• Proceedings of the KSME Conference
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• 2005.11a
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• pp.237.1-237.1
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• 2005

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.3 s.246
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• pp.328-333
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• 2006

Movable nanometer-scale structures are fabricated by selective etching of single crystalline Au nanoplates. The nanostructures have arbitrary shapes like gear and alphabet 'A' with in-plane size less than 500 m and thickness of $25\sim60nm$. They could be moved successfully on the substrate using a nanornanipulator installed in a focused ion beam system. Our approach is expected to be useful in fabricating various kinds of nanocomponents which can play a role as building blocks for the sophisticated nanodevices or micromachines.