Effects of Vacuum Annealing on the Structural Properties of Sputtered Vanadium Oxide Thin Films (스퍼터된 바나듐 산화막의 구조적 특성에 미치는 진공 어닐링의 효과)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2002.05b
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- pp.70-73
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- 2002