Design of a Megasonic for Nano-pattern Cleaning using Finite Element Methods with Performance Evaluation (유한요소해석을 이용한 나노패턴용 메가소닉의 설계 및 성능평가)
-
- Proceedings of the Korean Society of Precision Engineering Conference
- /
- 2008.06a
- /
- pp.631-632
- /
- 2008