• Title/Summary/Keyword: Non-contact glass

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Submicron-scale Polymeric Patterns for Tribological Application in MEMS/NEMS

  • Singh R. Arvind;Yoon Eui-Sung;Kim Hong Joon;Kong Hosung;Jeong Hoon Eui;Suh Kahp Y.
    • KSTLE International Journal
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    • v.6 no.2
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    • pp.33-38
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    • 2005
  • Submicron-scale patterns made of polymethyl methacrylate (PMMA) were fabricated on silicon-wafer using a capillarity-directed soft lithographic technique. Polyurethane acrylate (PUA) stamps (Master molds) were used to fabricate the patterns. Patterns with three different aspect ratios were fabricated by varying the holding time. The patterns fabricated were the negative replica of the master mold. The patterns so obtained were investigated for their adhesion and friction properties at nano-scale using AFM. Friction tests were conducted in the range of 0-80 nN. Glass (Borosilicate) balls of diameter 1.25 mm mounted on cantilever (Contact Mode type NPS) were used as tips. Further, micro-friction tests were performed using a ball-on-flat type micro-tribe tester, under reciprocating motion, using a soda lime ball (1 mm diameter) under a normal load of 3,000 mN. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C$) and relative humidity ($45{\pm}5\%$). Results showed that the patterned samples exhibited superior tribological properties when compared to the silicon wafer and non-patterned sample (PMMA thin film) both at the nano and micro-scales, owing to their increased hydrophobicity and reduced real area of contact. In the case of patterns it was observed that their morphology (shape factor and size factor) was decisive in defining the real area of contact.

Low Temperature Hermetic Packaging using Localized Beating (부분 가열을 이용한 저온 Hermetic 패키징)

  • 심영대;김영일;신규호;좌성훈;문창렬;김용준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.10a
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    • pp.1033-1036
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    • 2002
  • Wafer bonding methods such as fusion and anodic bonding suffer from high temperature treatment, long processing time, and possible damage to the micro-scale sensor or actuators. In the localized bonding process, beating was conducted locally while the whole wafer is maintained at a relatively low temperature. But previous research of localized heating has some problems, such as non-uniform soldering due to non-uniform heating and micro crack formation on the glass capsule by thermal stress effect. To address this non-uniformity problem, a new heater configuration is being proposed. By keeping several points on the heater strip at calculated and constant potential, more uniform heating, hence more reliable wafer bonding could be achieved. The proposed scheme has been successfully demonstrated, and the result shows that it will be very useful in hermetic packaging. Less than 0.2 ㎫ contact Pressure were used for bonding with 150 ㎃ current input for 50${\mu}{\textrm}{m}$ width, 2${\mu}{\textrm}{m}$ height and 8mm $\times$ 8mm, 5mm$\times$5mm, 3mm $\times$ 3mm sized phosphorus-doped poly-silicon micro heater. The temperature can be raised at the bonding region to 80$0^{\circ}C$, and it was enough to achieve a strong and reliable bonding in 3minutes. The IR camera test results show improved uniformity in heat distribution compared with conventional micro heaters. For gross leak check, IPA (Isopropanol Alcohol) was used. Since IPA has better wetability than water, it can easily penetrate small openings, and is more suitable for gross leak check. The pass ratio of bonded dies was 70%, for conventional localized heating, and 85% for newly developed FP scheme. The bonding strength was more than 30㎫ for FP scheme packaging, which shows that FP scheme can be a good candidate for micro scale hermetic packaging.

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Characteristics of Nano-Size Au Fine Particles Doped TiO2 Thin Films by Sol-Gel Method (졸-겔법에 의한 나노크기 Au 미립자 분산 TiO2 박막의 특성)

  • Park, Min-Jung;Koo, Se-Na;Lee, Kyoung-Seok;Mun, Chong-Soo
    • Journal of the Korean Ceramic Society
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    • v.43 no.2 s.285
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    • pp.114-120
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    • 2006
  • Nano-size Au particle doped $TiO_2$ films were prepared with $Ti(OC_3H_7^i)_4$, polyvinylpyrrolidone(PVP), $HAuCl_4$ and $C_3H_7OH$ etc. by sol-gel method. $TiO_2$ gel films were obtained by the dip-coating method on the $SiO_2$ glass substrates, and then heat-treated at $700^{\circ}C$ for 10 min. The thickness of $TiO_2$ films were $0.7\~1.8\;{\mu}m$. It was found that the thickness of films prepared from PVP containing solution was about $2\~8$ times higher values than that of thin films without PVP. The size of Au particles doped in the films were about $350\~750\;nm$. Nano-size Au particle dispersed $TiO_2$ films showed high absorption peak at visible region 450nm, which made them good candidates for non-linear optical materials and photo-catalytic materials. The contact angle of $TiO_2$ film for water was $12.5^{\circ}$, and therefore it is clear that $TiO_2$ films have very high hydrophilic properties and the self-cleaning effects.

Characteristic Analysis of Vertical Alignment by Ion-beam Irradiation Angle and Energy Density (이온빔 조사 각도와 에너지강도에 의한 수직 배향막의 특성 분석)

  • Kang, Dong-Hun;Oh, Byeong-Yun;Kim, Byoung-Yong;Han, Jin-Woo;Kim, Young-Hwan;Ok, Chul-Ho;Han, Jeong-Min;Lee, Sang-Keuk;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.398-398
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    • 2007
  • The Liquid Crystal (LC) alignment uniformity is very important in LC devices. The alignment mechanism of LC molecules on a rubbed polyimide (PI) surface is very important for both LC fundamental research and application. So, Generally a rubbing method to align LC has been widely used to mass-produce LCD panels. But because rubbing method is contact method between rubbing fabric and indium-tin-oxide glass or flexible substrate, rubbing method has some defects, such as the electrode charges and the creation of contaminating particles. Thus we strongly recommend a non-contact alignment technique for getting rid of some defects of rubbing method. Most recently, the LC aligning capabilities achieved by ion-beam exposure on the organic and nonorganic thin film surface have been reported successfully. In this research, we studied the tilt angle generation and electro-optical performances for a NLC on homeotropic polyimide surfaces with ion-beam exposure. The LC aligning capabilities of a nematic liquid crystal (NLC) on a homeotropic PI surface using a new ion-beam method were studied. On the homeotropic PI surface, the tilt angle of the NLC by exposure ion-beam had a tendency to decrease as increased ion-beam energy density. And, on the homeotropic PI surface, the alignment character of the NLC with respect to ion-beam energy was good. And we achieved satisfactory result for EO character.

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The Measurement Method of Thermal Conductivity and Diffusivity of Thin Paint Layer Sprayed on Solid Surface (고체표면에 도포한 도료 박막의 열전도율과 열확산율의 측정법)

  • Kim, Eun-young;Park, Soo-Chun;Kim, Byung-Mun;Lee, Doug-Bong
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.3
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    • pp.311-319
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    • 1999
  • The thermal conductivity ${\lambda}_b$, thermal diffusivity ${\alpha}_b$ of the thin black paint layer sprayed on solid surface and absorptivity a for laser beam are measured by applying a non-contact measurement method of the thermophysical properties of solids. The values of a=0.67, ${\lambda}_b=1.45W/mK$ and ${\alpha}_b=1.24{\times}10^{-6}m^2/s$ are obtained for the sprayed lay~ thickness $z_b{\fallingdotseq}40\;{\mu}m$. Furthermore, for the $z_b{\fallingdotseq}24\;{\mu}m$ thick layers which arc formed by rubbing with a glass rod after spraying, the values of a=0.73, ${\lambda}_b=1.85W/mK$. and ${\alpha}_b=1.09{\times}10^{-6}m^2/s$ are obtained. It is also shown that the present thermal diffusivity ${\alpha}_b$ for $z_b{\fallingdotseq}40\;{\mu}m$ Is about 30~80% larger than those obtained by Araki et al. for the thicker layer $z_b{\fallingdotseq}150{\sim}248\;{\mu}m$. This method could be applied to the measurement of thermophysical properties of thin layer on solids.

Role of flgA for Flagellar Biosynthesis and Biofilm Formation of Campylobacter jejuni NCTC11168

  • Kim, Joo-Sung;Park, Changwon;Kim, Yun-Ji
    • Journal of Microbiology and Biotechnology
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    • v.25 no.11
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    • pp.1871-1879
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    • 2015
  • The complex roles of flagella in the pathogenesis of Campylobacter jejuni, a major cause of worldwide foodborne diarrheal disease, are important. Compared with the wild-type, an insertional mutation of the flgA gene (cj0769c) demonstrated significant decrease in the biofilm formation of C. jejuni NCTC11168 on major food contact surfaces, such as polystyrene, stainless steel, and borosilicate glass. The flgA mutant was completely devoid of flagella and non-motile whereas the wild-type displayed the full-length flagella and motility. In addition, the biofilm formation of the wild-type was inversely dependent on the viscosity of the media. These results support that flagellar-mediated motility plays a significant role in the biofilm formation of C. jejuni NCTC11168. Moreover, our adhesion assay suggests that it plays an important role during biofilm maturation after initial attachment. Furthermore, C. jejuni NCTC11168 wild-type formed biofilm with a net-like structure of extracellular fiber-like material, but such a structure was significantly reduced in the biofilm of the flgA mutant. It supports that the extracellular fiber-like material may play a significant role in the biofilm formation of C. jejuni. This study demonstrated that flgA is essential for flagellar biosynthesis and motility, and plays a significant role in the biofilm formation of C. jejuni NCTC11168.

Development of Levitation Control for High Accuracy Magnetic Levitation Transport System (초정밀 자기부상 이송장치의 부상제어기 개발)

  • Ha, Chang-Wan;Kim, Chang-Hyun;Lim, Jaewon
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.7
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    • pp.557-561
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    • 2016
  • Recently, in the manufacturing process of flat panel displays, mass production methods of inline system has been emerged. In particular the next generation OLED display manufacturing process, horizontal inline evaporation process has been tried. It is important for the success of OLED inline evaporation process to develop a magnetic levitation transport system capable of transferring a carrier equipped with a mother glass with high accuracy without any physical contact along the rail under vacuum condition. In the case of existing wheel-based transfer system, it is not suitable for OLED evaporation process requiring high cleanliness. On the other hand, the magnetic levitation transport system has an advantage that it does not generate any dust and it is possible to achieve high-precision control because there are not non-linear factors such as friction force. In this paper, we introduce the high-precision magnetic levitation transport system, which is currently under development, for OLED evaporation process.

Super Hydrophilic Properties of SiO2-TiO2 Thin Film Prepared by Sol-Gel Method (졸-겔법에 의한 SiO2-TiO2 박막의 초친수성)

  • Park, Min-Jung;Lee, Kyoung-Seok;Kang, Jong-Bong;Mun, Chong-Soo
    • Korean Journal of Materials Research
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    • v.17 no.3
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    • pp.125-131
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    • 2007
  • [ $TiO_{2}-solution$ ] was aaded in $SiO_{2}-solution$ by various composition. $SiO_{2}-TiO_{2}$ thin films were obtained by the dip-coating method on the $SiO_{2}$ glass substrates, and then heat-treated at various temperature. Nano-size $TiO_{2}$ particles dispersed $SiO_{2}-TiO_{2}$ films showed absorption peak by quantum size effect at short wavelength region $350{\sim}400nm$, which made them good candidates for non-linear optical materials and photo-catalytic materials. The thickness of $SiO_{2}-TiO_{2}$ films were $300{\sim}430nm$. The contact angle of $SiO_{2}-TiO_{2}$ films for water was $5.3{\sim}47.9^{\circ}$, and therefore it is clear that $SiO_{2}-TiO_{2}$ films have super hydrophilic properties and the self-cleaning effects.

A Plastic BGA Singulation using High Thermal Energy of $2^{nd}$ Harmonic Nd:YAG Laser

  • Lee, Kyoung-Cheol;Baek, Kwang-Yeol;Lee, Cheon
    • KIEE International Transactions on Electrophysics and Applications
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    • v.2C no.6
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    • pp.309-313
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    • 2002
  • In this paper, we have studied minimization of the kerf-width and surface burning, which occurred after the conventional singulation process of the multi-layer BGA board with copper, polyethylene and epoxy glass fiber. The high thermal energy of a pulsed Nd:YAG laser is used to cut the multi-layer board. The most considerable matter in the laser cutting of the multi-layer BGA boards is their different absorption coefficient to the laser beam and their different heat conductivity. The cut mechanism of a multi-layer BGA board using a 2$^{nd}$ harmonic Nd:YAG laser is the thermal vaporization by high temperature rise based on the Gaussian profile and copper melting point. In this experiment, we found that the sacrifice layer and Na blowing are effective in minimizing the surface burning by the reaction between oxygen in the air and the laser beam. In addition, N2 blowing reduces laser energy loss by debris and suppresses surface oxidation. Also, the beam incidence on the epoxy layer compared to polyimide was much more suitable to reduce damage to polyimide with copper wire for the multi layer BGA singulation. When the polyester double-sided tape is used as a sacrifice layer, surface carbonization becomes less. The SEM, non-contact 3D inspector and high-resolution microscope are used to measure cut line-width and surface morphology.

EO Characteristics of LC Alignment Layers Exposured Ion-beam Irradition Angles (이온빔 조사각도에 따른 액정 배향 막의 전기 광학적 특성)

  • Lee, Kang-Min;Park, Hong-Gyu;Oh, Byeong-Yun;Kim, Byoung-Yong;Kang, Dong-Hun;Han, Jin-Woo;Kim, Young-Hwan;Ok, Chul-Ho;Han, Jeong-Min;Lee, Sang-Keuk;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.400-400
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    • 2007
  • In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide under various ion beam angles. In this experiment, polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposured polyimide surface was observed. In addition, it can be achieved the good EO properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

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