• Journal of Electrical Engineering and Technology
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• 제12권5호
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• pp.2007-2013
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• 2017

In order to give hydrophobic surface properties on carbon steel, the fluorinated amorphous carbon films were prepared by using linear 2.45GHz microwave PECVD device. Two different process approaches have been tested. One is direct deposition of a-C:H:F films using admixture of $Ar/CH_4/CF_4$ working gases and the other is surface treatment using $CF_4$ plasma after deposition of a-C:H film with $Ar/CH_4$ binary gas system. $Ar/CF_4$ plasma treated surface with high $CF_4$ gas ratio shows best hydrophobicity and durability of hydrophobicity. Nanometer scale surface roughness seems one of the most important factors for hydrophobicity within our experimental conditions. The properties of a-C:H:F films and $CF_4$ plasma treated a-C:H films were investigated in terms of surface roughness, hardness, microstructure, chemical bonding, atomic bonding structure between carbon and fluorine, adhesion and water contact angle by using atomic force microscopy (AFM), nano-indentation, Raman analysis and X-ray photoelectron spectroscopy (XPS).

• Advances in nano research
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• 제3권3호
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• pp.133-141
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• 2015

Influence of Ag nanoparticles on optical and photovoltaic properties of, silicon substrates, silicon solar cells and glass have been investigated. Silver nanoparticles have been fabricated by evaporation of thin Ag layers followed by the thermal annealing. The surface plasmon resonance peak was observed in the absorbance spectrum at 470 nm of glass with deposited silver nanoparticles. It is demonstrated that deposition of silver nanoparticles on silicon substrates was accompanied with a significant decrease in reflectance at the wavelength 360-1100 nm and increase of the absorption at wavelengths close to the band gap for Si substrates. We studied influence of Ag nanoparticles on photovoltaic characteristics of silicon solar cells without and with common use antireflection coating (ARC). It is shown that silver nanoparticles deposited onto the front surface of the solar cells without ARC led to increase in the photocurrent density by 39% comparing to cells without Ag nanoparticles. Contrary to this, solar cells with Ag nanoparticles deposited on front surface with ARC discovered decrease in photocurrent density. The improved performance of investigated cells was attributed to Ag-plasmonic excitations that reduce the reflectance from the silicon surface and ultimately leads to the enhanced light absorption in the cell. This study showed possibility of application of Ag nanoparticles for the improvement of the conversion efficiency of waferbased silicon solar cells instead of usual ARC.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 춘계학술발표대회
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• pp.65-65
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• 2011

Single-well carbon nanotubes (SWNT) have been proposed as a promising candidate for various applications owing to their excellent properties. In particular, their fascinating electrical and mechanical properties could provide a new area for the development of advanced engineering materials. A transparent conductive thin film (TCF) has increased for applications such as liquid crystal displays, touch panels, and flexible displays. Indium tin oxide (ITO) thin films, which have been traditionally used as the TCFs, have a serious obstacle in TCFs applications. SWNTs are the most appropriate materials for conductive films for displays due to their excellent high mechanical strength and electrical conductivity. But, a bundle of CNTs has different electrical properties than their individual counterparts. In this work, the fabrication by the spraying process of transparent SWNT films and reduction of its sheet resistance on PET substrates is researched. Arc-discharge SWNTs were dispersed in deionized water by adding sodum dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWNT was spray-coated on PET substrate and dried on a hotplate at $100^{\circ}C$. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then treated with ionic doping treatment, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. Results, we show that 97 ${\Omega}$/> sheet resistance can be achieved with 81% transmittance at the wavelength of 550 nm. The changes in electrical and optical conductivity of SWNT film before and after ionic doping treatments were discussed.

• 한국재료학회지
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• 제21권4호
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• pp.236-241
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• 2011

Polysilazane and silazane-based precursor films were deposited on stacked TiN/Ti/TEOS/Si-substrate by spin-coating, then annealed at $150{\sim}400^{\circ}C$, integrated further to form the top electrode and pad, and finally characterized. The precursor solutions were composed of 20% perhydro-polysilazane ($SiH_2NH$)n, and 20% hydropolymethyl silazane ($SiHCH_3NH$)n in dibutyl ether. Annealing of the precursor films led to the compositional change of the two chemicals into silicon (di)oxides, which was confirmed by Fourier transform infrared spectroscopy (FTIR) spectra. It is thought that the different results that were obtained originated from the fact that the two precursors, despite having the same synthetic route and annealing conditions, had different chemical properties. Electrical measurement indicated that under 0.6MV/cm, a larger capacitance of $2.776{\times}10^{-11}$ F and a lower leakage current of 0.4 pA were obtained from the polysilazane-based dielectric films, as compared to $9.457{\times}10^{-12}$ F and 2.4 pA from the silazane-based film, thus producing a higher dielectric constant of 5.48 compared to 3.96. FTIR indicated that these superior electrical properties are directly correlated to the amount of Si-O bonds and the improved chemical bonding structures of the spin-on dielectric films, which were derived from a precursor without C. The chemical properties of the precursor films affected both the formation and the electrical properties of the spin-on dielectric film.

• Current Optics and Photonics
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• 제3권6호
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• pp.541-547
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• 2019

A novel photonic crystal fiber (PCF) sensor with three D-shaped holes based on surface plasmon resonance (SPR) is analyzed in this paper. Three D-shaped holes are filled with the analyte, and the gold film is deposited on the side of three planes. The design of D-shaped holes with outward expansion can effectively solve the uniformity problem of metallized nano-coating, it is beneficial to the filling of the analyte and is convenient for real-time measurement of the analyte. Compared with the hexagonal lattice structure, the triangular arrangement of the clad air holes can significantly reduce the transmission loss of light and improve the sensitivity of the sensor. The influences of the air hole diameter, the distance between D-shaped holes and core, and the counterclockwise rotation angle of D-shaped holes on sensing performance are studied. The simulation results show that the wavelength sensitivity of the designed sensor can be as high as 10100 nm/RIU and the resolution can reach 9.9 × 10^-6 RIU.

• Progress in Superconductivity
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• 제7권1호
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• pp.87-91
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• 2005

[ $YBa_{2}Cu_{3}O_{7-x}$ ] thin films were fabricated on $LaAlO_3$(100) substrate by TFA-MOD process. Yttrium-excess (0, 2.5, 5, 10, 15, 20 $at\%$) coating solution was prepared by adding extra amount of yttrium into a stoichiometric(Y:Ba:Cu=1:2:3) TFA precursor solution. Results are presented concerning the influence of excess yttrium additions on the microstructure development and superconducting properties of $YBa_{2}Cu_{3}O_{7-x}$ film. Large sized CuO particles was observed by SEM EDS investigation. The addition of excess yttrium affected little on $T_c$ of $YBa_{2}Cu_{3}O_{7-x}$ film. $J_c$ of YBCO film was enhanced with excess yttrium addition. Jc maximum of $2.21\;MA/cm^2$ (77 K, self field) appeared with the $15\;at\%$ addition of excess yttrium. With further yttrium addition up to $20\;at\%$, Jc decreased down to $0.9\;MA/cm^2$.

• 한국세라믹학회지
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• 제42권2호
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• pp.117-122
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• 2005

나노 코팅 기술로써 빠른 증착 속도와 미세구조 제어가 용이하여 항공기 엔진 부품 열차폐 코팅으로 널리 이용되는 Electron Beam Physical Vapor Deposition (EB-PVD)세라믹 코팅 기술을 연료전지 전해질 제조에 적용하였다. EB-PVD 법을 이용하여 NiO-YSZ 기판에 YSZ 전해질을 약 10$\mu$m의 두께로 짧은 시간에 코팅하였으며 증착온도에 따라 나노 구조의 표면을 가진 YSZ 막을 얻을 수 있었다. 연료전지 전해질로서의 특성을 평가하기 위하여, 같은 조건의 코팅으로 $Al_{2}O_3$기판에 전해질을 동일한 조건으로 코팅하여 전해질의 전기적 특성을 평가하였다. 또한 양극물질로서 $LaSrCoO_3$ 분말을 일반적인 스크린 프린팅 기법으로 코팅하여 EB-PVD의 코팅을 이용한 고체산화물 연료전지 제조 가능성에 대하여 논의하였다

• 한국세라믹학회지
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• 제40권12호
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• pp.1197-1201
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• 2003

대기 중에서 침전이 생기지 않고 코팅에 적합한 나노크기 Au 미립자가 분산된 ZrO$_2$ 용액을 제조하여, 딥-코팅법으로 SiO$_2$ 유리기판 위에 박막을 제조했다. 이 박막을 열처리하여 열분석, 엑스선 회절분석, 분광분석, 원자력간 현미경, 주사전자현미경 및 투과전자현미경 관찰 등을 통하여 박막의 특성을 조사하였다. ZrO$_2$ 박막은 50$0^{\circ}C$에서 정방정상으로 결정전이가 관찰되었고, 박막의 두께는 약 100nm였다. 분산된 입자의 크기는 약 15∼40nm이며, 표면 거칠기는 0.84nm로 우수한 막질을 나타냈다. 그리고 Au 입자의 표면플라즈마 공명에 의한 흡수피크를 630∼670nm 파장범위에서 확인할 수 있었다.

• 한국안광학회지
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• 제13권3호
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• pp.73-77
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• 2008

목적: 본 논문은 저온열처리로 비결정 또는 결정 ZnO 박막의 UV emission 가능하다는 것이다. 방법: 화학적 용액법을 이용하여 소다-라임-실리카 유리 위에 100, 150, 200, 250 및 $300^{\circ}C$로 열처리하여 비정질 및 나노 결정질 ZnO 박막을 제조하였으며, 박막의 성장 특성 및 광학적 특성을 X-선 회절 분석법, 자외선-가시광선-근적외선 분광법 및 발광분석법을 통하여 분석하였다. 결과: $100^{\circ}C{\sim}200^{\circ}C$에서 60분간 열처리된 박막은 비정질 특성을 나타내고 있었으며, $250^{\circ}C$ 및 $300^{\circ}C$로 열처리된 박막에서는 ZnO 결정상이 나타났다. 비정질 ZnO 박막의 PL분석에 의하면 매우 강한 Near-band-edge emission이 나타났으며, Green emission은 거의 검출되지 않았다. 결론: 앞으로는 저온에서 ZnO 광전자소자를 쉽게 제조할 수 있을 것이다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.281-281
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• 2010

Very low refractive index (<1.4) materials have been proved to be the key factor improving the performance of various optical components, such as reflectors, filters, photonic crystals, LEDs, and solar cell. Highly porous SiO2 are logically designed for ultralow refractive index materials because of the direct relation between porosity and index of refraction. Among them, ordered macroporous SiO2 is of potential material since their theoretically low refractive index ~1.10. However, in the conventional synthesis of ordered macroporous SiO2, the time required for the crystallization of organic nanoparticles, such as polystyrene (PS), from colloidal solution into well ordered template is typical long (several days for 1 cm substrate) due to the low interaction between particles and particle - substrate. In this study, polystyrene - polyacrylic acid (PS-AA) nanoparticles synthesized by miniemulsion polymerization method have hydrophilic polyacrylic acid tails on the surface of particles which increase the interaction between particle and with substrate giving rise to the formation of PS-AA film by simply spin - coating method. Less ordered with controlled thickness films of PS-AA on silicon wafer were successfully fabricated by changing the spinning speed or concentration of colloidal solution, as confirmed by FE-SEM. Based on these template films, a series of macroporous SiO2 films whose thicknesses varied from 300nm to ~1000nm were fabricated either by conventional sol - gel infiltration or gas phase deposition followed by thermal removal of organic template. Formations of SiO2 films consist of interconnected air balls with size ~100 nm were confirmed by FE-SEM and TEM. These highly porous SiO2 show very low refractive indices (<1.18) over a wide range of wavelength (from 200 to 1000nm) as shown by SE measurement. Refraction indices of SiO2 films at 633nm reported here are of ~1.10 which, to our best knowledge, are among the lowest values having been announced.