EFFECT OF DEPOSITION CONDITIONS AT THE HETEROGENEOUS NUCLEATION SITES ON THE CRYSTALLIZATION BEHAVIOR OF LPCVD a-Si FILMS ON $SiO_2$
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- 한국재료학회:학술대회논문집
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- 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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- pp.68.2-68
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- 1998