• Title/Summary/Keyword: Neutral System

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Ar 중성빔과 $BCl_3$를 이용한 $ZrO_2$의 원자층 식각에 관한 연구

  • Kim, Lee-Yeon;Im, Ung-Seon;Park, Byeong-Jae;Yeom, Geun-Yeong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.05a
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    • pp.107-107
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    • 2009
  • 본 연구에서는 중성빔을 이용한 Atomic Layer Etching(ALET) system을 이용하여 $ZrO_2$의 atomic layer etching mechanism에 대하여 연구하였다. Ar neutral beam irradiation dose와 $BCl_3$ gas pressure의 변화에 따라 $ZrO_2$ etch rate와 RMS roughness를 관찰했을 때, Ar neutral beam irradiation dose이 $1.485{\times}10^{16}atoms/cm^2{\bullet}cycle$ 이상이고 $BCl_3$ gas pressure가 0.15mTorr 이상 일 때 $ZrO_2$ etch rate은 $1.07\;{\AA}/cycle$의 일정한 값에서 유지됨을 확인하였다. 그리고 ALET와 ICP Etcher을 통해 $ZnO_2$를 각각 식각하여 physically or chemically damage를 비교한 결과, ALET가 기존의 ICP Etcher system보다 $ZrO_2$ 식각공정에 대해 적은 damage를 받는 것을 ARXPS를 통해 관찰 하였다.

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A study on conversion of cross-sectional information form STL file for Stereolithography (Stereolithography를 위한 STL파일로부터 단면정보 변환에 관한 연구)

  • 최홍태;김준안;이석희;백인환
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.04b
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    • pp.445-450
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    • 1995
  • This paper deals with conversion from STL file to Slice cross-sectional information for Stereolithography. The STL file consist of three vertices of triangle and normal vectors in order to represent three dimension shape, but It is very difficult to convert STL file intoSlice file directly, because of file size from one Mbyte to tens of Mbytes. So, The system is accomplished data flow such as neutral.dat, .SL1, .SL2, .SL3, and .SLC file. The data processing is as follows: 1. Create a neutral file including common information. 2. Modify STL file within effective scope of SLA. 3. Calculate a point of intersection between plane equation and line equation. 4. Sort z values by increasing order. 5. Search closed loop by method of singlylinked linear list. The system is developed by using Borland C++ 3.1 compiler in the environment of Pentium PC. We get a satisfactory prototype as a result of application about a lot of household electrical appliances.

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Developing a B2B Integration System based on XML Database System (XML 데이터베이스 시스템을 기반으로 한 B2B 통합 시스템 개발)

  • 이정수;정상혁;주경수
    • Journal of Korea Multimedia Society
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    • v.6 no.1
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    • pp.1-14
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    • 2003
  • E-commerce requires many different types of communications and an unprecedented amount of data changes hands. The many different Platforms and systems interacting require a platform neutral standard for data exchange. One of the technologies that can fill this niche is XML, the extensible markup language established as a standard by the W3C. By being standardized and platform neutral, XML to be factor in e-commerce application and using many systems In this paper, we designed XML document that is used in transaction between corporations, and implement the B2B integration system based on XML database system. Also we use XSLT that make efficient transformation XML documents for exchanging heterogeneous XML data between corporations. So, he or she can more easily and efficiently exchange XML documents between corporations using this system.

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Applicability of Messenger Wire for Purpose of Lightning Protection

  • Seo, Hun Chul;Han, Joon;Choi, Sun Kyu;Lee, Byung Sung;Rhee, Sang Bong;Kim, Chul Hwan
    • Journal of Electrical Engineering and Technology
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    • v.11 no.1
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    • pp.167-174
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    • 2016
  • The Korean distribution line currently consists of overhead ground wires (OHGW), overhead distribution lines, neutral wires (NW), and messenger wires (MW). The MW is installed under the NW. The lightning protection system in Korea is focused on OHGW and lightning arrester and the MW are not considered. Therefore, this paper proposes the applicability of MW for purpose of lightning protection. For this, we analyzed the effects of lightning overvoltage according to the existence of OHGW and MW and the grounding conditions of the MW in the Korean distribution system. The grounding conditions of the MW that we took into consideration were the common or separate grounding of the MW and NW. The analysis based on the equivalent circuit of the distribution pole at each condition was performed. The distribution lines and lightning were modeled using the Electromagnetic Transients Program (EMTP). For each of the installation conditions of the OHGW and MW, the various lightning conditions were simulated and analyzed for both direct and indirect lightning. The simulation results showed that, if the OHGW was not installed in the Korean distribution system, the lightning overvoltage could be reduced by the common grounding of the MW and NW.

A New Performance Function-Based Control Strategy for Hybrid Series Active Power Filter in Three-Phase Four-Wire Systems (3상 4선식 하이브리드 형 직렬 능동전력필터에 대한 새로운 성능함수 제어 이론)

  • 신재화;김진선;김영석
    • The Transactions of the Korean Institute of Electrical Engineers B
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    • v.52 no.11
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    • pp.563-571
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    • 2003
  • In this paper, the control algorithm and control method for a combined system of shunt passive filter and series active filter in 3-phase 4-wire system are discussed. Moreover, the three-phase four-wire system is widely employed in distributing electric energy to several office building and manufacturing plants. In such systems, the third harmonic and its 3th harmonics are termed as triple and zero sequence components that do not cancel each other in the system neutral. Consequently, the triple harmonics add together creating a primary source of excessive neutral current. Regarding this concern, this paper presents a new control algorithm for a series hybrid active system, whereas the control approach it adopts may directly influence its compensation characteristics. Hence, the advantage of this control algorithm is direct extraction of compensation voltage reference and the required rating of the series active filter is much smaller than that of a conventional shunt active filter. Some experiments were executed and experimental results from a prototype active power filter confirm the suitability of the proposed approach.