• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.8
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• pp.759-763
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• 2015

The laser machining process has been proposed as an advanced process for the selective fabrication of electrodes without a mask. In this study, we adapt laser machining to metals that have different thermal properties. Based on the results, the metals exhibit a different surface morphology, heat-affected zone (HAZ), and a recast layer around the machined surface according to their thermal conductivity, boiling point, and thermal diffusivity. Then, we apply ultrasonic-assisted laser machining to remove the recast layer. The ultrasonic-assisted laser machining exhibits a better surface quality in metals with higher diffusivity than those having lower diffusivity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1179-1180
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• 2005

3D micro scaled shapes are fabricated with the method of direct writing and superposing grooving in ambient air using femto-second laser pulses and copper, aiming at establishing an industrially useful femto-second laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. For the several advantages, there is no thermally influenced region around the area irradiated by the laser beam and surfaces irradiated laser beam are smooth and substances ablated to form are no attached on the surface of works and so on, the femto-second laser technology is anticipated for advanced micro/nano precision technology.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.110-113
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• 2005

In recent, various shapes of pattern in micron or nano scale are adapted in many applications due to their good mechanical or optical properties. Light guide panel (LGP) of the LCD is one of important applications for micro pattern and micro prism shape is one of the typical patterns. Many applications have the patterns on their surface and the size of the pattern keep decreasing down to the order of micron or even under micron. On the other hand, the area to be patterned keeps enlarging. These two trends in patterned products require tooling micro patterns on large surface, which has still many technical problems to be solved mainly due to pattern size and the tooling area. In this study, we fabricate prism shape of patterns using diamond cutting tool on some metal core and plastic core like PMMA Some of cutting conditions are investigated including cutting force, cutting depth and speed for different core materials.

• Journal of Industrial Technology
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• v.14
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• pp.119-125
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• 1994

Ultra-precision machine tool equipped with the diamond bite tip is used to machine optical products, drums of VTR or computer hard disk. It needs nano technology in the surface roughness of workpiece. To perform the nano scale machining, ultra-precision machine tool must be designed and manufactured in consideration of the vibration characteristics. In this paper, using the finite element analysis, we investigate the modal parameters of the ultra-precision machine tool structures, which use cast iron, granite and alumina ceramic for the bed materials. To verify the numerical results, we manufacture a model of ultra-precision machine tool using granite bed and perform impulse test. Through the theoretical and experimental analyses, we could compare and estimate the vibration characteristics of the three models for the ultra-precision machine tools.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.268-271
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• 2005

Etch resistance of mask layer on silicon substrate modified by AFM-based Tribo-Nanolithography (TNL) in Aqueous Solution in an aqueous solution was demonstrated. n consists or sequential processes, nano-scratching and wet chemical etching. The simple scratching can form a mask layer on the silicon substrate, which acting as an etching mask. For TNL, a specially designed cantilever with diamond tip, allowing the formation of mask layer on silicon substrate easily by a simple scratching process, has been applied instead of conventional silicon cantilever fur scanning. This study demonstrates how the TNL parameters can affect the etch resistance of mask layer, hence introducing a new process of AFM-based maskless nanolithography in aqueous solution.

• Journal of the Korean Society of Industry Convergence
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• v.14 no.2
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• pp.45-52
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• 2011

Since the most exclusive machines of the modern industries which require the nano precision rates are evolved from the machine tools, the design of the stable machine tool structure is very critical. Exclusive machines for the modern industries such as semiconductor, solar cell and LED have surface machining processes which are similar to the face cutting and grinding of conventional machine tools. This study was initiated to stabilize a milling machine structure and further to help design those exclusive machines which have similar machining mechanisms. The vibrations inherent to the machine tool structures hurt the precision machining as well as damage the longevity of the structures. There have been numerous researches in order to suppress the vibrations of machine tool structures using the extra modules such as actuators and dampers. In this paper, the dynamic properties are analyzed to obtain the natural frequencies and mode shapes of a machine tool structure which reflect the main reasons of the biggest vibrations under the given operating conditions. And the feasibility of improving the stability of the structure without using any additional apparatus has been investigated with minor design changes. The result of the study shows that simple changes based on proper system identification can considerably improve the stability of the machine tool structure.

• Design & Manufacturing
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• v.13 no.4
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• pp.40-44
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• 2019

The light diffusion component spreads the light from one point evenly over a large area. Various types of light diffusion parts such as films and lenses are applied in the high-tech industries such as LCD display devices, lighting devices, and solar energy generation. Among these, a diffuser sheet (Diffuser Sheet) has a function to uniformly distribute the light, and various studies have been conducted to improve its function. The shape of the conventional light diffusion pattern is mainly made of a dot or hemispherical shape. In this study, a rectangular cone-shaped structure having a light diffusion function and an advantage of controlling the angle of refraction of light was fabricated by using a solenoid indentation process. The change in shape of the indentation structure was analyzed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• Journal of the Korean Society for Heat Treatment
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• v.31 no.2
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• pp.63-67
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• 2018

Recent mold industry uses many roll-to-roll processes that can produce high production speed and precision machining and automation process. In the circular cylinder mold, however, patterns of less than $10{\mu}m$ are difficult to manufacture and maintain. In this study, we fabricated a circular cylindrical mold with a DLC thin film which have high hardness, low coefficient of friction and high releasability by using lithography and lift-off process. The height, line width, and pitch of the fabricated DLC macro pattern are $3.1{\mu}m$, $9.1{\mu}m$ and $20.2{\mu}m$, respectively. The pattern size is finer than the current applied to the aluminum cylinder type, and this shows the possibility of practical use of DLC micro pattern roll mold.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.371-376
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• 2003

The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process, simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during Compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.