• Journal of the Korean Society for Precision Engineering
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• 제21권6호
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• pp.153-159
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• 2004

In this study, a new process to pattern directly on a thin metal layer using improved nano replication printing (nRP) process is suggested to evaluate the possibilities of fabricating a stamp for nano-imprinting. In the nRP process, any figure can be replicated from a bitmap figure file in the range of several micrometers with nano-scaled details. In the process, liquid-state resins are polymerized by two-photon absorption which is induced by femto-second laser. A thin gold layer was sputtered on a glass plate and then, designed patterns or figures were developed on the gold layer by newly developed top-down building approach. Generally, stamps fur nano-imprinting have been fabricated by using the costly electron-beam lithography process combined with a reactive ion-etching process. Through this study, the effectiveness of the improved nRP process is evaluated to make a stamp with the resolution of around 200nm with reduced cost.

• Journal of the Semiconductor & Display Technology
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• 제5권4호
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• pp.1-4
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• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1531-1534
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• 2005

Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.413-417
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• 2004

Recent experiments have shown the 'size effects' in micro/nano scale. But the classical plasticity theories can not predict these size dependent deformation behaviors because their constitutive models have no characteristic material length scale. The Mechanism - based Strain Gradient(MSG) plasticity is proposed to analyze the non-uniform deformation behavior in micro/nano scale. The MSG plasticity is a multi-scale analysis connecting macro-scale deformation of the Statistically Stored Dislocation(SSD) and Geometrically Necessary Dislocation(GND) to the meso-scale deformation using the strain gradient. In this research we present a study of nano-indentation by the MSG plasticity. Using W. D. Nix and H. Gao s model, the analytic solution(including depth dependence of hardness) is obtained for the nano indentation , and furthermore it validated by the experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.682-685
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• 2003

In this paper, we propose the method to measure the Young's modulus of carbon nano tube which was manufactured by chemical vapor deposition. We also made the tungsten tip by electrochemical etching process and the carbon nano tube which was detangled through ultra-sonication with isopropyl alcohol was attached to the tungsten tip. This tip which was composed of tungsten tip and carbon nano tube can be used in Young's modulus measurement by applying DC voltage with counter electrode. The attachment process and measurement of the deflection of carbon nano tube was done under optical microscope.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.579-584
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• 2008

A nano-imprinting stage has been widely used in various fields of nanotechnology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body vibration has been presented. The simulation using CAE for the imprinting machine is to analyze vibration characteristics of 3-axis nano-imprinting stage and 4-axis nano-imprinting stage. Structural components such as the upper plate have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.655-656
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• 2006

We will provide the ultra-precise material processing technique with a femtosecond pulse laser system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.189-192
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• 2002

Recently, micro-nano system is fabricated by photolithograph method. This method can not have mass production, so this method wastes time and human effort. accordingly, the aim of this paper is to research on injection molding of micro-nano system. For injection molding process, development of micro-nano mold is required. Mold for injection mold process is maintained its shape in high pressure and temperature. So in this paper, we studied the simulation of mold fur injection molding and then we consider a result of injection molding simulation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.615-616
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.475-476
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• 2007