• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.6
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• pp.1303-1311
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• 1988

Described is method for development of an optical roughness measurement sensor for in-subequality assurance in the precision grinding. Main approach is made based upon the Brckmann's light scattering theory, in which general solutions of the optical scattering behaviour are given under many simplifying assumptions on the model of the surfaces illuminated. For the ground surface, the assumptions are verified through computer simulation and experimental work in order to examine the validity of Beckmann's theory on predicting the optical responses according to the roughness variation. As a result, an optical monitoring strategy is derived which can evaluate the roughness value of the ground surface by statistically detecting the pattern of intensity distribution of the scattered light. Finally, the strategy is proven by comparing with the results using the stylus method.

• Current Optics and Photonics
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• v.7 no.1
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• pp.38-46
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• 2023

Optical Fourier-domain reflectometry (OFDR) sensors have been widely used to measure distances with high resolution and speed in a noncontact state. In the electroplating process of a printed circuit board, it is critically important to monitor the copper-plating thickness, as small deviations can lead to defects, such as an open or short circuit. In this paper we employ a phase-based OFDR sensor for in situ relative distance sensing of a sample with nanometer-scale resolution, during electroplating. We also develop an optical-path difference (OPD)-regulated sensing probe that can maintain a preset distance from the sample. This function can markedly facilitate practical measurements in two aspects: Optimal distance setting for high signal-to-noise ratio OFDR sensing, and protection of a fragile probe tip via vertical evasion movement. In a sample with a centimeter-scale structure, a conventional OFDR sensor will probably either bump into the sample or practically out of the detection range of the sensing probe. To address this limitation, a novel OPD-regulated OFDR system is designed by combining the OFDR sensing probe and linear piezo motors with feedback-loop control. By using multiple OFDR sensors, it is possible to effectively monitor copper-plating thickness in situ and uniformize it at various positions.