• 제목/요약/키워드: Ni$_{}$ 81/FE$_{}$ 19/(permalloy)

검색결과 3건 처리시간 0.015초

마이크로입자의 레이저 Ablation으로 형성된 나노입자의 수펴소닉 적층법을 이용한 퍼멀로이 나노구조박막 적층에 관한 연구 (A Study on the Deposition of Permalloy Nanostructured Thin Film Utilizing Supersonic Deposition of Nanoparticles Formed by Laser Ablation of Microparticles)

  • 윤의중;정명희
    • 한국전기전자재료학회논문지
    • /
    • 제18권5호
    • /
    • pp.478-483
    • /
    • 2005
  • In this paper, we synthesized 10 to 20 nm diameter NiFe nanoparticles and nanoparticle films utilizing supersonic jet deposition of nanoparticle aerosols generated by laser ablation of $30\;to\;45{\mu}m$ diameter permalloy $(Ni_{81}Fe_{19} \;at\;{\%})$ microparticles. The component and composition of the nanoparticles were characterized by an energy dispersive X-ray spectroscopy. The morphology of the nanoparticles and nanoparticle films was analyzed by a high-resolution transmission electron microscopy and a scanning electron microscopy, respectively. The experimental results showed that the nanoparticles and nanoparticle films have remarkable properties with an excellent preservation of the composition of feedstock permalloy microparticles. The purpose of the present work is to present details on the composition and nanostructural characterizations for NiFe nanoparticles and nanoparticle films prepared by laser ablation of microparticles (LAM).

DC-DC Converter용 자성박막 인덕터 설계에 관한 연구 (A Study on Design of Magnetic Thin Film Inductors for DC-DC Converter Applications)

  • 윤의중;김좌연;박노경;김상기;김종대
    • 한국전기전자재료학회논문지
    • /
    • 제14권1호
    • /
    • pp.74-83
    • /
    • 2001
  • In this study, the optimum structure of a magnetic thin film inductor was designed for application of DC-DC converters. The Ni$\sub$81/Fe$\sub$19/ (at%) alloy was selected as a high-frequency($\geq$MHz) magnetic thin film magnetron sputtering system. As-deposited NiFe thin films show similar magnetic properties compared to bulk NiFe alloys, indicating that they have a good film quality. The optimum design of dolenoid-type magnetic thin film inductors was performed utilizing a Maxwell computer simulator (Ansoftt HFSS V7.0 for PC) and parameters obtained from the magnetic properties of magnetic core materials selected. The high-frequency characteristics of the inductance(L) and quality factor(Q) obtained for the designed inductors through simulation agreed well with those obtained by theoretical calculations, confirming that the simulated result is realistic. The optimum structure of high-performance (Q$\geq$60, L = 1${\mu}$H, efficiency $\geq$90%), high-frequency ($\geq$5MHz), and solenoid-type magnetic thin film inductors was designed successfully.

  • PDF

Vector Network Analyzer를 이용한 Py 박막의 강자성공명연구 (Vector Network Analyzer Ferromagnetic Resonance Study of Py Thin Films)

  • 신용확;하승석;김덕호;유천열
    • 한국자기학회지
    • /
    • 제20권1호
    • /
    • pp.18-23
    • /
    • 2010
  • 본 연구에서는 벡터 네트워크 분석기(vector network analyzer; VNA)와 코플라나 전송선(coplanar waveguide; CPW)을 이용한 강자성 공명 측정 방법을 개발하기 위해 두께가 각각 10, 20, 40 nm인 $Ni_{81}Fe_{19}$(Permalloy; Py) 합금 박막을 증착하여 측정하였다. 유리기판 위에 패터닝 작업을 거쳐 CPW를 형성하고 제작된 CPW 위에 Py 박막을 직접 올려놓아 시료의 반사/투과계수인 S-파라미터를 측정하였다. 외부자기장을 0 Oe에서 490 Oe까지 변화 시키며 측정해본 결과 Py 박막의 공명주파수는 2.5 GHz에서 7 GHz 범위 내에서 나타났으며 외부자기장의 세기가 커짐에 따라 공명주파수도 증가함을 확인하였다. S-파라미터를 분석하여 나온 공명주파수와 반치폭을 이용하여 포화자화량과 길버트 감쇠 상수를 구한 결과 Py 박막 40 nm에서 길버트 감쇠 상수 값 0.0124($\pm$0.0008)를 구했고 이는 선행 연구되었던 일반적인 강자성 공명 측정값과 일치함을 볼 수 있었다. 또한 두께별 의존도를 조사해본 결과 두께가 작아질수록 S-파라미터의 세기가 작아지는 것을 확인 할 수 있었으며, 강자성공명 분석 결과에서 Py 박막의 두께가 10 nm에서 40 nm까지 증가할 때 유효 포화 자화가 7.205($\pm$0.013) kOe에서 7.840($\pm$0.014) kOe로 증가하는 것을 확인 할 수 있었다.