• 제목/요약/키워드: Nano silica oxide

검색결과 36건 처리시간 0.023초

Dependence of Nanotopography Impact on Fumed Silica and Ceria Slurry Added with Surfactant for Shallow Trench Isolation Chemical Mechanical Polishing

  • Cho, Kyu-Chul;Jeon, Hyeong-Tag;Park, Jea-Gun
    • 한국재료학회지
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    • 제16권5호
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    • pp.308-311
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    • 2006
  • The purpose of this study is to investigate the difference of the wafer nanotopography impact on the oxide-film thickness variation between the STI CMP using ceria slurry and STI CMP using fumed silica slurry. The nanotopography impact on the oxide-film thickness variation after STI CMP using ceria slurry is 2.8 times higher than that after STI CMP using fumed silica slurry. It is attributed that the STI CMP using ceria slurry follows non-Prestonian polishing behavior while that using fumed silica slurry follows Prestonian polishing behavior.

Stoffenmanager nano 컨트롤 밴딩 도구 이해와 나노물질 합성 및 포장 공정 적용 연구 (Understanding and Application of Stoffenmanager Nano Tool into Synthesis and Packing Process of Nanomaterials)

  • 이나루;안정호
    • 한국산업보건학회지
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    • 제25권1호
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    • pp.95-103
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    • 2015
  • Objectives: This study was conducted in order to better understand the conceptual model and Stoffenmanager nano module and apply it to the synthesis and packing processes of nanomaterials. Methods: Site visits were conducted to five nanomaterial production processes. Product and exposure variables were investigated in these workplaces. Hazard banding and exposure classification of the synthesis and packing processes of nanomaterials were conducted using documents and the website of Stoffenmanager Nano. Results: The five sites featured different products, packing tasks, ventilation and local exhaust, and others. The hazards for nano-nickel and copper were classified as E. The hazards for both fumed silica and indium tin oxide were classified as D. The hazard for spherical silica was classified as C. The exposure classes in the synthesis process of nanomaterials ranged from 2 through 4. The exposure classes in the packing process of nanomaterials ranged from 1 through 4. Conclusions: Application of Stoffenmanager nano to the synthesis and packing processes of nanomaterials helped to better understand the control level of the work environment and to suggest appropriate actions. The comparison of each process showed the effect of the production process and handling of solids and ventilation on exposure class.

Influence of nano alumina coating on the flexural bond strength between zirconia and resin cement

  • Akay, Canan;Tanis, Merve Cakirbay;Mumcu, Emre;Kilicarslan, Mehmet Ali;Sen, Murat
    • The Journal of Advanced Prosthodontics
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    • 제10권1호
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    • pp.43-49
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    • 2018
  • PURPOSE. The purpose of this in vitro study is to examine the effects of a nano-structured alumina coating on the adhesion between resin cements and zirconia ceramics using a four-point bending test. MATERIALS AND METHODS. 100 pairs of zirconium bar specimens were prepared with dimensions of $25mm{\times}2mm{\times}5mm$ and cementation surfaces of $5mm{\times}2mm$. The samples were divided into 5 groups of 20 pairs each. The groups are as follows: Group I (C) - Control with no surface modification, Group II (APA) - airborne-particle-abrasion with $110{\mu}m$ high-purity aluminum oxide ($Al_2O_3$) particles, Group III (ROC) - airborne-particle-abrasion with $110{\mu}m$ silica modified aluminum oxide ($Al_2O_3+SiO_2$) particles, Group IV (TCS) - tribochemical silica coated with $Al_2O_3$ particles, and Group V (AlC) - nano alumina coating. The surface modifications were assessed on two samples selected from each group by atomic force microscopy and scanning electron microscopy. The samples were cemented with two different self-adhesive resin cements. The bending bond strength was evaluated by mechanical testing. RESULTS. According to the ANOVA results, surface treatments, different cement types, and their interactions were statistically significant (P<.05). The highest flexural bond strengths were obtained in nano-structured alumina coated zirconia surfaces (50.4 MPa) and the lowest values were obtained in the control group (12.00 MPa), both of which were cemented using a self-adhesive resin cement. CONCLUSION. The surface modifications tested in the current study affected the surface roughness and flexural bond strength of zirconia. The nano alumina coating method significantly increased the flexural bond strength of zirconia ceramics.

Fabrication of Ordered or Disordered Macroporous Structures with Various Ceramic Materials from Metal Oxide Nanoparticles or Precursors

  • Cho, Young-Sang;Moon, Jun-Hyuk;Kim, Young-Kuk;Choi, Chul-Jin
    • 한국분말재료학회지
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    • 제18권4호
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    • pp.347-358
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    • 2011
  • Two different schemes were adopted to fabricate ordered macroporous structures with face centered cubic lattice of air spheres. Monodisperse polymeric latex suspension, which was synthesized by emulsifier-free emulsion polymerization, was mixed with metal oxide ceramic nanoparticles, followed by evaporation-induced self-assembly of the mixed hetero-colloidal particles. After calcination, inverse opal was generated during burning out the organic nanospheres. Inverse opals made of silica or iron oxide were fabricated according to this procedure. Other approach, which utilizes ceramic precursors instead of nanoparticles was adopted successfully to prepare ordered macroporous structure of titania with skeleton structures as well as lithium niobate inverted structures. Similarly, two different schemes were utilized to obtain disordered macroporous structures with random arrays of macropores. Disordered macroporous structure made of indium tin oxide (ITO) was obtained by fabricating colloidal glass of polystyrene microspheres with low monodispersity and subsequent infiltration of the ITO nanoparticles followed by heat treatment at high temperature for burning out the organic microspheres. Similar random structure of titania was also fabricated by mixing polystyrene building block particles with titania nanoparticles having large particle size followed by the calcinations of the samples.

P/M Fecralloy 성형체의 고온산화 및 전기저항 안정성에 미치는 SiO2 첨가 효과 (The Effect of SiO2 addition on Oxidation and Electrical Resistance Stability at High-temperature of P/M Fecralloy Compact)

  • 박진우;옥진욱;정우영;박동규;안인섭
    • 한국분말재료학회지
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    • 제24권4호
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    • pp.292-297
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    • 2017
  • A metallic oxide layer of a heat-resistant element contributes to the high-temperature oxidation resistance by delaying the oxidation and has a positive effect on the increase in electrical resistivity. In this study, green compacts of Fecralloy powder mixed with amorphous and crystalline silica are oxidized at $950^{\circ}C$ for up to 210 h in order to evaluate the effect of metal oxide on the oxidation and electrical resistivity. The weight change ratio increases as per a parabolic law, and the increase is larger than that observed for Fecralloy owing to the formation of Fe-Si, Fe-Cr composite oxide, and $Al_2O_3$ upon the addition of Si oxide. Si oxides promote the formation of $Al_2O_3$ and Cr oxide at the grain boundary, and obstruct neck formation and the growth of Fecralloy particles to ensure stable electrical resistivity.

스테인리스강 금속 표면에 내열 저방사 산화물 코팅제 적용과 방사 특성 평가 (Heat Resistant Low Emissivity Oxide Coating on Stainless Steel Metal Surface and Characterization of Emissivity)

  • 임형미;권태일;김대성;이상엽;강동필;이승호
    • 한국재료학회지
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    • 제19권12호
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    • pp.649-656
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    • 2009
  • Inorganic oxide colloids dispersed in alcohol were applied to a stainless steel substrate to produce oxide coatings for the purpose of minimizing emissive thermal transfer. The microstructure, roughness, infrared emissive energy, and surface heat loss of the coated substrate were observed with a variation of the nano oxide sol and coating method. It was found that the indium tin oxide, antimony tin oxide, magnesium oxide, silica, titania sol coatings may reduce surface heat loss of the stainless steel at 300${\circ}C$. It was possible to suppress thermal oxidation of the substrate with the oxide sol coatings during an accelerated thermal durability test at 600${\circ}C$. The silica sol coating was most effective to suppress thermal oxidation at 600${\circ}C$, so that it is useful to prevent the increase of radiative surface heat loss as a heating element. Therefore, the inorganic oxide sol coatings may be applied to improve energy efficiency of the substrate as the heating element.

DSS에서 $CeO_2$ 연마제의 첨가량과 분산시간이 TEOS 막에 미치는 특성연구 (A Study on the effect of TEOS film by Dispel8ion Time and Content of $CeO_2$ Abrasive)

  • 서용진;한상준;박성우;이영균;이성일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.487-487
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    • 2009
  • One of the critical consumables in chemical mechanical polishing (CMP) is a specialized solution or slurry, which typically contains both abrasives and chemicals acting together to planarize films. In single abrasive slurry (SAS), the solid phase consists of only one type of abrasive particle. On the other hand, mixed abrasive slurry (MAS) consists of a mixture of at least two types of abrasive particles. In this paper, we have studied the CMP characteristics of mixed abrasive slurry (MAS) retreated by adding of $CeO_2$ abrasives within 1:10 diluted silica slurry (DSS). The slurry designed for optimal performance should produce reasonable removal rates, acceptable polishing selectivity with respect to the underlying layer, low surface defects after polishing, and good slurry stability. The modified abrasives in MAS are evaluated with respect to their particle size distribution, surface morphology, and CMP performances such as removal rate and non-uniformity. As an experimental result, we obtained the comparable slurry characteristics compared with original silica slurry in the viewpoint of high removal rate and low non-uniformity.

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Toxicity evaluation based on particle size, contact angle and zeta potential of SiO2 and Al2O3 on the growth of green algae

  • Karunakaran, Gopalu;Suriyaprabha, Rangaraj;Rajendran, Venkatachalam;Kannan, Narayanasamy
    • Advances in nano research
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    • 제3권4호
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    • pp.243-255
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    • 2015
  • In this investigation, ecotoxicity of nano and micro metal oxides, namely silica ($SiO_2$) and alumina ($Al_2O_3$), on the growth of green algae (Porphyridium aerugineum Geitler) is discussed. Effects of nano and micro particles on the growth, chlorophyll content and protein content of algae are analysed using standard protocols. Results indicate that $SiO_2$ nano and micro $SiO_2$ particles are non-toxic to P. aerugineum Geitler up to a concentration of 1000 mg/L. In addition, $Al_2O_3$ microparticles are less toxic to P. aerugineum Geitler, whereas $Al_2O_3$ nanoparticles are found to be highly toxic at 1000 mg/L. Moreover, $Al_2O_3$ nanoparticles decrease the growth, chlorophyll content, and protein content of tested algae. In addition, zeta potential and contact angle are also important in enhancing the toxicity of metal oxide nanoparticles in aquatic environment. This study highlights a new insight into toxicity evaluation of nanoparticles on beneficial aquatic organisms such as algae.

Large-scale Synthesis of Uniform-sized Nanoparticles for Multifunctional Medical Applications

  • Hyeon, Taeg-Hwan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.1-1
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    • 2011
  • We developed a new generalized synthetic procedure, called as "heat-up process," to produce uniform-sized nanocrystals of many transition metals and oxides without a size selection process. We were able to synthesize uniform magnetite nanocrystals as much as 1 kilogram-scale from the thermolysis of Fe-oleate complex. Clever combination of different nanoscale materials will lead to the development of multifunctional nano-biomedical platforms for simultaneous targeted delivery, fast diagnosis, and efficient therapy. In this presentation, I would like to present some of our group's recent results on the designed fabrication of multifunctional nanostructured materials based on uniform-sized magnetite nanoparticles and their medical applications. Uniform ultrasmall iron oxide nanoparticles of <3 nm were synthesized by thermal decomposition of iron-oleate complex in the presence of oleyl alcohol. These ultrasmall iron oxide nanoparticles exhibited good T1 contrast effect. In in vivo T1 weighted blood pool magnetic resonance imaging (MRI), iron oxide nanoparticles showed longer circulation time than commercial gadolinium complex, enabling high resolution imaging. We used 80 nm-sized ferrimagnetic iron oxide nanocrystals for T2 MRI contrast agent for tracking transplanted pancreatic islet cells and single-cell MR imaging. We reported on the fabrication of monodisperse magnetite nanoparticles immobilized with uniform pore-sized mesoporous silica spheres for simultaneous MRI, fluorescence imaging, and drug delivery. We synthesized hollow magnetite nanocapsules and used them for both the MRI contrast agent and magnetic guided drug delivery vehicle.

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친환경 타이어 충진제 적용을 위한 SiO2-ZnO 복합체 합성 및 특성평가 (Synthesis and Characterization of SiO2-ZnO Composites for Eco-Green Tire filler)

  • 전순정;송시내;강신재;김희택
    • Korean Chemical Engineering Research
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    • 제53권3호
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    • pp.357-363
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    • 2015
  • 타이어 라벨링제 도입으로 인한 친환경 타이어 개발의 요구로 타이어산업에서 사용되고 있는 기존 산화아연의 문제점 개선을 위하여 나노산화아연과 나노기공 실리카와의 복합체 합성에 대한 연구를 진행하였다. 본 연구에서는 타이어의 트레드(tread) 부분에 적용될 기존의 고무 보강재인 카본블랙을 대체하기 위한 실리카와 나노산화아연의 복합체를 합성하기 위하여, 일정량의 나노기공 실리카를 함유하고 재질 상으로는 나노기공 실리카와 산화아연을 물리적 결합을 통하여 hysteresis 손상을 줄이면서 트레드의 탄성을 증대시키기 위해 내마모성능의 향상을 목표로 실험을 진행하였다. 이를 위하여 복합체와 고무 조성물과의 컴파운딩 시 낮은 활성도와 분산안정성 저하의 문제점 개선하고자 숙성시간(Aging time)과 몰 비 그리고 반응물의 반응 순서에 따라 미치는 영향에 대해 조사하였다. 0.03몰 비의 산화아연과 숙성기간 10일의 조건의 실리카에서 가장 작은 평균입도(약 50.5 nm)와 안정적인 분산성을 보였고, 약 $649m^2/g$의 높은 비표면적을 나타내었다.