• 설비공학논문집
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• 제25권12호
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• pp.674-678
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• 2013

We present a non-invasive technique to the measure temperature distribution in nano-sized porous thin films by means of the two-color laser-induced fluorescence (2-LIF) of rhodamine B. The fluorescence induced by the green line of a mercury lamp with the makeup of optical filters was measured on two separate color bands. They can be selected for their strong difference in the temperature sensitivity of the fluorescence quantum yield. This technique allows for absolute temperature measurements by determining the relative intensities on two adequate spectral bands of the same dye. To measure temperature fields, Silica (SiO2) nanoporous structure with 1-um thickness was constructed on a cover glass, and fluorescent dye was absorbed into these porous thin films. The calibration curves of the fluorescence intensity versus temperature were measured in a temperature range of $10-60^{\circ}C$, and visualization and measurement of the temperature field were performed by taking the intensity distributions from the specimen for the temperature field.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.127-128
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• 2008

The electrical characteristics of VARIOT (variable oxide thickness) with various $HfO_2$ thicknesses on thin $SiO_2$ or $Al_2O_3$ layer were investigated. Especially, the charge trapping characteristics of $HfO_2$ layer were intensively studied. The thin $HfO_2$ layer has small charge trapping characteristics while the thick $HfO_2$ layer has large memory window. Therefore, the $HfO_2$ layer is superior material and can be applied to charge storage as well as tunneling barrier of the non-volatile memory applications.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.794-797
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• 2009

We manufactured a novel gas permeation thin film passivation by using inorganic Mg-Zn-F target which has better optical characteristics and high electronegativity. We fabricated targets in various composition ratio and formed about 200nm which is limited thickness of the flexible display. Applied to PLED device, the target which composed of $MgF_2$ and Zn at the ratio of 4:6, WVTR was reached the measurement limit of the equipment, $10^{-3}g/m^2{\cdot}day$ and the life time was increased 25 times better than PLED device which is non-passivation.

• Advances in nano research
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• 제8권2호
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• pp.115-134
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• 2020

In this paper, the free vibrations analysis of the nanoplates made of three-directional functionally graded material (TDFGM) with small scale effects is presented. To study the small-scale effects on natural frequency, modified strain gradient theory (MSGT) has been used. Material properties of the nanoplate follow an arbitrary function that changes in three directions along the length, width and thickness of the plate. The equilibrium equations and boundary conditions of nanoplate are obtained using the Hamilton's principle. The generalized differential quadrature method (GDQM) is used to solve the governing equations and different boundary conditions for obtaining the natural frequency of nanoplate made of three-directional functionally graded material. The present model can be transformed into a couple stress plate model or a classic plate model if two or all parameters of the length scales set to zero. Finally, numerical results are presented to study the small-scale effect and heterogeneity constants and the aspect ratio with different boundary conditions on the free vibrations of nanoplates. To the best of the researchers' knowledge, in the literature, there is no study carried out into MSGT for free vibration analysis of FGM nanoplate with arbitrary functions.

• 반도체디스플레이기술학회지
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• 제14권3호
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• pp.7-11
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• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• Journal of the Optical Society of Korea
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• 제16권3호
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• pp.236-242
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• 2012

In general, such methods as interferometers or wavefront sensors are commonly used for testing of an optical system and optical components. In these cases, the surrounding environments are unlikely to affect the measurements. On the other hand, intraocular lenses of hydrophilic materials with special properties experience a certain difficulty in testing the optical properties. An intraocular lens is dried in the air, which causes deformation and changes the optical characteristics such as index of refraction and thickness. Thus, it is hard to measure the optical characteristics of an intraocular lens by using common methods. In this study, a special structure is used for measuring of the transmission wavefront aberration and effective focal length of an intraocular lens of hydrophilic materials by using a Shark-Hartmann sensor among the various measuring methods. As an application of this measuring method, this study shows a simple method to measure the index of refraction of unknown liquids with a plano-convex lens with a well known index of refraction. Also, this method is used to measure the optical properties of a plano-convex such as index of refraction and curvature by using a liquid with a well known index of refraction.

• Transactions on Electrical and Electronic Materials
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• 제3권3호
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• pp.8-13
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• 2002

Controlled precipitation of quasi-binary semiconductor system is newly proposed as an effective and reliable technique for the formation of well-defined and crystallographically aligned semiconductor nanostructures. Using HgTe-PbTe quasi-binary semiconductor system, self-aligned HgTe nanocrystallites distributed three dimensionally within PbTe matrix were successfully formed by the simple three step heat treatment process routinely found in age hardening process of metallic alloys. Examination of the resulting nano precipitates using conventional transmission electron microscopy (CTEM) and high resolution TEM (HRTEM) reveals that the coherent HgTe precipitates form as thin discs along the (100) habit planes making a crystallographic relation of {100}$\_$HgTe///{100}$\_$PbTe/ and [100]$\_$HgTe///[100]$\_$PbTe/. It is also found that the precipitate undergoes a gradual thickening and a faceting under isothermal aging up to 500 hours without any noticeable coarsening. These results, combined with the extreme dimension of the precipitates (4-5 nm in length and sub-nanometer in thickness) and the simplicity of the formation process, leads to the conclusion that controlled precipitation is an effective method for preparing desirable quantum-dot nanostructures.

• 한국표면공학회지
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• 제42권4호
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• pp.173-178
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• 2009

DLC film was synthesized on plastic injection mold(SKD11, $30\;mm\;{\times}\;19\;mm\;{\times}\;0.5\;mm$) and Si(100) wafer for 2 h at $130^{\circ}C$ under 6 mTorr using hybrid method of rf sputtering and ion source. The obtained film was analysed by Raman spectroscopy, AFM, TEM, Nano indenter and scratch tester, etc. The film was defined as an amorphous phase. In the Raman spectrum, broad peak of $sp^2$-bonded carbon attributed to graphite at $1550\;cm^{-1}$ were observed, and the ratio of ID($sp^3$ diamond intensity)/IG($sp^2$ graphite intensity) was approximately 0.54. The adhesion of DLC film was more than 80 N with scratch tester when $0.2\;{\mu}m$ thickness Cr was coated as interlayer. The micro-hardness was distributed at 35~37 GPa. The friction coefficient was 0.02~0.07, and surface roughness(Ra) was 0.34~1.64 nm. The lifetime of DLC coated plastic injection mold using as a connector part in computer was more than 2 times of non-coated mold.

• Transactions on Electrical and Electronic Materials
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• 제12권1호
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• pp.11-15
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• 2011

In this study, $ZnGa_2O_4$ phosphors in its application to field emission displays and electroluminescence were synthesized through the precipitation method and $Mn^{2+}$ ions. A green luminescence activator, $Cr^{3+}$ ions, and a red luminescence activator were separately doped into $ZnGa_2O_4$, which was then screen printed to an indium tin oxide substrate. The thick films of the $ZnGa_2O_4$ were deposited with the various thicknesses using nano-sized powder. The best luminescence characteristics were shown at a thickness of 60 ${\mu}m$. Additionally, green-emission $ZnGa_2O_4:Mn^{2+}$ and red-emission $ZnGa_2O_4:Cr^{3+}$ phosphor thick films, which have superior characteristics, were manufactured through the screen-printing method. These results indicate that $ZnGa_2O_4$ phosphors prepared through the precipitation method have wide application as phosphor of the full color emission.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.144-144
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• 2007

Effects of power ratio on the electrical and optical properties of Au based Ga-, B- codoped ZnO(GZOB) thin films were investigated. GZOB thin films on Au based PC flexible substrate were deposited at various power in the range from 50 to 125 W by DC magnetron sputtering. Au layer was fabricated to achieve good electrical conductivity. The presence of additional boron impurity leads to improve structural defects. Thus, the c-axis orientation along (002) plane was enhanced with the increasing of power ratio and the surface morphology of the films showed a homogeneous and nano-sized microstructure. GZOB films grown at 125W were investigated a low resistivity value of $1{\times}10^{-3}{\Omega}cm$ and a visible transmission of 80% with a thickness of 300nm.