Dependency of the Device Characteristics on Plasma Nitrided Oxide for Nano-scale PMOSFET (Nano-scale PMOSFET에서 Plasma Nitrided Oixde에 대한 소자 특성의 의존성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.20 no.7
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- pp.569-574
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- 2007