• 한국세라믹학회지
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• 제40권12호
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• pp.1197-1201
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• 2003

대기 중에서 침전이 생기지 않고 코팅에 적합한 나노크기 Au 미립자가 분산된 ZrO$_2$ 용액을 제조하여, 딥-코팅법으로 SiO$_2$ 유리기판 위에 박막을 제조했다. 이 박막을 열처리하여 열분석, 엑스선 회절분석, 분광분석, 원자력간 현미경, 주사전자현미경 및 투과전자현미경 관찰 등을 통하여 박막의 특성을 조사하였다. ZrO$_2$ 박막은 50$0^{\circ}C$에서 정방정상으로 결정전이가 관찰되었고, 박막의 두께는 약 100nm였다. 분산된 입자의 크기는 약 15∼40nm이며, 표면 거칠기는 0.84nm로 우수한 막질을 나타냈다. 그리고 Au 입자의 표면플라즈마 공명에 의한 흡수피크를 630∼670nm 파장범위에서 확인할 수 있었다.

• 한국전기전자재료학회논문지
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• 제27권1호
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• pp.8-13
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• 2014

As packing density in integrated circuits increases, multilevel metallization process has been widely used. But hillock formed in the bottom layers of aluminum are well known to make interlayer short in multilevel metallization. In this study, the effects of ion implantation to the metal film and deposition temperature on the hillock formation were investigated. The Al-1%Si thin film of $1{\mu}m$ thickness was DC sputtered with substrate ($SiO_2/Si$) temperature of $20^{\circ}C$, $200^{\circ}C$, and $400^{\circ}C$, respectively. Ar ions ($1{\times}10^{15}cm^{-2}$: 150 keV) and B ions ($1{\times}10^{15}cm^{-2}$, 30 keV, 150 keV) were implanted to the Al-Si thin film. The deposited films were evaluated by SEM, surface profiler and resistance measuring system. As a results, Ar implanting to Al-Si film is very effective to reduce hillock size in the metal deposition temperature below than $200^{\circ}C$, and B implanting to an Al-Si film is effective to reduce hillock density in the high temperature deposition conditions around $400^{\circ}C$. Line width less than $3{\mu}m$ was free of hillock after alloying.

• Structural Engineering and Mechanics
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• 제64권3호
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• pp.361-379
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• 2017

In this article, the vibration behavior of double-bonded sandwich microplates with homogeneous core and nanocomposite facesheets reinforced by carbon nanotube and boron nitride nanotube under multi physical fields such as 2D magnetic and electric fields is investigated. Symmetric and un-symmetric distributions of nanotubes are considered for facesheets of sandwich microplates such as uniform distribution and various functionally graded distributions. The double-bonded sandwich microplates rest on visco-Pasternak foundation. Material properties of sandwich microplates are obtained by the extended rule of mixture. The sinusoidal shear deformation theory (SSDT) is employed to describe displacement fields of sandwich microplates. Also, the dimensionless natural frequency is obtained by classical plate theory (CPT) and compared with the obtained results by SSDT. It can be seen that the obtained dimensionless natural frequencies by CPT are higher than SSDT. In order to study the material length scale parameters, modified strain gradient theory at micro scale is utilized and then, the equations of motion are derived using Hamilton's principle. The effects of different parameters such as foundation parameters including Winkler, shear layer and damping coefficients, various distributions and volume fraction of nanotubes, core to facesheet thickness ratio, aspect and side ratios on the dimensionless natural frequencies are discussed in details. The results of present work can be used to optimum design and control of similar systems such as micro-electro-mechanical and nano-electro-mechanical devices.

• Structural Engineering and Mechanics
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• 제76권1호
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• pp.141-151
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• 2020

This manuscript tends to investigate influences of nanoscale and surface energy on a static bending and free vibration of piezoelectric perforated nanobeam structural element, for the first time. Nonlocal differential elasticity theory of Eringen is manipulated to depict the long-range atoms interactions, by imposing length scale parameter. Surface energy dominated in nanoscale structure, is included in the proposed model by using Gurtin-Murdoch model. The coupling effect between nonlocal elasticity and surface energy is included in the proposed model. Constitutive and governing equations of nonlocal-surface perforated Euler-Bernoulli nanobeam are derived by Hamilton's principle. The distribution of electric potential for the piezoelectric nanobeam model is assumed to vary as a combination of a cosine and linear variation, which satisfies the Maxwell's equation. The proposed model is solved numerically by using the finite-element method (FEM). The present model is validated by comparing the obtained results with previously published works. The detailed parametric study is presented to examine effects of the number of holes, perforation size, nonlocal parameter, surface energy, boundary conditions, and external electric voltage on the electro-mechanical behaviors of piezoelectric perforated nanobeams. It is found that the effect of surface stresses becomes more significant as the thickness decreases in the range of nanometers. The effect of number of holes becomes significant in the region 0.2 ≤ α ≤ 0.8. The current model can be used in design of perforated nano-electro-mechanical systems (PNEMS).

• Wind and Structures
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• 제25권2호
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• pp.131-156
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• 2017

This paper deals with the dynamic stability of embedded functionally graded (FG)-carbon nanotubes (CNTs)-reinforced micro cylindrical shells. The structure is subjected to harmonic non-uniform temperature distribution and 2D magnetic field. The CNT reinforcement is either uniformly distributed or FG along the thickness direction where the effective properties of nano-composite structure are estimated through Mixture low. The viscoelastic properties of structure are captured based on the Kelvin-Voigt theory. The surrounding viscoelastic medium is considered nonhomogeneous with the spring, orthotropic shear and damper constants. The material properties of cylindrical shell and the viscoelastic medium constants are assumed temperature-dependent. The first order shear deformation theory (FSDT) or Mindlin theory in conjunction with Hamilton's principle is utilized for deriving the motion equations where the size effects are considered based on Eringen's nonlocal theory. Based on differential quadrature (DQ) and Bolotin methods, the dynamic instability region (DIR) of structure is obtained for different boundary conditions. The effects of different parameters such as volume percent and distribution type of CNTs, mode number, viscoelastic medium type, temperature, boundary conditions, magnetic field, nonlocal parameter and structural damping constant are shown on the DIR of system. Numerical results indicate that the FGX distribution of CNTs is better than other considered cases. In addition, considering structural damping of system reduces the resonance frequency.

• 한국재료학회지
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• 제21권9호
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• pp.509-514
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• 2011

In this study, optical emission spectroscopy was used to monitor the plasma produced during the RF magnetron sputtering of a $BaTiO_3$ target. The intensities of chemical species were measured by real time monitoring with various discharge parameters such as RF power, pressure, and discharge gas. The emission lines of elemental and ionized species from $BaTiO_3$ and Ti targets were analyzed to evaluate the film composition and the optimized growth conditions for $BaTiO_3$ films. The emissions from Ar(I, II), Ba(I, II) and Ti(I) were found during sputtering of the $BaTiO_3$ target in Ar atmosphere. With increasing RF power, all the line intensities increased because the electron density increased with increasing RF power. When the Ar pressure increased, the Ba(II) and Ti(I) line intensity increased, but the $Ar^+$ line intensity decreased with increasing pressure. This result shows that high pressure is of greater benefit for the ionization of Ba than for that of Ar. Oxygen depressed the intensity of the plasma more than Ar did. When the Ar/$O_2$ ratio decreased, the intensity of Ba decreased more sharply than that of Ti. This result indicates that the plasma composition strongly depends on the discharge gas atmosphere. When the oxygen increased, the Ba/Ti ratio and the thickness of the films decreased. The emission spectra showed consistent variation with applied power to the Ti target during co-sputtering of the $BaTiO_3$ and Ti targets. The co-sputtered films showed a Ba/Ti ratio of 1.05 to 0.73 with applied power to the Ti target. The films with different Ba/Ti ratios showed changes in grain size. Ti excess films annealed at $600^{\circ}C$ did not show the second phase such as $BaTi_2O_5$ and $TiO_2$.

• Tribology and Lubricants
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• 제33권5호
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• pp.220-227
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• 2017

In this work, carbon nanotube and nano-size alumina particle are exploited as additive for lubrication experiment. We used pin-on-disk type tribometer to investigate the tribological characteristics of lubricants with respect to additives and rotational speed. We conducted more than 15 trials of tribotests for two hours for each specimen to obtain stable and accurate frictional force and to create measurable wear track on the substrate. We conducted tests at the boundary/mixed lubrication regime to evaluate the influence of additives on the tribological characteristics. We found that the friction coefficient decreased as the rotational speed increased and as additives were added. In particular, the reduction of friction by adding additives was more significant at low rotational speed than at high rotational speed. We speculate that the additives helped to separate and protect the two contacting surfaces at low speed, while the influence of additives was not significant at high speed since sufficiently thick lubricant film was formed. The wear of the substrate was also reduced by adding additives to the lubricant. However, in contrast to friction, the amount of wear at high rotational speed was less when alumina particles were added to the lubricant than the amount of wear at low speed. We speculate that the increased wear at low rotational speed is as a result of the intermittent abrasive wear caused by alumina particles with uneven shape, while the reduced wear at high speed is as a result of sufficient film thickness which prevented the abrasive wear.

• 한국진공학회지
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• 제9권4호
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• pp.328-334
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• 2000

ECR-PECVD 방법을 이용하여 ECR power, $CH_4/H_2$ 가스 혼합비와 유량, 증착시간을 고정시켜놓고 기판 bias 전압을 변화 시켜가면서 DLC 박막을 제작하였고, 제작된 박막의 두께, Raman과 FTIR 스펙트럼 그리고 미소경도 등을 측정 및 분석하여 기판 bias전압에 따른 이온충돌이 박막의 특성 변화에 미치는 영향을 조사하였다. FTIR 분석 결과로부터 기판 bias 전압을 증가시킬수록 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들의 탈수소화 현상을 확인할 수 있었고, 박막의 두께는 bias 전압을 증가시킬수록 감소되었다. 그리고 Raman 스펙트럼으로부터 Gaussian curve fitting을 통하여 $sp^3$/$sp^2$의 결합수에 비례하는 D와 G peak의 면적 강도비(ID/IG)는 기판 bias 전압을 증가시킬수록 증가하였고, 또한 경도도 증가하였다. 이 결과로부터 본 연구에서 제작된 수소를 함유한 비정질 탄소 박막은 기판 bias 전압의 크기를 증가시킬수록 DLC 특성이 더 향상됨을 알 수 있었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.281-281
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• 2010

Very low refractive index (<1.4) materials have been proved to be the key factor improving the performance of various optical components, such as reflectors, filters, photonic crystals, LEDs, and solar cell. Highly porous SiO2 are logically designed for ultralow refractive index materials because of the direct relation between porosity and index of refraction. Among them, ordered macroporous SiO2 is of potential material since their theoretically low refractive index ~1.10. However, in the conventional synthesis of ordered macroporous SiO2, the time required for the crystallization of organic nanoparticles, such as polystyrene (PS), from colloidal solution into well ordered template is typical long (several days for 1 cm substrate) due to the low interaction between particles and particle - substrate. In this study, polystyrene - polyacrylic acid (PS-AA) nanoparticles synthesized by miniemulsion polymerization method have hydrophilic polyacrylic acid tails on the surface of particles which increase the interaction between particle and with substrate giving rise to the formation of PS-AA film by simply spin - coating method. Less ordered with controlled thickness films of PS-AA on silicon wafer were successfully fabricated by changing the spinning speed or concentration of colloidal solution, as confirmed by FE-SEM. Based on these template films, a series of macroporous SiO2 films whose thicknesses varied from 300nm to ~1000nm were fabricated either by conventional sol - gel infiltration or gas phase deposition followed by thermal removal of organic template. Formations of SiO2 films consist of interconnected air balls with size ~100 nm were confirmed by FE-SEM and TEM. These highly porous SiO2 show very low refractive indices (<1.18) over a wide range of wavelength (from 200 to 1000nm) as shown by SE measurement. Refraction indices of SiO2 films at 633nm reported here are of ~1.10 which, to our best knowledge, are among the lowest values having been announced.

• 대한기계학회논문집A
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• 제38권5호
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• pp.483-487
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• 2014

SiC/SiC복합재료는 뛰어난 고온특성, 내산화성 및 크립(Creep)에 대한 저항성이 우수하고 또한 중성자에 의한 조사 손상이 다른 세라믹스에 비해서 적게 받는다는 장점으로 인하여 핵융합로의 블랑켓(Blanket), 제1벽(First-wall) 및 다이버터(Di-vertor)등의 후보재료로 적용이 기대되고 있다. SiC/SiC복합재료 제조시 가장 큰 문제점은 높은 소결온도와 압력으로 인하여 탄화규소 섬유가 손상되어 복합재료의 특성이 저하되는 것이므로 이들 재료의 전단강도 특성 평가는 매우 중요하다, 본 연구에서는 SiC제조특성과 소결온도에 대한 전단강도 특성의 평가한다.