• Title/Summary/Keyword: NmF2

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Inductively coupled Plasma Reactive ion etching of Ge doped silica glass using $C_2F_6$ and $NF_3$ ($C_2F_6$$NF_3$ 유도결합플라즈마를 이용한 $SiO_2$:Ge 식각에관한 연구)

  • 이석룡;문종하;김원효;이병택
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.225-225
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    • 2003
  • 실리카글라스를 기초로 하는 PLC소자는 가격, 광 손실 성질과 광섬유와의 결합효율이 좋아 광통신에 응용되어지고 있으며 Ge 도핑된 실리카 글라스는 PLC소자의 코어물질로 널리 사용되고 있다. 소작제작을 위해서는 높은 식각률과 깨끗하고 적은 표면손상을 얻어야 하므로 유도결합플라즈마를 이용한 건식식각공정개발이 이루어 져야 한다. 본 연구에서는 Ge 도핑된 실리카글라스의 식각특성을 연구하기 위해 $C_2$F/6 와 NF$_3$가스를 사용하였고 ICP power, bias power, 압력, 플라즈마와 샘플간의 거리를 변화시키면서 식각속도, 표면거칠기, 메사수직도, 마스크선택도등 기본공정 조건을 연구하고 첨가가스(CH$_4$, $O_2$), 마스크 물질(Ni, Cr, PR) 도핑농도(0.3, 0.45, 0.7%)등을 변화시키면서 식각특성을 연구하였다. 그 결과 300nm/min, 정도의 식각속도를 가지고 수직한 메사각도(~89$^{\circ}$)와 미려한 표면(표면거 칠기 1.5nm 이하)를 갖는 결과를 얻었다.

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Analysis of Solar Irradiance Measurement From a Multi-Filter Radiometer At Kwangju, South Korea.

  • Ogunjobi, K.O.;Kim, Y.J.;He, Z.;Ryu, S.Y.
    • Proceedings of the Korea Air Pollution Research Association Conference
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    • 2001.11a
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    • pp.335-335
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    • 2001
  • Direct-normal, total horizontal and diffuse horizontal irradiance data obtained from a multi-filter rotating shadowband radiometer over seven different wavelength bands (416nm, 151nm, 616nm, 675nm, 870nm and 940nm and the entire spectrum) has been analyzed at Kwangju, South Korea from June 1998 December 2000. The maximum hourly global radiation flux ranged from 0.44 MJ/$m^2$ to 2.68 MJ/$m^2$ at around 11:00-12:00 Hr local time while the maximum hourly diffuse radiation flux ranged from about 0.96 MJ/$m^2$ to 1.37 MJ/$m^2$. The maximum hourly direct irradiance ranged from 1.42 MJ/$m^2$ to 2.92 MJ/$m^2$ from June1998-2000. During the period under consideration, the average monthly global radiation recorded were 13.09 MJ/$m^2$/day, 10.58MJ/$m^2$/day and 9.78MJ/$m^2$/day for years 1998, 1999 and 2000 respectively, while the diffuse irradiance were 6.54 MJ/$m^2$/day, 5.33 MJ/$m^2$/day and 5.14 MJ/$m^2$/day for f998, 1999 and 2000 respectively. The direct irradiance values at the site were 11.63 MJ/$m^2$/day, 8.24MJ/$m^2$/day and 7.75 MJ/$m^2$/day for 1998, f999 and 2000 respectively. It was observed that each of the years has its own unique meteorological parameters that affect the quality and quantity of radiation received for each month. The annual average daily fractions of the diffuse to the global radiation (KD) were 0.51, 0.61 and 0.59 for years 1998, 1999 and 2000 respectively. Analysis indicated that the average daily KD ranged from 0.13 to a maximum value of 0.99 in May for irradiance measured at the broadband channel while the maximum and minimum KD value of 0.91 and 0.23 was recorded at wavelength band 870nm and 940nm in January and September respectively. The lowest average daily clearness index (Kt) value recorded was 0.03 in May (Spring) and the annual average daily clearness indexes are 0.45, 0.34 and 0.35 for years 1998, f999 and 2000 respectively. The frequency of clear days annually at Kwangju is 67.95%, 29.57% and 40.72% for years 1998, 1999 and 2000 respectively.

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A Study of Greenish Pigments from Rhodopseudomonas viridis by Acetone Extraction: Characteristics of Potential Food Colorant (Acetone 추출한 Rhodopseudomonas viridis 녹색색소에 대한 연구: 식용색소로서의 일반적 성질)

  • Kim, Yong-Hwan;Lee, Sang-Seob
    • Korean Journal of Food Science and Technology
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    • v.26 no.1
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    • pp.93-97
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    • 1994
  • A study of physical and chemical characteristics of pigments from Rhodopseudomonas viridis DSM 133 was carried out for development of natural greenish colorant. Through visible absorption scanning, it showed three main absorption peaks at 378, 414 and 677 nm with three minor peaks at 510, 540 and 618nm, and it was shown to be greenish color. These pigments were more stabilized in alkaline solutions than in acid of between pH 6 and 9, and it was shown to be stabilized at the temperature below $40^{\circ}C$. In the presence of light and oxygen, the stability of pigments rapidly degraded, and it became unstable in the presence of metal ion such as $Fe^{3+}$ and $Al^{3+}$. But in the presence of $Cu^{2+}$ were very stable. On the result of TLC analysis, pigments were shown to be composed of four color fractions and main color fractions were F-4 and F-2.

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Fabrication of Vesy Thin Pb(Zr, Ti)$\textrm{O}_3$ Dielectric Films of 0.12nm $\textrm{SiO}_2$ Equivalent Thickness by ECR PECVD (ECR 플라즈마 화학기상증착법에 의한 0.12nm $\textrm{SiO}_2$ 환산두계를 갖는 Pb(Zr, Ti)$\textrm{O}_3$유전박막의제조)

  • Kim, Jae-Hwan;Kim, Yong-Il;Wi, Dang-Mun;Lee, Won-Jong
    • Korean Journal of Materials Research
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    • v.7 no.8
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    • pp.635-639
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    • 1997
  • ECR-PECVD법을 사용하여 450-49$0^{\circ}C$이하의 온도에서 Pt/SiO$_{2}$/Si기판 위에 PZT 박막을 증착하였다. 기판 온도가 46$0^{\circ}C$ 이하일 경우에는 페로브스이트 상과 제2상으로 이루어진 박막이 성장하였으며 기판온도가 47$0^{\circ}C$이상일 때에는 페로브스카이트 단일상의 PZT 박막이 성장하였다. 49$0^{\circ}C$에서 매우 얇은 페로브스카이트의 PZT 박막을 증착한 후 $650^{\circ}C$에서 1분간 raped thermal annealing(RTA) 처리한 결과 박막의 조성과 결정성에는 거의 변화가 없었으나 박막의 전하 저장 밀도는 크게 향상되었다. 이는 RTA 처리에 의한 저유전 계면층의 소멸이 주된 이유라고 판단된다. 열처리 후 두께 40-45nm의 PZT박막은 200kV/cm의 전장 하에서 $10^{-6}$$\textrm{cm}^2$이하의 누설전류값을 갖고 있었으며, 인가전압 1V에서 300fF/$\mu$$m^2$의 정전용량, 즉 SiO$_{2}$환산두께 0.12nm를 나타내었다.

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Luminescent properties of magnesium thiogallate phosphor with green emission for LEDs

  • Kim, Kyung-Nam;Kim, Jae-Myung;Choi, Kyoung-Jae;Park, Joung-Kyu;Kim, Chang-Hae
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1331-1333
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    • 2005
  • A magnesium thiogallate phosphor doped with europium was prepared by solid-state method. This phosphor has green emission near 535 nm due to the allowed transition from $4f^65d$ at an excitation state $(T_{2g})$ to $4f^7 (^8S_{7/2}) at a ground state of $Eu^{2+}$ ion. This phosphor shows a wide excitation spectrum from ultra violet (300 nm) to bluish green (515 nm).

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Ir(ppy)3의 도핑 위치에 따른 유기 발광 다이오드의 특성 연구

  • Kim, Sun-Gon;Choe, Byeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.151.2-151.2
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    • 2015
  • 본 연구에서는 indium-tin-oxide(ITO)/1,4,5,8,9,11-hexaazatriphenylene-hexacarbonitrile(HAT-CN)/N,N'-di(naphthalene-lyl)-N,N'-diphenyl-benzidine(NPB)/4,4'-Bis(N-carbazolyl)-1,1'-biphenyl(CBP)/2,2',2"-(1,3,5-Benzinetriyl)-tris(1-phenyl-1-H-benzimidazole)TPBi/tris-(8-hydroxyquinoline) aluminum($Alq_3$)/LiF/Al 구조를 가진 유기 발광 다이오드 소자의 발광층에 $Ir(ppy)_3$(2% wt)을 도핑하여 소자의 특성 변화를 살펴보았다. $Ir(ppy)_3$의 두께는 5nm이고 도핑 위치는 정공 수송층과 발광층 계면의 0nm에서부터 25nm까지 5nm간격으로 도핑을 하였다. 실험 결과 소자의 효율은 도핑 위치가 정공 수송층에서 25nm떨어진 위치일 때 가장 높았고, 10nm일 때 가장 낮았다. 이는 도핑 부분의 위치가 정공 차단층에 가까워질수록 정공과 전자의 균형이 좋아지는 것이 소자 성능을 향상시키는 원인으로 추측된다.

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Analysis of upconversion luminescence from Yb3+, Er3+ co-doped SrMoO4 (Yb3+와 Er3+ 이온이 동시 도핑 된 SrMoO4에서 발생되는 업컨버젼 현상에 대한 분석)

  • Chung, Jun Ho;Heo, Tae Hyung;Lee, Jeong Hoon;Lee, Sang Yeop;Kang, Suk Hyun;Kim, So Yeon;Kim, Sae Am;Choi, Bong Geun;Shim, Kwang Bo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.5
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    • pp.241-246
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    • 2012
  • $Yb^{3+}$, $Er^{3+}$ co-doped $SrMoO_4$ ($SrMoO_4$ : $Yb^{3+}/Er^{3+}$) specimens have been successfully synthesized via the complex citrate-gel method and their structural and optical properties were investigated in detail. Under 980 nm excitation, $SrMoO_4$ : $Yb^{3+}/Er^{3+}$ UC phosphors have been emitted strong green luminescence at 530 and 550 nm with weak red emission around 670 nm corresponding to the intra 4f transitions of $Er^{3+}$ ($^4F_{9/2}$, $^2H_{11/2}$, $^4S_{3/2}$) ${\rightarrow}$ $Er^{3+}$ ($^4I_{15/2}$). The optimal doping concentrations of $Er^{3+}$ and $Yb^{3+}$ ions were verified to 2/16 mol% and a possible upconversion mechanism depending on pump power dependence is studied in detail.

Synthesis and luminescent properties of $Er^{3+}$ doped $CaZrO_3$ long persistent phosphors ($Er^{3+}$를 첨가한 $CaZrO_3$ 축광성 형광체의 합성 및 발광 특성 분석)

  • Park, Byeong-Seok;Choi, Jong-Koen
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.18 no.1
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    • pp.27-32
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    • 2008
  • Novel long persistent phosphors of $CaZrO_3:Er^{3+}$ have been synthesized by traditional solid state reaction method. The long persistent phosphor crystalline particles were characterized by the X-ray diffraction (XRD), photoluminescence spectrophotometer, thermoluminescence (TL) and luminance meter. The results reveal that the samples are composed of single $CaZrO_3$ phase. The broadband emission spectra of 446 nm peak and 550 nm peak was revealed by synthesized at high temperature in $N_2$ gas. Green long persistent phosphors have been observed in the sys_em for over 6 h after UV irradiation (254 nm). The main emission peak was ascribed to $Er^{3+}$ ions transition from $^5D_{5/2}{\rightarrow}^4F_{9/2},\;^2H_{12/2},\;^4S_{3/2}{\rightarrow}^4I_{13/2}\;and\;^2G_{9/2}{\rightarrow}^4I_{13/2}$, and the afterglow may be ascribed to the suitable trap centers in the $CaZrO_3$ host lattice.

Luminescence Properties of La2MoO6:RE3+ (RE = Eu, Sm) Phosphors Subjected to the Different Concentrations of Activator Ions (활성제 이온의 농도 변화에 따른 La2MoO6:RE3+ (RE = Eu, Sm) 형광체의 발광 특성)

  • Kim, Gayeon;Shin, Johngeon;Cho, Shinho
    • Journal of the Korean institute of surface engineering
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    • v.50 no.4
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    • pp.282-288
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    • 2017
  • $Eu^{3+}$- or $Sm^{3+}$-doped $La_2MoO_6$ phosphors were synthesized with different concentrations of activator ions via a solid-state reaction. The X-ray diffraction patterns exhibited that crystalline structures of all the phosphors were tetragonal systems with the dominant peak occurring at (103) plane, irrespective of the concentration and the type of activator ions. The crystallites showed the pebble-like crystalline shapes and the average crystallite size increased with a tendency to agglomerate as the concentration of $Eu^{3+}$ ions increased. The excitation spectra of $Eu^{3+}$-doped $La_2MoO_6$ phosphors contained an intense charge transfer band centered at 331 nm in the range of 250-370 nm and three weak peaks at 381, 394, and 415 nm, respectively, due to the $^7F_0{\rightarrow}^5L_7$, $^7F_0{\rightarrow}^5L_6$, and $^7F_0{\rightarrow}^5D_3$ transitions of $Eu^{3+}$ ions. The emission spectra under excitation at 331 nm exhibited a strong red band centered at 620 nm and two weak bands at 593 and 704 nm. As the concentration of $Eu^{3+}$ increased from 1 to 20 mol%, the intensities of all the emission bands gradually increased. For the $Sm^{3+}$-doped $La_2MoO_6$ phosphors, the emission spectra consisted of an intense emission band at 607 nm arising from the $^4G_{5/2}{\rightarrow}^6H_{7/2}$ transition and three relatively small bands at 565, 648, and 707 nm originating from the $^4G_{5/2}{\rightarrow}^6H_{5/2}$, $^4G_{5/2}{\rightarrow}^6H_{9/2}$, and $^4G_{5/2}{\rightarrow}^6H_{11/2}$ transitions of $Sm^{3+}$, respectively. The intensities of all the emission bands approached maxima when concentration of $Sm^{3+}$ ions was 5 mol%. These results indicate that the optimum concentrations for highly-luminescent red and orange emission are 20 mol% of $Eu^{3+}$ and 5 mol% of $Sm^{3+}$ ions, respectively.

Effect of Annealing Temperature on the Properties of NaNbO3:Eu3+ Phosphor Thin Films Deposited on Quartz Substrates (석영 기판 위에 증착된 NaNbO3:Eu3+ 형광체 박막의 특성에 열처리 온도가 미치는 영향)

  • Cho, Shinho
    • Journal of the Korean institute of surface engineering
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    • v.54 no.2
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    • pp.96-101
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    • 2021
  • NaNbO3:Eu3+ phosphor thin films were grown on quartz substrates by radio-frequency magnetron sputtering at a growth temperature of 100 ℃, with subsequent annealing at temperatures of 800, 900, and 1000 ℃. The effects of annealing temperature on the structural, morphological, and optical properties of the thin films were investigated. The NaNbO3:Eu3+ sputtering target was synthesized by a solid-state reaction of raw materials Na2CO3, Nb2O5, and Eu2O3. The X-ray diffraction patterns exhibited that the thin films had two mixed phases of NaNbO3 and Eu2O3. Surface morphologies were investigated by using field emission-scanning electron microscopy and indicated that the grains of the thin film annealed at 1000 ℃ showed irregular shapes with an average size of approximately 300 nm. The excitation spectra of Eu3+-doped NaNbO3 thin film consisted of a strong charge transfer band centered at 304 nm in the range of 240-350 nm and two weak peaks at 395 and 462 nm, respectively, resulting from the 7F05L6 and 7F05H2 transitions of Eu3+ ions. The emission spectra under excitation at 304 nm exhibited an intense red band centered at 614 nm and two weak bands at 592 and 681 nm. As the annealing temperature increased from 800 ℃ to 1000 ℃, the intensities of all the emission bands and the band gap energies gradually increased. These results indicate that the higher annealing temperature enhance the luminescent properties of NaNbO3:Eu3+ thin films.