• Proceedings of the KIEE Conference
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• 2007.10a
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• pp.251-252
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• 2007

Nano manipulator is used to manufacture Carbon NanoTube(CNT) tips. Using nano manipulator operator attaches a CNT at the end of Atomic Force Microscopy(AFM) tip, which requires a master mechanic and long manufacture time. Nano manipulator is installed inside Scanning Electron Microscopy (SEM) chamber to observe the operation. This paper presents a control of horizontal axis of nano manipulator via processing SEM image. Edges of AFM tip and CNT are first detected, the position information so obtained is fed to control horizontal axis of nano manipulator. To be specific, visual servoing loop was realized to control the axis more precisely.

• Journal of Powder Materials
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• v.10 no.4
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• pp.262-269
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• 2003

Nano-sized Ni-ferrite powder was fabricated by spray pyrolysis process using the waste solution resulting from shadow mask processing. The average particle size of the powder was below 100 nm. The effects of the concentration of raw material solution, the nozzle tip size and air pressure on the properties of powder were studied. As the concentration increased, the average particle size of the powder gradually increased and its specific surface area decreased, but size distribution was much wider and the fraction of the Ni-ferrite phase greatly increased as the concentration increasing. As the nozzle tip size increased from 1 mm to 2 mm, the average particle size of the powder decreased. In case of 3 mm nozzle tip size, the average particle size of the powder increased slightly. On the other hand, in case of 5 mm nozzle tip size, average particle size of the powder decreased. Size distribution of the powder was unhomogeneous, and the fraction of the Ni-ferrite phase decreased as the nozzle tip size increasing. As air pressure increased up to 1 kg/$cm^2$, the average particle size of the powder decreased slightly, on the other hand, the fraction of the Ni-ferrite phase was almost constant. In case of 3kg/$cm^2$ air pressure, average particle size of the powder and the fraction of the Ni-ferrite phase remarkably decreased, but size distribution was narrow.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.177.2-177.2
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• 2015

Nano-mechanics 연구는 기판의 나노표면에 대하여 indenter tip을 직접 인가하여 측정함으로써 기존 분광학 연구에서는 불가능했던 박막의 기계적 특성 연구가 가능하다. 그러나 박막분석 특성상 박막의 표면, 기판 또는 하부 박막에 의한 영향으로 인해 박막의 고유한 물성특성 연구에 제약이 있다. 박막 표면에 의한 영향인 표면효과는 nano-indentation을 실행 할 때 tip의 압입으로 발생되는 표면의 스트레스로 인해 표면 변형이 나타나는 현상이다. 반면에 하부 박막과 기판에 의한 오류는 nano-indentation 실행 시 tip의 압입 깊이가 깊어질수록 하부박막 또는 기판과 가까워지기 때문에 박막 고유의 특성이 아닌 하부박막과 기판에 의한 영향이 같이 나타나는 현상이다. 이러한 오류를 최소화 하고자 많은 연구에서는 박막의 강도에 따라 nano-indentation의 실행 깊이를 박막 총 두께의 최소7%에서 최대 50%까지 삽입하는 방법을 도입하였다. 이를 기반으로 본 연구는 Zirconium nitride (ZrN) 박막의 증착된 두께 깊이만큼 nano-indentation 분석을 실행 하였으며 박막 고유의 nano-mechanics 특성을 연구 하였다. ZrN 박막은 hard coating 분야에 많이 사용되는 물질로 박막 고유의 hardness를 연구하는 것이 큰 의미가 있다. 연구 결과 모든 박막은 두께 30% 깊이 측정에서 박막 표면과 기판효과가 최소화된 박막의 물성 측정이 가능 하였고, 증착 시 질소를 0.5, 1, 2 sccm 흘려준 박막들은 총 두께 30% 깊이에서 hardness가 각각 23.2, 8.6, 18 GPa이었다. 따라서 nano-indenter 측정 시 유효한 측정 깊이에서 측정을 실시하는 것이, 박막의 물성분석에 있어서 대단히 중요함을 확인 하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.7
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• pp.594-598
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• 2008

The metal catalyst particles which there is as impurities on a tip part of carbon nanotube (CNT) are not good to apply it to a nano-electronic device. It was very important the opening of CNT-tip to fix a target bio material and a material to accept in CNT in a biosensor, so we performed $HNO_3$ wet etching to remove the metal catalyst particle which there was on a tip part of CNT grown up in the study and observed the opened CNT-tip with etching time. We synthesized the CNTs using a HF-PECVD method and choses the CNT length of 700 nm for the application of nano-electronic device such as a biosensor etc.. We observed the opened CNT-tip with wet etching times of $HNO_3$ (10, 30, 60 min). From the results, we observed that the CNT-tip was opened with the increase of wet etching time lively. In case of CNTs etched during 60 min, we confirmed that there was not the ratio of Ni included in CNTsI as catalyst. Conclusively, in the case of CNT etched for 60 minutes, it is completely good for application of a biosensor and, in addition, the metal-free CNTs will contribute to the application of other nanoelectronic devices.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.395-400
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• 2005

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.39-46
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• 2006

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.167-171
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• 2004

In this paper, we proposed a new method to control the length of carbon nanotube using electrochemical etching. We made a nano probe that was composed of the tungsten tip and multi-wall carbon nanotube. The nano probe was placed on the nano stage and the carbon nanotube on the nano probe was etched in the electrolyte solution with the applied voltage. The overall procedures were done under optical microscope and can be monitored. We can obtain a nano probe with proper length through this procedure.

• Journal of Sensor Science and Technology
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• v.23 no.2
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• pp.110-113
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• 2014

In this paper, we propose and demonstrate a Fabry-Perot interferometer (FPI) optical fiber tip sensor fabricated by a blade-sawing technique using a fiber optic patch cord for high-resolution temperature measurement. The sensor head consists of a short air FP cavity near the tip of a single-mode fiber patch cord tip. The temperature which we can measure is determined through a phase variation of the interference fringes in the reflective spectrum of the sensor. The fiber optic FPI sensor in this work can monitor the environmental temperature very accurately from 40 to $120^{\circ}C$. As a result, the temperature sensitivity is obtained as $38.2pm/^{\circ}C$.

• KSTLE International Journal
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• v.5 no.1
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• pp.1-6
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• 2004

Nano-scale studies on adhesion and friction were conducted in Si-wafer (100) using Atomic Force Microscopy (AFM). Glass (Borosilicate) balls of radii 0.32$\mu\textrm{m}$, 1.25$\mu\textrm{m}$, and 2.5$\mu\textrm{m}$, mounted on cantilever (Contact Mode type NPS) were used as tips. Adhesion and friction between Si-wafer and glass tips were measured at ambient temperature (24${\pm}$1$^{\circ}C$) and humidity (45${\pm}$5%). Friction was measured as a function of applied normal load in the range of 0-160 nN. Results showed that, both adhesion and friction increased with the tip radii. Also, friction increased linearly as a function of applied normal load. The effect of tip size on adhesion and friction was explained as the influence of the capillary force exerted by meniscus and that of the contact area on these parameters respectively. The coefficient of friction was estimated in two different ways, as the slope from the plot of friction force against the applied normal load and as the ratio between the friction force and the applied normal load. Both these estimates showed that the coefficient of friction increased with the tip size. Further, the influence of the adhesion force on the coefficient of friction was also discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.351-351
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• 2010

Nanoscale patterning using an atomic force microscope tip induced scratching was systematically investigated in AI thin film on 4H-SiC. To identify the effects of the scratch parameters, including the tip loading force, scratch speed, and number of scratches, we varied each parameters and evaluated the major parameter which has intimate relationship with the scale of patterns. In this work, we present the successful demonstration of nano patterning of Al thin film on a 4H-SiC substrate using an AFM scratching and evaluated the scratch parameters on Al/4H-SiC.