Characteristic properties of TiN thin films prepared by DC magnetron sputtering method for hard coatings (Hard coating 응용을 위한 DC 마그네트론 스퍼터링 방법을 이용하여 증착한 TiN 박막의 특성에 대한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2007.11a
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- pp.354-354
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- 2007