• International Journal of Precision Engineering and Manufacturing
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• v.8 no.4
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• pp.63-69
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• 2007

The two-photon stereolithography (TPS) process is a promising technique for the fabrication of real three-dimensional (3D) nano/micro-structures via application of a femto-second laser, In TPS, when a near-infrared ultrashort-pulsed laser is closely focused onto a confined volume of photocurable resin, only the local area at the center of the focus is cured. Therefore, real 3D microstructures with resolution under the diffraction limit can be fabricated through a layer-by-layer accumulative technique, This process provides opportunities to develop neo-conceptive nano/micro devices in IT/BT industries, However, a number of issues, including development of effective fabrication methods, highly sensitive and functional materials, and neo-conceptive devices using TPS, must be addressed for the realization of industrial application of TPS. In this review article, we discuss our efforts related to TPS: effective fabrication methods, diverse two-photon curable materials for high functional devices, and applications.

• 한국신재생에너지학회:학술대회논문집
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• 2006.11a
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• pp.443-446
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• 2006

Carbon-supported Platinum (Pt) is the potential electro-catalyst material for anodic and cathodic reactions in fuel cell. Catalytic activity of the metal strongly depends on the particle shape, size and distribution of the metal in the porous supportive network. Conventional preparation techniques based on wet impregnation and chemical reduction of the metal precursors often do not provide adequate control of particle size and shape. We have proposed a novel route for preparing nano sized Pt colloidal particles in solution by oxidation of ethylene glycol. These Pt nano particles were deposited on large surface area carbon support. The process of nano Pt colloid formation involves the oxidation of solvent ethylene glycol to mainly glycolic acid and the presence of its anion glycolate depends on the solution pH. In the process of colloidal Pt formation glycolate actsas stabilizer for the Pt colloidal particle and prevents the agglomeration of colloidal Pt particles. These mono disperse Pt particles in carbon support are found uniformly distributed in nearly spherical shape and the size distribution was narrow for both supported and unsupported metals. The average diameter of the Pt nano particle was controlled in the range off to 3 nm by optimizing reaction parameters. Transmission electron microscopy, CV and RRDE experiments were used to compliment the results.

• Journal of the Korean Society for Heat Treatment
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• v.18 no.5
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• pp.305-311
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• 2005

Effect of Cr contents(Cr: 0.27, 0.45 and 0.65wt.%) on precipitation process has been studied by electrical resistivity measurements, hardness and scanning electron microscope. The first stage of the process consists of the formation of Cr-rich particles, the second stage consists of the competitive growth of these particles. The kinetics of precipitation could be described by Johnson-Mehl-Avrami equation, $f(t)=1-\exp(-kt^n)$. The values of n were found to be in the range from 0.17 to 0.39 at the first stage and from 1.0 to 1.5 at the second stage. The activation energies of Cu-Cr alloys were determined by Cross-Cut method and were 90~136 kJ/mol. The maximum hardness value of $H_RB$ 84 was obtained in Cu-0.65wt.%Cr alloy.

• Journal of Powder Materials
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• v.16 no.1
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• pp.43-49
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• 2009

Titanium carbides are widely used for cutting tools and grinding wheels, because of their superior physical properties such as high melting temperature, high hardness, high wear resistance, good thermal conductivity and excellent thermal shock resistance. The common synthesizing method for the titanium carbide powders is carbo-thermal reduction from the mixtures of titanium oxide($TiO_2$) and carbon black. The purpose of the present research is to fabricate nano TiC powders using titanium salt and titanium hydride by the mechanochemical process(MCP). The initial elements used in this experiment are liquid $TiCl_4$(99.9%), $TiH_2$(99.9%) and active carbon(<$32{\mu}m$, 99.9%). Mg powders were added to the $TiCl_4$ solution in order to induce the reaction with Cl-. The weight ratios of the carbon and Mg powders were theoretically calculated. The TiC and $MgCl_2$ powders were milled in the planetary milling jar for 10 hours. The 40 nm TiC powders were fabricated by wet milling for 4 hours from the $TiCl_4$+C+Mg solution, and 300 nm TiC particles were obtained by using titanium hydride.

• Journal of the Semiconductor & Display Technology
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• v.5 no.2 s.15
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• pp.47-49
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• 2006

Various methods of making thin film is being used in semiconductor manufacturing process. The most common method in this field includes CVD(Chemical Vapor Deposition) and PVD(Physical Vapor Deposition). Thin film is deposited on both the backside and the frontside of wafers. The thin film deposited on the backside has poor thickness profile, and can contaminate wafers in the following processes. If wafers with the thin film remaining on the backside are immersed in batch type process tank, the thin film fall apart from the backside and contaminate the nearest wafer. Thus, it is necessary to etch the backside of the wafer selectively without etching the frontside, and chemical injection nozzle positioned under the wafer can perform the backside etching. In this study, the backside chemical injection nozzle with optimized chemical injection profile is built for single wafer tool. The evaluation of this nozzle, performed on $Si_3N_4$ layer deposited on the backside of the wafer, shows the etching rate uniformity of less than 5% at the etching rate of more than $1000{\AA}$.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.4
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• pp.8-13
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• 2015

In this study, we fabricated and characterized a nanostructured surface based on a plastic injection molding with a local mold heating (LMH) system. A metal mold core with a closed packed nano convex array (CVA) was achieved by integrated engineering procedures: (1) master template fabrication by anodic aluminum oxidation (AAO), (2) nickel electroforming (NE) process, and (3) post-processing by precision machining. The nickel mold core was utilized to replicate a surface with a closed packed nano concave-array (CCA) based on injection molding using cyclic olefin copolymer (COC) as a plastic material. In particular, an LMH system was introduced to enhance transcription quality of the nano structures by delaying solidification of molten polymer near the surface of the mold core.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.5
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• pp.1-8
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• 2013

Roll-based, nanoimprint lithography (Roll-NIL) is one effective method to produce large-area nanopatterns continuously. Systems and processes for Roll-NIL have been developed and studied for more than 15 years. Since the shapes of the stamp and the substrate for Roll-NIL can be plates, films, and rolls, there exist many concepts to design and implement roll-NIL systems. Combinations and variations of contact-methods for variously shaped stamps and substrates are analyzed in this paper. The contact-area can be changed by using soft materials such as polydimethylsiloxane (PDMS) or silicone rubber. Ultraviolet (UV) sources appropriate for the roll-to-plate or roll-to-roll process are introduced. Finally, two roll-to-plate nanoimprint lithography systems are illustrated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.10
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• pp.1754-1761
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• 2003

The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1127-1132
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• 2014

Fast tool servo (FTS) is an enabling technology to fabricate various shapes of functional surface geometries in a precise and controllable manner. FTS can be also employed as a straightforward and efficient surface treatment way of making such products more durable. In this work, process characteristics using high-precision FTS-based surface texturing were qualitatively and quantitatively investigated to provide a class of surface design rule. The morphologies of surfaces processed with different conditions were first examined by observing the resultant 2D/3D surface profiles. In addition, the effects of the surface treatment using FTS on hardness and wear properties were characterized and compared to those without treatment.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1115-1119
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• 2014

In this article, a 20 kHz ultrasonic waveguide for nano-surface treatment was designed and manufactured. When designing the system, finite element analysis with ANSYS software was performed to find optimal dimensions of the waveguide, which can raise energy efficiency. Consequently an anti-resonance frequency of an Al waveguide with a piezoelectric actuator was 20 kHz, which predicted the experimentally obtained value of 18 kHz well. For the assessment of the performance, Steel Use Stainless (SUS) 304 and chromium molybdenum steel (SCM) 435 specimens were tested. Cross-sectional microscopies of SUS304 were taken and they showed that the treated thickness was $30{\mu}m$. Additionally, hardness tests of SCM435 were done and the hardness before the process was 14.0 Rockwell Hardness-C scale (HRC) and after the process was 20.5 HRC, respectively, which means 46% increase. Considering these results, the developed ultrasonic system is thought to be effective in the nano-surface treatment process.