• Korean Journal of Materials Research
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• v.30 no.11
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• pp.609-614
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• 2020

3 mol% yttria-doped stabilized zirconia (3YSZ) is synthesized by a solvothermal process, and its characteristics are investigated using various methods. Also, the dispersibility of synthesized 3YSZ nanoparticles is observed with the species of surface modifier. The 3YSZ nano sol prepared with an optimum condition is employed in prism coating and its properties are evaluated. The synthesized 3YSZ nanoparticles show a globular shape with about 10 to 20 nm crystallite size. The mixed phases with the nano sol show a high specific surface of 178 ㎡/g. The prism sheet coated with the 3YSZ nano sol present an excellent refractive index, transmittance, and luminance; refractive index is 1.603, transmittance is 90.2 %, and luminance of coating film is improved by 5.9 % compared to that of the film without 3YSZ nano sol. It is verified that the surface modified 3YSZ is suitable as the prism sheet for optical displays.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.29-54
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• 2005

Consolidation of ceramic particles at room temperature. Reduction of crystallite size and formation of nano-crystalline. Applicable to Integrate functionalceramic materials with metals and Si structure and to fabricate MEMS devises

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2005.10a
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• pp.135-137
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.511-512
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• 2006

• 한국초전도학회:학술대회논문집
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• 2008.08a
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• pp.86-86
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• 2008

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.5
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• pp.609-614
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• 2014

The fringe field effects on the transient characteristics of nano-electromechanical (NEM) memory cells have been discussed by using an analytical model. The influence of fringe field becomes stronger as the size of a cell decreases. By using the proposed model, the dependency of NEM memory transient characteristics on cell parameters has been evaluated.

• Journal of the Korean Applied Science and Technology
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• v.23 no.1
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• pp.54-62
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• 2006

Kelvin equation is revisited, which accounts for important phenomena observed frequently in nano-dispersion systems. They include vapor pressure increase for curved interfaces, nucleation, capillary condensation, Ostwald ripening and so on. The smaller the radius of curvature is, the more significant Kelvin equation becomes. Therefore, its meaning, curvature effect, and importance are examined and discussed.

• 연구논문집
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• s.23
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• pp.165-171
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• 1993

$Si_3N_4/Sic$. nano-composites were fabricated by hot-pressing, gas pressure sintering. The composites contained up to 50 wt. % of SiC. The mechanical properties such as strength, toughness, and hardness of the composite are compared each other. The flexural strength of the composites was improved significantly by introducing fine SiC particles into $Si_3N_4$ matrix, while the fracture toughness was not improved. The increase in flexural strength is attributed to the formation of uniformly elongated $\beta -Si_3N_4$ grains as well as the reduction of grain size.

• Journal of Powder Materials
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• v.8 no.3
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• pp.192-196
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• 2001

Ag doped Hydroxyapatite powder in nano-scale was successfully synthesized either by co-precipitation or by ion exchange route. The fabricated powder was successfully dispersed through freeze drying due to the prevention of secondary particles. The antimicrobial effects of nano-HAp against E.coli was superior to micron ones not only in its strength but also in duration.