• Journal of the Semiconductor & Display Technology
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• v.13 no.2
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• pp.53-56
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• 2014

In this work, we investigate the operational properties of this proposed device in detail via classical MD simulations. The bi-stability of the GNF(Graphene Nano-flake) shuttle encapsulated in bi-layer GNR could be achieved from the increase of the attractive energy between the GNRs when the GNF approached the edges of the GNRs. This result showed the potential application of the nano-electromechanical GNR memory as a NVRAM.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.63-66
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• 2013

Carbon Nanotube have been proposed for use in various applications for electromechanical systems. Nano-electromechanical resonators which provide high frequency resolution and long energy storage time, play an important role in wide area fields of science and engineering. Using the control of tension in carbon nanotube, can be made the tunable resonator. In the study, we analysis the tunable frequency change of resonator by tension changes due to the rotation angles of the single-walled carbon nanotube resonator. The frequency characteristics of a resonator as a function of the rotation angle. The tension was found to decrease with increasing rotation angle, and therefore the resonance frequencies could be changed by controlling the single-walled carbon nanotube rotation angle. The resonance frequencies decreased with increasing angle, and when the rotation angle was greater than $60^{\circ}$, these changes were marked.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.361.1-361.1
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• 2016

Due to their high sensitivity, fast response, small energy consumption and ease of integration, nanoelectromechanical systems (NEMS) have attracted much interest in various applications such as high speed memory devices, energy harvesting devices, frequency tunable RF receivers, and ultra sensitive mass sensors. Since the device performance of NEMS is closely related with the mechanical and flexural properties of the material in NEMS, analysis of the mechanical and flexural properties such as intrinsic tensile stress and Young's modulus is a crucial factor for designing the NEMS structures. In the present work, the intrinsic mechanical properties of highly stressed silicon nitride (SiN) beams are investigated as a function of the beam length using two different techniques: (i) dynamic flexural measurement using optical interferometry and (ii) quasi-static flexural measurement using atomic force microscopy. The reliability of the results is analysed by comparing the results from the two different measurement techniques. In addition, the mass density, Young's modulus and internal stress of the SiN beams are estimated by combining the techniques, and the prospect of SiN based NEMS for application in high sensitive mass sensors is discussed.

• Structural Engineering and Mechanics
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• v.61 no.5
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• pp.617-624
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• 2017

Piezoelectric nanobeams are used in several nano electromechanical systems. The first step in designing these systems is conducting a vibration analysis. In this research, the free vibration of a piezoelectric nanobeam is analyzed by using the nonlocal elasticity theory. The nanobeam is modeled based on Euler-Bernoulli beam theory. Hamilton's principle is used to derive the equations of motion and also the boundary conditions of the system. The obtained equations of motion are solved by using both Galerkin and the Differential Quadrature (DQ) methods. The clamped-clamped and cantilever boundary conditions are analyzed and the effects of the applied voltage and nonlocal parameter on the natural frequencies and mode shapes are studied. The results show the success of Galerkin method in determining the natural frequencies. The results also show the influence of the nonlocal parameter on the natural frequencies. Increasing a positive voltage decreases the natural frequencies, while increasing a negative voltage increases them. It is also concluded that for the clamped parts of the beam and also other parts that encounter higher values of stress during free vibrations of the beam, anti-nodes in voltage mode shapes are observed. On the contrary, in the parts of the beam that the values of the induced stress are low, the values of the amplitude of the voltage mode shape are not significant. The obtained results and especially the mode shapes can be used in future studies on the forced vibrations of piezoelectric nanobeams based on Galerkin method.