• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.330-331
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• 2006

Fabrication of a nano-laminar ceramic composite by sintering thin ceramic plates was examined. Silver-coated glass flakes with a thickness of less than $1{\mu}m$ were consolidated by pulsed current sintering or hotpressing to obtain model composites. The samples sintered at the optimum conditions were fairly dense, and the flakes were aligned by uniaxial press. The metal coating remained on the flakes through the sintering process, and became an interface layer between the flakes. No crack propagation through the transverse direction of the lamellar was observed in the indentation test. The possibilities of high resistance against crack propagation was suggested.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.25-25
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• 2018

Electron beam melting (EBM) is one of powder based additive manufacturing technology used to produce parts for high geometrical complexity and directly with three-dimensional computer aided design (CAD) model. It is kind of the most promising methods with additive manufacturing for a wide range of medical applications, such as orthopedic, dental implant, and etc. This research has been investigated the microstructure and mechanical properties of as fabricated and hot iso-static pressing (HIP) processed specimens, which are made by an Arcam A1 EBM system. The Ti-6Al-4V titanium alloy powder was used as a material for the 3 dimensional printing specimens. Mechanical properties were conducted with EBM manufacturing and computer numerical control (CNC) machining specimens, respectively. Surface morphological analysis was conducted by scanning electron microscopy (SEM) for their surface, dissected plan, and fractured surface after tensile test. The mechanical properties were included tensile stress-strain and nano-indentation test as a analysis level between nano and macro. As following highlighted results, the stress-strain curves on elastic region were almost similar between as fabricated and HIP processed while the ductile (plastic deformed region) properties were higher with HIP than that of as fabricated processed.

• KSTLE International Journal
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• 제1권1호
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• pp.12-20
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• 2000

Nano-wear and friction of carbon overcoated laser-textured and mechanically-textured computer hard disk were characterised after contact start/stop (CSS) wear test. Various analytical and mechanical testing techniques were employed to study the changes in topography, roughness, chemical elements, mechanical properties and friction characteristics of the coating arising from the contact start/stop wear test These techniques include: the atomic force microscopy (AFM), the continuous nano-indentation test, the nano-scratch test, the time-of-flight secondary ion mass spectroscopy (TOF-SIMS) and the auger electron spectroscopy (AES). It was shown that the surface roughness of the laser-textured (LT) bump and mechanically textured (MT) Bone was reduced approximately am and 7nm, respectively, after the CSS wear test. The elastic modulus and hardness values increased after the CSS test, indicating straining hardening of the top coating layer, A critical load was also identified fer adhesion failure between the magnetic layer and the Ni-P layer, The TOF-SIMS analysis also revealed some reduction in the intensity of C and $C_2$$F_59$, confirming the wear of lubricant elements on the coating surface.

• Composites Research
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• 제32권3호
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• pp.141-147
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• 2019

In this study, micro-sized and nano-sized pure aluminum (Al) powders were compressed by unidirectional pressure at room temperature. Although neither type of Al bulk was heated, they had a high relative density and improved mechanical properties. The microstructural analysis showed a difference in the process of densification according to particle size, and the mechanical properties were measured by the Vickers hardness test and the nano indentation test. The Vickers hardness of micro Al and nano Al fabricated in this study was five to eight times that of ordinary Al. The grain refinement effect was considered to be one of the strengthening factors, and the Hall-Petch equation was introduced to analyze the improved hardness caused by grain size reduction. In addition, the effect of particle size and dispersion of aluminum oxide in the bulk were additionally considered. Based on these results, the present study facilitates the examination of the effect of particle size on the mechanical properties of compacted bulk fabricated by the powder metallurgy method and suggests the possible way to improve the mechanical properties of nano-crystalline powders.

• 한국진공학회지
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• 제17권6호
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• pp.518-522
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• 2008

반도체 집적도의 비약적인 발전으로 박막은 더욱 다층화 되고 선폭은 더욱 미세화가 진행되었다. 이러한 악조건에서 소자의 집적도를 계속 향상시키기 위하여 많은 연구가 진행되고 있다. 특히 소자 집적도 향상으로 금속 배선 공정에서는 선폭의 미세화와 배선 길이 증가로 인한 RC지연이 발생하게 되었다. 이를 방지하기 위하여 Al보다 비저항이 작은 Cu를 배선물질로 사용하여야 하며, 또한 일부 공정에서는 이미 사용하고 있다. 그러나 Cu를 금속배선으로 사용하기 위해 해결해야 할 가장 큰 문제점은 저온에서 쉽게 Si기판과 반응하는 문제이다. 현재까지 본 실험실에서는 tungsten (W)을 주 물질로 W-C-N (tungsten- carbon - nitrogen) 확산방지막을 증착하여 연구를 하였으며, $\beta$-ray, XRD, XPS 분석을 통하여 고온에서도 Cu의 확산을 효과적으로 방지한다는 연구 결과를 얻었다. 이 연구에서는 기존 연구에 추가적으로 W-C-N 확산방지막의 표면을 Nano-Indenter System을 이용하여 확산방지막 표면강도 변화를 분석하여 확산방지막의 물성 특성을 연구하였다. 이러한 연구를 통하여 박막내 불순물인 질소가 포함된 박막이 고온 열처리 과정에서 보다 안정적인 표면강도 변화를 나타내는 연구 결과를 얻었으며, 이로부터 박막의 물성 분석을 실시하였다.

• 한국세라믹학회지
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• 제46권5호
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• pp.505-509
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• 2009

In this study, bulk nano-crystalline $Si_3N_4$ ceramics were fabricated by spark plasma sintering (SPS) and their mechanical properties, in particular wear, were investigated. A wide range of grain sizes, from 80 nm and 250 nm were obtained by varying sintering conditions ($1550^{\circ}C$-5 min to $1650^{\circ}C$-20 min). The elastic modulus of obtained ceramics was ${\sim}250$ GPa and hardness was in the range of $13{\sim}14$ GPa. The indentation fracture toughness increased from $2.58MPa{\cdot}m^{1/2}$ to $3.24MPa{\cdot}m^{1/2}$ with increasing sintering temperature possibly due to the elongated grains. Sliding wear tests revealed at least an order magnitude improvement in wear resistance with grain refinement. Microstructure analysis indicated that nano-$Si_3N_4$ specimens worn mainly through delamination and microcracking, while that of coarser specimens revealed severe wear with grain debonding and fracture.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2008년도 추계학술대회 초록집
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• pp.71-72
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• 2008

Ultralow-k 물질은 반도체 성능향상에 있어서 필요한 물질이다 [1]. 이를 위하여 본 실험은 톨루엔과 일반적인 SiO 박막을 제조하는 데 사용되어 지는 TEOS (tetraethyl orthosilicate)를 co-depo.하여 유무기 복합 박막을 PECVD (plasma enhanced chemical vapor deposition)법을 이용하여 증착하였다. 얻어진 박막은 IR과 nano-indentation과 capacitance의 측정을 통하여 측정되었다. 이를 통하여 co-depo.를 통한 유무기 복합 박막이 기존의 CVD법을 이용한 저유전 박막보다 우수한 기계적 특성을 가짐을 확인하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2016년도 추계학술대회 논문집
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• pp.201.1-201.1
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• 2016

전주된 Invar (Fe-35%Ni) 박판 위에 증착된 Cu 박막은 스퍼터 전력량이 증가할수록 증착속도가 증가하였다. Cu/Invar 박판이 Invar 박판보다 면저항 값이 34%로 작았다. Invar 박판 위에 Cu가 증착되면 최대자화와 투자율은 각각 40.3, 65.0 [%] 감소하였다. Cu 박막의 탄성하강강성도, 마찰계수, 피로한계는 각각 45, 0.130, 0.093 이었다. 동적 나노 압침법으로 얻은 Invaar/Cu 박막의 하중-시간-변위 곡선의 가장 큰 차이는 탄성하강강성도(elastic stiffness) 이었다. 미세경도와 나노경도의 실험적 관계식은 $Y[GPa]=9.18{\times}10^{-3}X[Hv]$ 이었다. 나노압침선단의 하중분포를 이차원 선형 및 비선형 유한요소해석을 통하여 1.0 [mN] 의 정적하중을 가한 Cu 박막은 486 [mN] 으로 예측되었다. 이는 표면탐침현미경으로 관찰한 압흔의 변형정도와 유사한 경향을 보였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.111-115
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• 2003

Nanoindentation is simply an indentation test in which the length scale of the penetration is measured in nanometres rather than microns or millimetres, the latter being common in conventional hardness tests. Three-dimensional molecular dynamics simulations have been conducted to evaluate the nanoindentation test. Molecular dynamics simulations were carried out on single crystal copper by varying crystal orientations to investigate nano-behavior of material beneath an indenter in nanoindentation. Morse potential function was used as an interatomic force between indenter and thin film. The result of the simulation shows that crystal orientation significantly influenced the slip system, dislocation nucleation and dislocation behavior.

• 소성∙가공
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• 제13권4호
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• pp.374-381
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• 2004

In this study, the deformation behavior of semi-solid Al-Si alloy was investigated by nanoindenter as a part of the research on the surface crack behavior in thixoformed automobile component. The microstructure of semi-solid Al-Si alloy consists of primary and eutectic regions. In eutectic regions the crack initiation begins with initial fracture of the eutectic silicon particles and inside other intermetallic phases. Nano-deformation characteristics in the eutectic and primary phase of semi-solid aluminium alloy were investigated through the nano-indentation experiments and the AFM observation. In addition, mechanical properties of each region were investigated and compared with each other.