• International Journal of Precision Engineering and Manufacturing
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• v.6 no.4
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• pp.14-20
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• 2005

In this paper, a new field of metrology called 'precision nanometrology' is presented. The 'precision nanometrology' is the result of evolutions of the traditional 'precision metrology' and the new 'nanometrology'. 'Precision nanometrology' is defined here as the science of dimensional measurement and motion measurement with 100 nm to 0.1 nm resolution/uncertainty within a range of micrometer to meter. The definition is based on the fact that nanometrology in nanoengineering and the precision industries, such as semiconductor industry, precision machine tool industry, precision instrument industry, is not only concerned with the measurement resolution and/or uncertainty but also the range of measurement. It should also be pointed out that most of the measurement objects in nanoengineering have dimensions larger than 1 micrometer. After explaining the definition of precision nanometrology, the paper provides several examples showing the critical roles of precision nanometrology in precision nanosystems, including nanometrology system, nanofabrication system, and nanomechatronics system.

• Proceedings of the Korean Magnestics Society Conference
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• 2014.05a
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• pp.23-23
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• 2014

• Proceedings of the Korean Magnestics Society Conference
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• 2013.12a
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• pp.141-141
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• 2013

• Proceedings of the Korean Magnestics Society Conference
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• 2014.05a
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• pp.25-25
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• 2014

• Environmental Analysis Health and Toxicology
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• v.29
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• pp.16.1-16.9
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• 2014

Objectives Rapid increase in engineered nanoparticles (ENPs) in many goods has raised significant concern about their environmental safety. Proper methodologies are therefore needed to conduct toxicity and exposure assessment of nanoparticles in the environment. This study reviews several analytical techniques for nanoparticles and summarizes their principles, advantages and disadvantages, reviews the state of the art, and offers the perspectives of nanometrology in relation to ENP studies. Methods Nanometrology is divided into five techniques with regard to the instrumental principle: microscopy, light scattering, spectroscopy, separation, and single particle inductively coupled plasma-mass spectrometry. Results Each analytical method has its own drawbacks, such as detection limit, ability to quantify or qualify ENPs, and matrix effects. More than two different analytical methods should be used to better characterize ENPs. Conclusions In characterizing ENPs, the researchers should understand the nanometrology and its demerits, as well as its merits, to properly interpret their experimental results. Challenges lie in the nanometrology and pretreatment of ENPs from various matrices; in the extraction without dissolution or aggregation, and concentration of ENPs to satisfy the instrumental detection limit.

• Proceedings of the Korean Magnestics Society Conference
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• 2015.05a
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• pp.127-127
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• 2015

• Proceedings of the Korean Magnestics Society Conference
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• 2014.11a
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• pp.49-49
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• 2014

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.344.2-344.2
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• 2016

Fully and partially grown hexagonal boron nitride (h-BN) on Cu foil, synthesized by chemical vapor deposition method, was studied using Raman and SEM measurements. Fully and partially grown samples were successfully made from borane-ammonia complex to controlling pressure and growth time. The fully grown h-BN and partially grown h-BN exhibits a ~ 1370 cm-1 B-N vibrational mode (E2g). Especially, well-aligned triangular h-BN monolayer was observed on some domain of Cu foil using SEM measurements.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.591-591
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• 2013

Fully and partially grown hexagonal boron nitride (h-BN) on Cu foil, synthesized by chemical vapor deposition method, was studied using Raman and SEM measurements. Fully and partially grown samples were successfully made from borane-ammonia complex to controlling pressure and growth time. The fully grown h-BN and partially grown h-BN exhibits a ~1,370 $cm^{-1}$ B-N vibrational mode ($E_{2g}$) Especially, well-aligned triangular h-BN monolayer was observed on some domain of Cu foil using SEM measurements.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.6
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• pp.40-45
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• 2000

교정은 모든 측정분야에서 어렵고 까다로운 주제인데, 특히 정전센서, 레이저간섭계, AFM, STM 등을 포함하는 나노메트롤로지(nanometrology : 나노측정) 분야에서는 그러하다. 나노측정에서는 전체 측정범위가 센서들의 한계분해능 값과 비슷한데, 이러한 측정에서 높은 소급성을 유지하기는 매우 어렵기 때문이다.(중략)