sputtering method. Surface analysis and characterization of the plasma-treated PET substrate was carried out using contact angle measurements, X-ray Photoelectron Spectroscopy(XPS) and Atomic Force Microscopy (AFM). Especially the effect of surface state of PET substrate on some important properties of ZnO:Al transparent conducting film such as electrical and morphological properties and deposition rate of the film, was studied experimentally. The results showed that the contact angle of water on PET film was reduced significantly from $62^{\circ}$ to $43^{\circ}$ by DBD surface treatment at 20 min. of treatment time. The plasma treatment also improved the deposition rate and electrical properties. The deposition rate was increased almost linearly with surface treatment time. The lowest electrical resistivity as low as $4.97{\times}10^{-3}[\Omega-cm]$ and the highest deposition rate of 234[${\AA}m$/min] were obtained in ZnO:Al film with surface treatment time of 5min. and 20min., respectively.

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Surface Treatment of Mg95Zn4.3Y0.7 Alloy Powder Consolidates using Plasma Electrolytic Oxidation (플라즈마 전해산화공정을 이용한 Mg95Zn4.3Y0.7 합금분말 성형체의 표면특성제어)

  • Kim, J.H.;Choi, H.S.;Kim, D.H.;Hwang, D.Y.;Kim, H.S.;Kim, T.S.
    • Journal of Powder Materials
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    • v.15 no.2
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    • pp.95-100
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    • 2008
  • The investigation is to modify the mechanical and chemical properties of Mg alloys using a combination of rapid solidification and surface treatment. As the first approach, $Mg_{95}Zn_{4.3}Y_{0.7}$ was gas atomized and pressure sintered by spark plasma sintering process (SPS), showing much finer microstructure and higher strength than the alloys as cast. Further modification was performed by treating the surface of PM Mg specimen using Plasma electrolytic oxidation (PEO) process. During the PEO processing, MgO layer was initiated to form on the surface of Mg powder compacts, and the thickness and the density of MgO layer were varied with the reaction time. The thickening rate became low with the reaction time due to the limited diffusion rate of Mg ions. The surface morphology, corrosion behavior and wear resistance were also discussed.

Effects of cultivated wild ginseng pharmacopuncture on lowering lipid and oxidative capacity in biochemical and molecular biological study in obese rats (산양산삼약침의 지질강하 및 항산화효과에 대한 생화학적 및 분자생물학적 검토)

  • Choi, Eun-Ju;Lee, Joon-Moo;Won, Seung-Hwan;Kwon, Ki-Rok
    • Journal of Pharmacopuncture
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    • v.9 no.1
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    • pp.5-20
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    • 2006
  • Objectives : This study was carried out to identified the effects of distilled cultivated wild ginseng pharmacopuncture to the obesity. Methods : Cultivated wild ginseng pharmacopuncture was administered on the points of chung-wan(CV12), $Ch'{\breve{o}}nch'u$(ST25), and Chok-samni(ST36) on lowering lipid and oxidative capacity in biochemical and molecular biological aspects were investigated in obese rats fed with high fat diet. Results : 1. The contents of plasma ${\beta}-lipoprotein$ showed a tendency to decrease in the pharmacopuncture groups compared to the control group. In the pharmacopuncture groups, the values of ST25 and ST36 pharmacopuncture groups showed lower value. 2. The contents of plasma free fatty acids showed a tendency to decrease in pharmacopuncture groups compared to the control group. However, in the pharmacopuncture groups, the values were not significantly different. 3. Plasma triglyceride and glucose showed lower value in the ST25 pharmacopuncture groups compared with the other groups. 4. The activity of AST showed a tendency to decrease in the pharmacopuncture groups. However, the activity of ALT was not significantly different in all the treatment groups. 5. Plasma total cholesterol and LDL-cholesterol showed lower value in the ST25 and ST36 pharmacopuncture groups and HDL-cholesterol showed higher value in the CV12 pharmacopuncture groups than that of the other treatment groups. 6. Liver total cholesterol values didn't show significant difference in all the treatment groups, and triglyceride showed lower value in the pharmacopuncture groups. 7. The contents of plasma TEARS showed lower value in the ST25 pharmacopuncture group and contents of liver TBARS showed a tendency to decrease in the pharmacopuncture groups. However these values didn't show significant difference in the pharmaco puncture groups. 8. Liver super oxide dismutase activity showed higher value in the ST25 and ST36 pharmacopuncture groups, and the value of liver glutathione peroxidase and catalase activity showed a tendency to increase in the pharmacopuncture groups. However, these values showed no significant difference in the pharmacopuncture groups. 9. Expression of apo-B and E mRNA in liver cells was lower in the ST25 pharmacopuncture group than that of the other treatment groups. However, expression of $TNF-{\alpha}$ and leptin mRNA in adipose cell showed no difference among all the treatment groups. 10. ST25 pharmacopuncture group showed a good histological character of liver. It showed similar to that of normal group. However other treatment groups and control group showed slight vasodilation and slight fat accumulation. Conclusion : These results indicate that distilled cultivated wild ginseng pharmacopuncture suppressed adipose tissue mass and lipid peroxidation, and increased antioxidant capacity.

Effect of Plasma Electrolytic Oxidation Conditions on Oxide Coatings Properties of Die-Cast AZ91D Mg Alloy (플라즈마 전해 산화 처리조건에 따른 다이캐스트 AZ91D Mg 합금 위에 제조된 산화피막 특성)

  • Park, Seong-Jun;Lim, Dae-Young;Song, Jeong-Hwan
    • Korean Journal of Materials Research
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    • v.29 no.10
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    • pp.609-616
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    • 2019
  • Oxide coatings are formed on die-cast AZ91D Mg alloy through an environmentally friendly plasma electrolytic oxidation(PEO) process using an electrolytic solution of $NaAlO_2$, KOH, and KF. The effects of PEO condition with different duty cycles (10 %, 20 %, and 40 %) and frequencies(500 Hz, 1,000 Hz, and 2,000 Hz) on the crystal phase, composition, microstructure, and micro-hardness properties of the oxide coatings are investigated. The oxide coatings on die-cast AZ91D Mg alloy mainly consist of MgO and $MgAl_2O_4$ phases. The proportion of each crystalline phase depends on various electrical parameters, such as duty cycle and frequency. The surfaces of oxide coatings exhibit as craters of pancake-shaped oxide melting and solidification particles. The pore size and surface roughness of the oxide coating increase considerably with increase in the number of duty cycles, while the densification and thickness of oxide coatings increase progressively. Differences in the growth mechanism may be attributed to differences in oxide growth during PEO treatment that occur because the applied operating voltage is insufficient to reach breakdown voltage at higher frequencies. PEO treatment also results in the oxide coating having strong adhesion properties on the Mg alloy. The micro-hardness at the cross-section of oxide coatings is much higher not only compared to that on the surface but also compared to that of the conventional anodizing oxide coatings. The oxide coatings are found to improve the micro-hardness with the increase in the number of duty cycles, which suggests that various electrical parameters, such as duty cycle and frequency, are among the key factors controlling the structural and physical properties of the oxide coating.

Synthesis and Characterization of Soft Magnetic Composite Powders in Fe2O3-Zn System by Mechanical Alloying (기계적 합금화법에 의한 Fe2O3-Zn계 연자성 복합분말의 제조 및 특성평가)

  • Lee, Chung-Hyo
    • Korean Journal of Materials Research
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    • v.30 no.2
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    • pp.74-80
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    • 2020
  • Synthesis of composite powders for the Fe2O3-Zn system by mechanical alloying (MA) has been investigated at room temperature. Optimal milling and heat treatment conditions to obtain soft magnetic composite with fine microstructure were investigated by X-ray diffraction, differential scanning calorimetry (DSC) and vibrating sample magnetometer (VSM) measurement. It is found that α-Fe/ZnO composite powders in which ZnO is dispersed in α-Fe matrix can be obtained by MA of Fe2O3 with Zn for 4 hours. The change in magnetization and coercivity also reflects the details of the solid-state reduction process of hematite by pure metal of Zn during MA. Densification of the MA powders was performed in a spark plasma sintering (SPS) machine at 900 ~ 1,000 ℃ under 60 MPa. Shrinkage change after SPS of sample MA'ed for 5 hrs was significant above 300 ℃ and gradually increased with increasing temperature up to 800 ℃. X-ray diffraction results show that the average grain size of α-Fe in the α-Fe/ZnO composite sintered at 900 ℃ is in the range of 110 nm.

Surface Modification of Recycled Plastic Film-Based Aggregates for Use in Concrete (폐플라스틱 복합필름 기반 콘크리트용 골재의 표면 개질)

  • Kim, Tae Hun;Lee, Jea Uk;Hong, Jin-Yong
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.9 no.3
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    • pp.295-302
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    • 2021
  • Surface modification of recycled plastic film-based aggregates is demonstrated to enhance the interaction between aggregates and cement paste. It is shown that the oxygen(O2) atmospheric pressure plasma(APP) treatment leads to a drastic increase in hydrophilicity. In case of the plasma treatment at 100W of RF power, 15/4sccm of O2/Ar flow rate and 30sec of discharging time, the water contact angle on the aggregates surface decreased from 104.5° to 44.0°. In addition, the contact angle of surface modified aggregates kept in air increased with time elapse. Improvement of hydrophilicity can be explained by the formation of new hydrophilic oxygen functional groups which is identified as C-OH, C-O-C, C=O, -COOH by X-ray photoelectron spectroscopy(XPS) analysis and Fourier-transform infrared spectroscopy(FT-IR). Therefore, it can be concluded that the plasma treatment process is an effective method to improve adhesion of the recycled plastic film-based aggregates and cement paste.

Technique development of Bi-2212/2223 superconductor thick film manufacturing by plasma spraying and heat treatment (플라즈마 용사 및 열처리 공정을 통한 Bi-2212/2223 초전도체 thick film 제조의 기술 개발)

  • Lee, Seon-Hong;Cho, Sang-Hum;Ko, Young-Bong;Park, Kyeung-Chae
    • Proceedings of the KWS Conference
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    • 2005.11a
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    • pp.262-264
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    • 2005
  • $Bi_{2}Sr_{2}CaCu_{2}O_{x}$(Bi-2212) and $Bi_{2}Sr_{2}Ca_{2}Cu_{3}O_{y}$(Bi-2223) high-$T_{c}$ superconductor(HTS) coating have been prepared by plasma spraying and heaat treatment. The Bi-2212 HTS coating later is synthesized through the peritectic reaction between Sr-Ca-Cu oxide coating layer and Bi-Cu oxide coating later, and $Bi_{2}Sr_{2}CaCu_{2}O_{y}$(Bi-2212) superconducting phase grow by partial melting process. The superconducting characteristic depends strongly on the conditions of the partial melting process. the Bi-2212 HTS layer consists of the whiskers grown in the diffusion direction. Above the 2212 layer, Bi-2223 phase and secondary phase was observed. The secondary phase is distributed uniformly over the whole surface. This is caused to the microcrack on the coatings surface. Despite everything, the film shows superconducting with an onset $T_{c}$ of about 115K. There are two changes steps. One changes (1step) at 115K is due to the diamagnetism of the Bi-2223 phase and the other changes (2step) at 78K is due to the diamagnetism of the Bi-2212 phase.

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Reduction of gate leakage current for AlGaN/GaN HEMT by ${N_2}O$ plasma (${N_2}O$ 플라즈마에 의한 AlGaN/GaN HEMT의 누설전류 감소)

  • Yang, Jeon-Wook
    • Journal of IKEEE
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    • v.11 no.4
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    • pp.152-157
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    • 2007
  • AlGaN/GaN high electron mobility transistors (HEMTs) were fabricated and the effect of ${N_2}O$ plasma on the electrical characteristics of the devices was investigated. The HEMT exposed to ${N_2}O$ plasma formed by 40 W of RF power in a chamber with pressure of 20 mTorr at a temperature of $200^{\circ}C$, exhibited a reduction of gate leakage current from 246 nA to 1.2 pA by 10 seconds treatment. The current between the two isolated active regions reduced from 3 uA to 7 nA and the sheet resistance of the active layer was lowered also. The variations of electrical characteristics for HEMT were occurred within a short time expose of 10 seconds and the successive expose did not influence on the improvements of gate leakage characteristics and conductivity of the active region. The reduced leakage current level was not varied by successive $SiO_2$ deposition and its removal. The transconductnace and drain current of AlGaN/GaN HEMTs were increased also by the expose to the ${N_2}O$ plasma.

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Conductivity Improvement of Polyaniline/Nylon 6 Fabrics (폴리아닐린/나일론 6 복합직물의 전기 전도도 향상 연구)

  • 오경화;성재환;김성훈
    • Polymer(Korea)
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    • v.24 no.5
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    • pp.673-681
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    • 2000
  • Electrically conductive composites have been prepared by treating fabrics with oxidizing agent and exposing them to aniline, which deposited a substantial amount of conductive polymer within the interstices of the material. However the conductivity of the composite fabrics was limited by the irregular deposition of the conductive polymer layer. To improve the conductivity of polyaniline/nylon 6 composite fabrics, we modified the surface characteristics of nylon 6 fabrics by various plasma treatments and increased diffusion and adsorption of aniline by ultrasonic treatments. By the oxygen plasma treatment, attachment of functional groups such as C-O and C-OH increased on the surface of nylon 6 fiber, which promoted adhesion to polyaniline resulting in the higher add-on and electrical conductivity. Electrical conductivities of polyaniline/nylon 6 composite fabrics were highly increased by ultrasonic treatment, which assisted the diffusion of aniline into the inside of nylon fabrics by cavitation and vibration. Also, the effects of monomer concentration and the number of deposition cycles on the nylon 6 fabric conductivity Were investigated. As a result, the fabric conductivity increased with the monomer concentration and the number of polymerization deposition cycles.

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