• 한국진공학회지
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• 제22권4호
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• pp.188-192
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• 2013

반도체 소자의 소형화, 고집적화로 박막의 다층화 및 선폭 감소로 인한 실리콘 웨이퍼와 금속 박막 사이의 확산을 방지하기 위한 많은 연구가 이루어지고 있다. 본 연구는 tungsten (W)을 주 물질로 증착시 nitrogen (N)의 유량을 2.5~10 sccm으로 변화시키며 증착된 확산방지막의 nano-mechanics 특성에 대해 연구하였다. 증착률, 비저항 및 결정학적 특성을 ${\beta}$-ray backscattering spectroscopy, 4-point probe, X-ray diffraction (XRD)을 이용하여 측정한 후 Nano-indenter를 사용하여 nano-mechanics 특성을 조사하였다. 그 결과 질소 가스 유량이 5 sccm 포함된 박막에서 표면 경도(surface hardness)는 10.07 에서 15.55 GPa로 급격하게 증가하였다. 이후 질소가스의 유량이 7.5 및 10 sccm에서는 표면 경도가 각각 12.65와 12.77 GPa로 질소 가스 유량이 5 sccm인 박막보다 표면경도가 상대적으로 감소하였다. 이는 박막 내 결정질과 비정질의 W과 N의 결합 비율의 차이에 의한 영향으로 생각되며, 또한 압축응력에 기인한 스트레스 증가가 원인으로 판단된다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 춘계학술강연 및 발표대회강연 및 발표논문 초록집
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• pp.22-22
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• 2006

• Smart Structures and Systems
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• 제22권1호
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• pp.105-120
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• 2018

In this paper, the nonlinear free and forced vibration responses of sandwich nano-beams with three various functionally graded (FG) patterns of reinforced carbon nanotubes (CNTs) face-sheets are investigated. The sandwich nano-beam is resting on nonlinear Visco-elastic foundation and is subjected to thermal and electrical loads. The nonlinear governing equations of motion are derived for an Euler-Bernoulli beam based on Hamilton principle and von Karman nonlinear relation. To analyze nonlinear vibration, Galerkin's decomposition technique is employed to convert the governing partial differential equation (PDE) to a nonlinear ordinary differential equation (ODE). Furthermore, the Multiple Times Scale (MTS) method is employed to find approximate solution for the nonlinear time, frequency and forced responses of the sandwich nano-beam. Comparison between results of this paper and previous published paper shows that our numerical results are in good agreement with literature. In addition, the nonlinear frequency, force response and nonlinear damping time response is carefully studied. The influences of important parameters such as nonlocal parameter, volume fraction of the CNTs, different patterns of CNTs, length scale parameter, Visco-Pasternak foundation parameter, applied voltage, longitudinal magnetic field and temperature change are investigated on the various responses. One can conclude that frequency of FG-AV pattern is greater than other used patterns.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 12th Asian Congress of Fluid Mechanics
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• pp.30.2-30.2
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• 2008

• Interaction and multiscale mechanics
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• 제2권2호
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• pp.209-222
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• 2009

This article describes recent work on mechanics of carbon nanotubes, one of the most fundamental and amazing man-made nanostructures. The noteworthy point is that "nano"-scale mechanics of carbon nanotubes can be well described by the continuum elastic theories for "macro"-scale thin shells. This provides an efficient means to elucidate mechanical deformation effects of carbon nanotubes on their physical and chemical properties, which is significant to develop new-generation nanomaterials based on nanotubes and their composites. Potential applications of the mechanical deformation of nanotubes in nano-electronics and nano-biology are also commented. In addition, theoretical investigations regarding external pressure buckling is carried out here and we have numerically confirmed that larger N (the number of layers) and a smaller D (the innermost diameter) make "corrugation modes" with a larger mode-index k be energetically favored.

• Computers and Concrete
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• 제19권4호
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• pp.429-434
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• 2017

Failure of basic structures material is usually accompanied by expansion of interior cracks due to stress concentration at the cracks tip. This phenomenon shows the importance of examination of the failure behavior of concrete structures. To this end, 4 types of mortar samples with different amounts of nano-silica (0%, 0.5%, 1%, and 1.5%) were made to prepare twelve $50{\times}50{\times}50mm$ cubic samples. The goal of this study was to describe the failure and micro-crack growth behavior of the cement mortars in presence of nano-silica particles and control mortars during different curing days. Failure of mortar samples under compressive strength were sensed with acoustic emission technique (AET) at different curing days. It was concluded that the addition of nano-silica particles could modify failure and micro-crack growth behavior of mortar samples. Also, monitoring of acoustic emission parameters exposed differences in failure behavior due to the addition of the nanoparticles. Mortar samples of nano-silica particles revealed stronger shear mode characteristics than those without nanoparticles, which revealed high acoustic activity due to heterogeneous matrix. It is worth mentioning that the highest compressive strength for 3 and 7 test ages obtained from samples with the addition of 1.5% nano-silica particles. On the other hand maximum compressive strength of 28 curing days obtained from samples with 1% combination of nano-silica particles.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.506-506
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• 2013

Ag (Silver) 박막은 낮은 전기 저항과 높은 가시광대의 반사율을 가져 T-OLED (Top Emission-Organic Light Emitting Diode)의 Anode로 각광 받고 있지만, 일반적인 Ag 박막의 일함수는 4.3 eV 이하로 T-OLED의 Anode로 사용하기에는 낮은 단점이 있다. 따라서 이를 극복하기 위한 방법으로 Ag 박막 표면을 산화시켜 일함수를 증가시키기 위한 연구가 진행중에 있다. 하지만 연구는 단순히 일함수를 증가시키는 것에 한정되어 있을 뿐 UV 처리된 박막의 nano-mechanics 특성에 대한 연구는 현재 전무하다. 따라서 본 연구에서는 순도 99.9%의 Ag 타겟을 이용하여 rf magnetron sputter 장비를 통해 Ag 박막을 증착 하였고, 이후 UV (Ultra-Violet) 램프를 통해 시료 표면을 산화시켰다. 특히, 이 논문의 주요 관심사인 박막의 nano mechanics 특성 분석을 위하여 nano indenter와 SPM (Scanning Probe microscope) 장치를 활용 하였다. 실험 결과 후처리 시간이 3분 이하인 경우 박막이 비결정질의 silver oxide로 성장하는 것을 확인하였으며, 이때 박막의 면저항은 $0.16{\Omega}$/sq.에서 $0.55{\Omega}$/sq.로 증가하는 것을 관찰할 수 있었고, 3분 이후, 비결정질의 silver oxide가 conducting 특성을 갖는 silver oxide 결정을 이루면서 면저항이 $0.55{\Omega}$/sq.에서 $0.21{\Omega}$/sq.로 감소하는 것을 보았다. 또한 결정질의 박막이 자라는 3분이상의 박막에서 surface hardness는 급격하게 증가($3.57{\rightarrow}9.47$ GPa)했으며, 6분 이후에는 감소하는($9.47{\rightarrow}3.46$ GPa) 경향을 보였다. 이러한 경향은 silver oxide의 결정 크기가 Ag 결정 보다 크므로 상대적인 압축응력을 받아 표면 경도가 증가됐다. 처리시간 6분 이후, 경도 감소는 박막의 표면 물성이 불안정해졌기 때문이다.

• Smart Structures and Systems
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• 제23권2호
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• pp.141-153
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• 2019

This research deals with wave propagation of the functionally graded (FG) nano-beams based on the nonlocal elasticity theory considering surface and flexoelectric effects. The FG nano-beam is resting in Winkler-Pasternak foundation. It is assumed that the material properties of the nano-beam changes continuously along the thickness direction according to simple power-law form. In order to include coupling of strain gradients and electrical polarizations in governing equations of motion, the nonlocal non-classical nano-beam model containg flexoelectric effect is used. Also, the effects of surface elasticity, dielectricity and piezoelectricity as well as bulk flexoelectricity are all taken into consideration. The governing equations of motion are derived using Hamilton principle based on first shear deformation beam theory (FSDBT) and also considering residual surface stresses. The analytical method is used to calculate phase velocity of wave propagation in FG nano-beam as well as cut-off frequency. After verification with validated reference, comprehensive numerical results are presented to investigate the influence of important parameters such as flexoelectric coefficients of the surface, bulk and residual surface stresses, Winkler and shear coefficients of foundation, power gradient index of FG material, and geometric dimensions on the wave propagation characteristics of FG nano-beam. The numerical results indicate that considering surface effects/flexoelectric property caused phase velocity increases/decreases in low wave number range, respectively. The influences of aforementioned parameters on the occurrence cut-off frequency point are very small.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2013년도 자성 및 자성재료 국제학술대회
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• pp.91-91
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• 2013

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.689-693
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• 2005

Inkjet printing is a non-contact and direct writing associated with a computer. In the industrial field, there have been many efforts to utilize the inkjet printing as a new way of manufacturing, especially for electronic devices. For the application of inkjet printing to electronic field, one of the key factors is exact realization of designed images into printed patterns. In this work, micro patterning for conducting line has been studied using the piezoelectric print head and silver nano ink. Dimensions of printed images have been predicted in terms of print resolution and diameter of a single dot. The predicted and the measured values showed consistent results. Using the results, the design capability for industrial inkjet printing could be achieved.