• Title/Summary/Keyword: Nd-YAG laser ablation

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Measurement and analysis of recoil force during Nd-YAG laser ablation of silicon (Nd-YAG 펄스레이저에 의한 실리콘 가공시 발생하는 증발반동압력 측정 및 분석)

  • 이동준;정성호
    • Laser Solutions
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    • v.6 no.3
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    • pp.11-17
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    • 2003
  • Recoil force exerted on the substrate during a nanosecond laser ablation of silicon is measured. The ablation sample is placed at the end of a 400 $\mu\textrm{m}$ thick and 13 mm long silicon cantilever. The vibration amplitude of the cantilever induced by the recoil force is measured in real time with a probe beam. By comparing the deflection amplitude of the cantilever with a theoretical model, the recoil momentum is estimated. For laser irradiance in the order of 10$\^$11/ W/$\textrm{cm}^2$, the recoil pressure reached a value over 40${\times}$10$\^$9/ Pa.

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PHYSICAL MODIFICATION AND ABLATION THRESHOLDS OF DENTIN INDUCED BY ND : YAG, HO : YAG, AND ER : YAG LASERS (Nd : YAG, HO : YAG, Er : YAG 레이저 조사에 의한 상아질의 물리적 변형 및 절제(切除)역치에 관한 연구)

  • Lee, Sang-Ho
    • Journal of the korean academy of Pediatric Dentistry
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    • v.23 no.4
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    • pp.954-967
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    • 1996
  • Laser application to modify healthy permanent dentin to improve microhardness and caries resistence has been previously reported but the physical modification and ablation thresholds of carious and sclerotic dentin has yet to be identified. This study determined the energy density required by modify (physical modification threshold, PMT) and remove (ablation threshold, AT) infected carious, affected and selerotic dentin compared to healthy permanent dentin. $1{\pm}0.25mm$ thick dentin sections(n=272) from extracted human teeth were used. Smear layer was removed 0.5M EDTA for 2 minutes. Utilizing three pulsed fiberopitc delivered contact lasers with different emission wavelengths($1.06{\mu}m$=Nd : YAG, $2.10{\mu}m$=Ho : YAG and $2.94{\mu}mEr$ : YAG). The energy density($J/cm^2$) was incrementally increased and the resulting tissue interaction classified on a scale from 0-6. A minimum of 5 repetitions/energy density were completed. Light microscopy(10-25X) was used to verify the physical modification(scale=3) and ablation thresholds(scale=4) of the various forms of dentin and the data were analyzed by logistic regression at the 95 % confidence interval. PMT and AT by the laser and the dentin types were: PMT and AT was lower in infected dentin than in sound dentin for all lasers. PMT and AT induced by Nd : YAG>Ho : YAG>Er : YAG for all forms of dentin. Microhardness was increased in sound dentin at PMT. Morphology of crater examined by light microscopy showed Nd : YAG was safe and effective for removing carious dentin and Er: YAG was effective for removing sound dentin. The PMT and AT for YAG lasers are different as a function of dentin type which may be utilized for selective modification and removal of dentin.

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Nanoparticle Synthesis by Pulsed Laser Ablation of Metal Microparticle and Consolidated Sample (금속 마이크로입자 및 압밀 시편의 펄스레이저 어블레이션에 의한 나노입자 합성)

  • Kim, Dong-Sik;Jang, Deok-Suk
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.9
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    • pp.1335-1341
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    • 2003
  • This paper describes the process of nanoparticle synthesis by laser ablation of microparticles and consolidated sample. We have generated nanoparticles by high-power pulsed laser ablation of AI, Cu and Ag microparticles using a Q-switched Nd:YAG laser (wavelength 355nm, FWHM 6ns, fluence $0.8{\sim}2.0J/cm^2$). Microparticles of mean diameter $18{\sim}80{\mu}m$ are ablated in the ambient air. The generated nanoparticles are collected on a glass substrate and the size distribution and morphology are examined using a scanning electron microscope and a transmission electron microscope. The effect of laser fluence, collector position and compacting pressure on the distribution of particle size is investigated. To better understand the process of laser ablation of microparticle(LAM), we investigated the Nd: YAG laser-induced breakdown of Cu microparticle using time-resolved optical shadow images. Nanosecond time-resolved images of the ablation process are also obtained by laser flash shadowgraphy. Based on the experimental results, discussions are made on the dynamics of ablation plume.

The ablation of ITO thin films by KrF Eximer laser and its characteristics (KrF 엑시머 레이저에 의한 ITO 박막의 어블레이션과 표면특성관찰)

  • Lee, Kyoung-Cheol;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.511-514
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    • 2000
  • This work aimed to develop ITO (Indium Tin Oxide) thin films ablation with a KrF Eximer laser required for the application in flat panel display, especially patterning into small geometry on a large substrate area. The threshold fluence for ablating ITO on glass substrate is about 0.1 J/cm$^2$. And its value is much smaller than using third harmonic Nd:YAG laser. Through the optical microscope measurement the surface color of the damaged ITO is changed into dark brown and irradiated spot is completely isolated form the undamaged surroundings by laser light. The XPS analysis showed that the relative surface concentration of Sn and In were essentially unchanged (In :Sn=5:1) after irradiating Eximer laser. Using aluminium mask made by second harmonic Nd:YAG laser the ITO patterning is carried out.

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Decontamination Characteristics of 304 Stainless Steel Surfaces by a Q-switched Nd:YAG Laser at 532 nm (532 nm 파장의 큐스위치 Nd:YAG 레이저를 이용한 스테인리스 스틸 표면 제염특성)

  • Moon, Jei-Kwon;Baigalmaa, Byambatseren;Won, Hui-Jun;Lee, Kune-Woo
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.8 no.3
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    • pp.181-188
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    • 2010
  • Metal surface decontamination characteristics were investigated by using a laser ablation method. A second harmonic generation of a Q-switched Nd:YAG laser with a wave length of 532 nm, a pulse energy of 150 mJ and a pulse width of 5 ns was employed to assess the decontamination performance for metal surfaces contaminated with $CsNO_3$, $Co(NH_4)_2(SO_4)_2$, $Eu_2O_3$ and $CeO_2$. The ablation behavior was investigated for the decontamination variables such as a number of laser shots, laser fluence and an irradiation angle. Their optimum values were found to be 8, 13.3 J/$cm^2$ and $30^{\circ}$, respectively. The decontamination efficiency was different depending on the kinds of the contaminated ions, due to their different melting and boiling points and was in the order: $CsNO_3>Co(NH_4)_2(SO_4)_2>Eu_2O_3>CeO_2$. We also evaluated a correlation between the metal ablation thickness and the number of laser shots for the different laser fluences.

Experimental Investigation for Ablation Characteristics of Polyimide Layer and Cu-metal Layer using High Power Nd:YAG UV Laser (고출력 Nd:YAG UV레이저를 이용한 polyimide층과 Cu-metal층의 가공상태에 대한 실험적 고찰)

  • Choi, Kyung-Jin;Lee, Young-Hyun
    • Journal of the Semiconductor & Display Technology
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    • v.8 no.4
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    • pp.31-36
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    • 2009
  • In this paper, the laser cutting characteristics of the flexible PCB using high power Nd:YAG UV laser were investigated. A specific FPCB model was selected for the experiment. Test sheets were made, which had equal materials and layer structure to those of the outline (OL) region and the contact pad (CP) region in the FPCB. The experiment is made up of two stages. In the first stage of the experiment, the laser cutting fluence was found, which is the threshold fluence to cut the test sheets completely. The laser cutting fluence of the OL sheet is $1781.26{\sim}1970.16\;J/cm^2$ and that of the CP sheet is $2109.34{\sim}2134.34\;J/cm^2$. In the second stage, cutting performance and its qualities were analyzed by the experiment. The laser cutting performance remained almost unchanged for all laser and process parameter sets. The average cutting width (top side/bottom side) of the OL sheet was $40.45\;{\mu}m/11.52\;{\mu}m$ and that of the CP sheet was $22.14\;{\mu}m/10.93\;{\mu}m$. However, the laser cutting qualities were different according to the parameters. The adjacent region of the cutting line on the OL sheet was carbonized as the beam speed was low and the overlap coefficient was high. The surface quality around the cutting line of the CP sheet was about the same. Carbonization and debris occurred on the surface of the cutting line. As a result of the experiment, the cutting qualities were better as the overlap coefficient was made low and beam speed high. Therefore, the overlap coefficient 2 or 3 is proper for the FPCB laser cutting.

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Nanoparticle Synthesis by Pulsed Laser Ablation of Consolidated Microparticles (압밀 금속 마이크로 입자의 펄스 레이저 ABLATION에 의한 나노입자 합성)

  • 장덕석;오부국;김동식
    • Laser Solutions
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    • v.5 no.2
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    • pp.31-38
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    • 2002
  • This paper describes the process of nanoparticle synthesis by laser ablation of consolidated microparticles. We have generated nanoparticles by high-power pulsed laser ablation of Al, Cu and Ag microparticles using a Q-switched Nd:YAG laser (wavelength 355 nm, FWHM 5 ㎱, fluence 0.8∼2.0 J/㎠). Microparticles of mean diameter 18∼80 ㎛ are ablated in the ambient air The generated nanoparticles are collected on a glass substrate and the size distribution and morphology are examined using a scanning electron microscope and a transmission electron microscope. The effect of laser fluence and collector position on the distribution of particle size is investigated. The dynamics of ablation plume and shock wave is analyzed by monitoring the photoacoustic probe-beam deflection signal. Nanosecond time-resolved images of the ablation process are also obtained by laser flash shadowgraphy. Based on the experimental results, discussions are made on the dynamics of ablation plume.

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Generation and ignition of micro/nano - aluminum particles using laser (레이저를 이용한 마이크로/나노 알루미늄 입자 생성과 점화)

  • Lee, Kyung-Cheol;Yoh, Jai-Ick
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2012.05a
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    • pp.429-434
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    • 2012
  • Ignition delay of micro/nano aluminum particles is caused by aluminum oxide shell. The method of minimizing this ignition delay is proposed in the study. Generating and heating of particles are processed at the same time. As soon as heated particles are produced, they immediately contact with oxygen. Chemical reaction is induced on the contact surface instead of crystallization of oxide shell. Finally particles are ignited. Aluminum particles are generated by laser ablation on an aluminum plate using Nd:YAG pulse laser. Injected particles are confirmed through visualization of particles using scattering method. $CO_2$ continuous laser supplies heat to aluminum plate and generated particles. Trace of burning particles is observed in the experiment.

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