An Analysis and Assessment of Transient Vibration Phenomenon for Precision Equipment Due to Adjacent Utility Operation in TFT-LCD Fab (TFT-LCD 생산공장 내 유틸리티 가동으로 인한 정밀장비 과도진동 현상 및 평가)
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- Transactions of the Korean Society for Noise and Vibration Engineering
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- v.17 no.8
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- pp.726-735
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- 2007