• 열처리공학회지
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• 제22권6호
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• pp.361-367
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• 2009

The two-step gas nitriding was adopted to increase the depth of surface hardening in 3%Cr-Mo-V steel. The two-step gas nitriding consisted of Step I; $520^{\circ}C{\times}20\;hrs$ and Step II; $550^{\circ}{\times}70\;hrs$. The layer of two-step gas nitriding showed better uniformity and deeper nitriding layer than one-step gas-nitriding layer. The maximum surface hardness showed the value of 850 Hv. The maximum depth of nitrogen permeation showed $750\;{\mu}m$ (350 Hv). X-ray diffraction analysis showed that compound layer was mainly consisted of CrN and $\varepsilon-Fe_3N$ phases. These phases were presumed contributing to surface hardening and wear resistance. However, the corrosion resistance of gas-nitrided Cr-Mo-V steel were not improved in the solution of 1 N HCl and NaOH. Therefore, it is necessary that the continuous study for improvement of corrosion resistance hereafter.

• 한국표면공학회지
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• 제31권6호
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• pp.325-333
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• 1998

A duplex surface treatment process of simultaneous aluminizing-chromizing process followed by plasma nitriding was performed on AISI HI3 steel and STS 403 steel. The properties of these duplex-treated steels were investigated and were compared with those of steels treated by single process of either simultaneous aluminizing-chromizing or plasma nilriding, in terms of microstructure, microhardness and high temperature wear resistance. Sim~dtaneous alumizing-chromizing process was done using a 2-step coating cycle and plasma nitriding process was done at $530^{\circ}C$ for 1.5 hour. AISI HI3 steel and STS 403 steel showed a FeA1 compound layer of approximately 350$\mu\textrm{m}$ thickness on the surface after simultaneous diffusion coating and nitrided layer of approximately 70-80$\mu\textrm{m}$ formed after the subsequent plasma nitriding process. The microhardness was improved much more by the duplex surface heatment than only by plasma nitriding. In addition the duplex treated specimens showed an improved high temperature wear resistance.

• 한국표면공학회지
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• 제53권6호
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• pp.306-311
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• 2020

In this work, diamond-like carbon (DLC) films are coated onto plasma nitrided AISI 4140 steel by DC-pulsed PECVD. One problem of DLC films is their very poor adhesion on steel substrates. The purpose of the nitriding was to enhance adhesion between the substrate and the DLC films. The white layer formation is avoided. Plasma nitriding increased adhesion from 8 N for DLC coating to 25 N for duplex coating. Duplex plasma nitriding/DLC coating was proven to be more effective in improving the adhesion. The purpose of the bond layer was to enhance adhesion between the substrate and the DLC films.

• 연구논문집
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• 통권28호
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• pp.219-227
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• 1998

In order to investigate the interfacial structure between TiN and iron nitride, an AISI 4140 steel was nitrided to form a layer of thickness 15$\mum$ by DC ion nitriding, then the surface was bombarded with Ti ions and subsequently coated a TiN film of 5$\mum$ by arc ion plating method. The interfacial microstructure between TiN and iron nitride was characterized by optical microscope, SEM and XRD. So called black layer was observed in the duplex treatment. It was resulted from the decomposition of iron nitride during the bombardment. Its thickness was increased with increasing bombardment time at high bias voltage. But the thickness was greatly decreased when the iron nitride was bombarded with a nitrogen gas or at a reduced bias voltage. The adhesion strength of the top TiN coating was decreased with increasing thickness of the black layer. Furthermore, the reduced adhesion strength in this system was discussed in view of the interfacial structural relationship between TiN and iron nitride.

• 한국전기전자재료학회논문지
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• 제17권2호
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• pp.150-155
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• 2004

This study attempts to form a TiN barrier layer against Cu diffusion by the easier and more convenient method. In this new approach, Ti was sputter-deposited, and nitrided by heat-treating in the NH$_3$ambient. Sheet resistance of as-deposited Ti was 20 Ω/$\square$, but increased to 195 Ω/$\square$ after the heat-treatment at 30$0^{\circ}C$, and lowered to 120 Ω/$\square$ after the heat-treatment at 50$0^{\circ}C$, and $600^{\circ}C$. AES results for these thin films confirmed that the atomic ratio of Ti and N was close to 1:1 at or above 40$0^{\circ}C$ heat-treatment. However, it was also found that excessive oxygen was contained in the TiN layer. To examine the barrier property against Cu diffusion, 100nm Cu was deposited on the TiN layer and then annealed at 40$0^{\circ}C$ for 40 min.. Cu remained at the surface without diffusing into the Si layer.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2001년도 추계학술발표회 초록집
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• pp.69-69
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• 2001

We report a study of the nitriding of the martensitic grade of stainless steel AKSK 420 in a low-pressure rl discharge using pure nitrogen. Much studied samples of the austenitic grade AISI 304 were treated at the same time to provide a comparison. With a treatment time of 4.0 h at $400^{\circ}C$, the nitrogen-rich layer on MSK 420 is 20pm thick and has a hardness about 4.3 times higher than that of the untreated material. The layer thickness is much greater than that obtained on AISI 304 under identical treatment conditions, reflecting the different Cr content of the two alloys. The alloy AlISI 420 is more susceptible than AISI 304 to the formation of CrN and ferrite, and this has a deleterious effect on the hardnes, gain. Below the temperature at which CrN forms, the treated layer retains its martensitic structure, but with a larger lattice parameter than the bulk, a phase that we term expanded martensite, by analogy with the situation with austenitic stainless steel. The fact that the treated layer retains a martensitic structure is interesting in view of previous evidence that nitrogen is an austenite stabilizer.

• 동력기계공학회지
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• 제9권1호
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• pp.76-81
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• 2005

The effect of micro-pulse plasma nitriding temperature and time on the case thickness, hardness and nitride formation in the surface of Fe-12Cr-22Mn-X alloy with 3% Co and 1% Ti alloys elements investigated. External compound layer and internal diffusion layer was constituted in plasma nitride case of Fe-12Cr-22Mn-X alloys and formed nitride phase such as ${\gamma}'-Fe4N\;and\;{\varepsilon}-Fe2-3N$. Case depth increased with increasing the plasma nitriding temperature and time. Surface hardness of nitrided Fe-12Cr-22Mn-X alloys obtained the above value of Hv 1,600 and case depth obtained the above value of $45{\mu}m$ in Fe-12Cr-22Mn-3Co alloy and $60{\mu}m$ in Fe-12Cr-22Mn-1Ti alloy. Wear-resistance increased with increasing plasma nitriding time and showing the higher value in Fe-12Cr-22Mn-1Ti alloy than Fe-12Cr-22Mn-3Co alloy.

• 한국재료학회지
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• 제33권7호
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• pp.309-314
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• 2023

This study aimed to address the limitations of traditional plasma nitriding methods by implementing a short-term plasma oxy-nitriding treatment on the surface of AISI 420 martensitic stainless steel. This treatment involved the sequential formation of nitride and oxide layers, to enhance surface hardness and corrosion resistance, respectively. The process resulted in the formation of a 20 ㎛-thick nitride layer and a 3 ㎛-thick oxide layer on the steel surface. Initially, the hardness increased by 2.2 times after nitriding, followed by a subsequent decrease of approximately 31 % after oxidation. While the nitriding process reduced corrosion resistance, the subsequent oxidation process led to the formation of a passive oxide film, effectively resolving this issue. The pitting corrosion of the oxide passive film started at 82.6 mVssc, providing better corrosion resistance characteristics than the nitride layer. Consequently, the trade-off between surface hardness and corrosion resistance in plasma oxy-nitrided AISI 420 martensitic stainless steel is anticipated to be recognized as an innovative and comprehensive surface treatment process for biomedical components.

• 한국재료학회지
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• 제21권11호
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• pp.634-638
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• 2011

We report growth of epitaxial AlN thin films on c-plane sapphire substrates by plasma-assisted molecular beam epitaxy. To achieve two-dimensional growth the substrates were nitrided by nitrogen plasma prior to the AlN growth, which resulted in the formation of a two-dimensional single crystalline AlN layer. The formation of the two-dimensional AlN layer by the nitridation process was confirmed by the observation of streaky reflection high energy electron diffraction (RHEED) patterns. The growth of AlN thin films was performed on the nitrided AlN layer by changing the Al beam flux with the fixed nitrogen flux at 860$^{\circ}C$. The growth mode of AlN films was also affected by the beam flux. By increasing the Al beam flux, two-dimensional growth of AlN films was favored, and a very flat surface with a root mean square roughness of 0.196 nm (for the 2 ${\mu}m$ ${\times}$ 2 ${\mu}m$ area) was obtained. Interestingly, additional diffraction lines were observed for the two-dimensionally grown AlN films, which were probably caused by the Al adlayer, which was similar to a report of Ga adlayer in the two-dimensional growth of GaN. Al droplets were observed in the sample grown with a higher Al beam flux after cooling to room temperature, which resulted from the excessive Al flux.

• 한국표면공학회지
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• 제54권5호
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• pp.267-277
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• 2021

Nitriding layers developed during gaseous nitriding of AISI4115 steels for the application of steel bushing part were investigated. The compound layer thickness of about 10㎛, 0.3mm of case depth under the same conditions, and conventional nitriding, nitrocarburizing, and controlled nitriding were performed in three methods. In the controlled nitriding, K_N was controlled by measuring the hydrogen partial pressure. The nitrided samples were analyzed by micro Vickers hardness test, optical microscopy and scanning electron microscopy. The phases of compound layer were identified by X-ray diffraction and electron backscatter diffraction. The controlled nitriding specimen indicated the highest surface hardness of about 860 HV_0.1. The compound layer of the conventional nitriding and nitrocarburizing specimen was formed with about 46% porous layer and 𝜺 + 𝜸' phase, and about 13% porous layer and about 80% 𝜸' phase were formed on the controlled nitriding specimen. As a result of the Ball-on-disk wear test, the worn mass loss of ball performed on the surface of the controlled nitriding specimen was the largest. The controlled nitriding specimen had the highest surface hardness due to the lowest porous percentage of compound layer, which improved the wear resistance.