• 제목/요약/키워드: Nanocomponent

검색결과 2건 처리시간 0.019초

나노판의 선택적 식각에 의한 이동이 가능한 나노구조체 제작 (Fabrication of Movable Nanostructures by Selective Etching of Nanoplates)

  • 윤용주;아칠성;윤완수;하동한
    • 대한기계학회논문집A
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    • 제30권3호
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    • pp.328-333
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    • 2006
  • Movable nanometer-scale structures are fabricated by selective etching of single crystalline Au nanoplates. The nanostructures have arbitrary shapes like gear and alphabet 'A' with in-plane size less than 500 m and thickness of $25\sim60nm$. They could be moved successfully on the substrate using a nanornanipulator installed in a focused ion beam system. Our approach is expected to be useful in fabricating various kinds of nanocomponents which can play a role as building blocks for the sophisticated nanodevices or micromachines.