• 한국정밀공학회지
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• 제31권4호
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• pp.359-364
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• 2014

This paper describes the development of needle type probe that measures temperature and injects medicine for both diagnosis and treatment of musculoskeletal pain syndrome (MPS). The size of trigger points is from several micrometers to millimeter. Therefore, it is required to develop a medical device that is capable of not only finding the trigger points by temperature measurement, but also injecting medicine at the exact location for treatment. To challenge these difficulties, thermocouple was fabricated on the surface of a needle using metal deposition process. Special type of stainless-constantan thermocouple was achieved from the stainless body of a needle itself and deposited constantan metal film. In particular, parylene coating enables to limit the temperature sensitive area to the end of the needle tip. Fabricated needle type probe produces $3.25mV/^{\circ}C$ of thermoelectric sensitivity and compared its performance with commercial T-type thermocouple in animal muscle sample.

• 한국전기전자재료학회논문지
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• 제19권9호
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• pp.825-831
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• 2006

As an increase of chip complexity and level of chip integration, chip input/output (I/O) pad pitches are also drastically reduced. With arrival of high complexity SoC (System on Chip) and SiP (System in Package) products, conventional horizontal type probe card showed its limitation on probing density for wafer level test. To enhance probing density, we proposed new vertical type probe card that has the $70{\mu}m$ probe needle with tungsten wire in $80{\mu}m$ micro-drilled hole in ceramic board. To minimize alignment error, micro-drilling conditions are optimized and epoxy-hardening conditions are also optimized to minimize planarity changes. To apply wafer level test for target devices (T5365 256M SDRAM), designed probe card was characterized by probe needle tension for test, contact resistance measurement, leakage current measurement and the planarity test. Compare to conventional probe card with minimum pitch of $50{\sim}125{\mu}m\;and\;2\;{\Omega}$ of average contact resistance, designed probe card showed only $22{\mu}$ of minimum pitch and $1.5{\Omega}$ of average contact resistance. And also, with the nature of vertical probing style, it showed comparably small contact scratch and it can be applied to bumping type chip test.

• 한국신뢰성학회지:신뢰성응용연구
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• 제7권1호
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• pp.23-29
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• 2007

Probe card is a test component which is to classify the known good die with electrical contact before the packaging in the ATE (automatic testing equipment). Conventional probe tip was mostly needle type, it has been difficult to meet with conventional type, because of decreasing chip size, pad to pad pitch and pads size increasingly. For that reason, probe cards using MEMS (micro electro mechanical system) technology have been developed for various semiconductor chips. In this paper, Area Array type MEMS Probe tip was designed,, fabricated, and characterized its mechanical and electrical properties. The authors found that good electrical characteristics under $1{\Omega}$ were acquired with gold (Au) and aluminium (Al) pad contact test over 0.5gf and 4gf respectively. And, contact resistance variation under $0.1{\Omega}$ were achieved with 100,000 times of repetition test. And, insertion loss (IS) for high frequency operation was ascertained over 300MHz at -3dB loss.

• 대한전자공학회논문지
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• 제23권1호
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• pp.83-90
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• 1986

A micro pH-ISFET probe, which can be applied to the in vivo measurements of the hydrogen ion concentration in blood, has been developed, and a measuring system equiped with this probe also developed. The pH-ISFET has been fatricated by employing the techniques of integrated circuit fabrication. Two kinds of micro electrode formed around the sensing gate during the wafer process, and the other is a capillary type of Ag/AfCl/sat. KCI reduced in size. This capillary electrode has shown its good performance characteristics so far in the application with ISFET as well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and well as a commercial one. In order to form a micro pH-ISFET probe, this pH-ISFET and the capillary electrode were built together into a needle tip having 1 mm inner diameter. The chip size of a twin pH-ISFET is 0.8 mmx1.4 mm, the material of the sensing gate membrane is Si3N4, and the sensitivity of the developed probe is about 52mV/pH.

• 대한기계학회논문집A
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• 제36권8호
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• pp.851-856
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• 2012

마이크로 프로브 팁의 설계는 매우 복잡하고 많은 비용이 든다. 이 논문에서는 새로운 타입의 프로브 팁을 유한요소해석을 이용하여 설계하였다. 유한요소해석을 이용하여 설계를 함으로써 복잡한 설계과정을 단순화 할 수 있다. 우선, 기존 프로브 팁의 실험 결과를 이용하여 유한요소해석기법을 검증하였다. 기존 프로브 팁의 물성은 $100{\mu}m$의 압축 길이시 12.5 gf 의 접촉하중이 측정되었다. 본 연구에서는 새로운 타입의 프로브 팁을 제안하였다. 새로 설계된 프로브 팁의 재료는 NiCo 이며 프로브 팁의 물성은 $100{\mu}m$의 압축 길이시 1~2 gf 의 접촉하중을 나타내었다.

• Korea-Australia Rheology Journal
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• 제13권2호
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• pp.67-81
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• 2001

The development of new techniques for the dynamic measurement of linear viscoelastic properties is an active area of rheometry, and this paper surveys some novel deformation geometries which have been recently reported e.g. oscillating probe-type devices which are imbedded in or placed on the surface of the sample. Small amplitude band-limited pseudorandom noise is used for the displacement signal, with Fourier analysis of the complex waveform of the resistance force yielding the frequency dependent viscoelastic material functions (e.g. storage and loss moduli G", G"). Theoretical calculations of the fundamental equations relating force to displacement and instrument geometry, were carried out with the aid of the correspondence principle of linear viscoelasticity. The rapidity of the tests and flexibility in terms of sample preparation and stiffness mean that this basic technique should find many applications in rheometry. Three examples of oscillatory tests are presented in detail squeeze flow, imbedded needle and concentric sliding cylinder geometries.eometries.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
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• pp.189-192
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• 2001

In this paper, an novel optical measuring system based on the electro-optic effect has been proposed and realized using Pockels cell with a view to detecting partial discharge taking place at the needle plane electrode. This system has the following advantages ; nonmetallic probe sensor, immune to external EMI noise and broad band response of the Pockels cell from DC to GHz. This system is constructed by He-Ne laser, Mach-Zehnder interferometer with Pockels sensor, balanced photo receiver, data acquisition board and PC. The response characteristics of the developed proto type sensor are examined for AC and corona discharge.

• 한국전기전자재료학회논문지
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• 제23권6호
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• pp.481-486
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• 2010

ENIG (electroless Ni immersion gold) is one of surface finishing which has been most widely used in fine pitch SMT (surface mount technology) and BGA (ball grid array) packaging process. The reliability for package bondability is mainly affected by interfacial reaction between solder and surface finishing. Since the behavior of IMC (intermetallic compound), or the interfacial reaction between Ni and solder, affects to some product reliabilities such as solderability and bondability, understanding behavior of IMC should be important issue. Thus, we studied the properties of ENIG with P contents (9 wt% and 13 wt%), where the P contents is one of main factors in formation of IMC layer. The effect of P content was discussed using the results obtained from FE-SEM(field-emission scanning electron microscope), EPMA(electron probe micro analyzer), EDS(energy dispersive spectroscopy) and Dual-FIB(focused ion beam). Especially, we observed needle type irregular IMC layer with decreasing Ni contents under high P contents (13 wt%). Also, we found how IMC layer affects to bondability with forming continuous Kirkendall voids and thick P-rich layer.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1668-1670
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• 2002

Since more than two decades, the conventional PD detecting systems have been employed in order to detect the partial discharges occurring inside the HV power apparatus for their diagnosis by use of different type of detection such as acoustic and UHF detection method. Regardless of their wide on-site application, a certain number of technical inconveniences have been disclosed as follows : multistage amplification. large volume, susceptible to external noise and high price. In this respect, the optical measurement techniques are widely proposed in these days in this concerned field ascribed to the following advantages : immune to external EMI noise and broad band response of the Pockels cell covering from DC to GHz. However, the reliability of several proposed techniques enabling to measure the electric field inside the large high power apparatus has not yet been well approved In this work, an optical measuring system, based on the Pockels effect, has been developed for measuring the field variation due to the corona discharges occurring in air and in oil. This system consists of He-Ne laser, single mode optical fiber, multi mode optical fiber, polarizing film, Y-cut LiNbO3 cell, photo detector, digital oscilloscope and personal computer with GPIB. For this purpose, optical probe has been specially designed and realized and put into the needle-plane electrode. Afterward, same measurement is carried out in oil. We demonstrate the characteristic of the optical measuring system and the measurement results.