• 대한기계학회논문집A
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• 제31권12호
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• pp.1139-1143
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• 2007

A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nano-patterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of loom to 300nm. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150nm were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of $50{\mu}m$ were formatted on the nano-patterns using micro-indentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.

• 한국분말재료학회지
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• 제12권3호
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• pp.186-191
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• 2005

A formation of aluminum hydroxide by hydrolysis of nano and micro aluminum powder has been studied. The nano aluminum powder of 80 to 100 nm in diameter was fabricated by a pulsed wire evaporation (PWE) method. The micro powder was commercial product with more than $10\;{\mu}m$ in diameter. The hydroxide type and morphology depending on size of the aluminum powder were examined by several analyses such as XRD, TEM, and BET. The hydrolysis procedure of micro aluminum powder was different from that of nano aluminum powder. The nano aluminum powder after immersing in the water was transformed rapidly to a nano fibrous boehmite, accompanying with a remarkable temperature increase, and then further transformed slowly to a stable bayerite. However, the micro powder was changed to the stable bayerite slowly and directly. The formation of fibrous aluminum hydroxide from nano aluminum powder might be due to the fine cracks which were formed by hydrogen gas pressure on the surface hydroxide layer during hydrolysis. The nano powder with large specific surface area and small size reacted more actively and faster than the micro powder, and transformed to meta-stable hydroxide in relatively short reaction time. Therefore, the formation of fibrous boehmite is special characteristic of hydrolysis of nano aluminum powder.

• 한국표면공학회지
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• 제45권4호
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• pp.151-154
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• 2012

A hydrophobic surface has been fabricated on aluminum by two-step surface treatment processes consisting of structure modification and surface coating. Nature inspired micro nano scale structures were artificially created on the aluminum surface by a blasting and Ar ion beam etching. And a hydrophobic thin film was coated by a trimethylsilane ($(CH_3)_3SiH$) plasma deposition to minimize the surface energy of the micro nano structure surface. The contact angle of micro nano structured aluminum surface with the trimethylsilane coating was $123^{\circ}$ (surface energy: 9.05 $mJ/m^2$), but the contact angle of only trimethylsilane coated sample without the micro nano surface structure was $92^{\circ}$ (surface energy: 99.15 $mJ/m^2$). In the hydrophobic treatment of aluminum surface, a trimethylsilane coated sample having the micro nano structure was more effective than only trimethylsilane coated sample without the micro nano structure.

• 한국가스학회지
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• 제18권5호
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• pp.20-25
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• 2014

마이크로 크기의 알루미늄 분진의 폭발 특성에 대한 연구는 많이 조사되어 왔지만 나노 크기의 알루미늄 분진에 대한 연구는 매우 적다. 본 연구에서는 나노 및 마이크로 크기의 알루미늄 분진 (70 nm, 100 nm, $6{\mu}m$, $15{\mu}m$)이 분진폭발특성에 미치는 영향을 20 L 폭발시험 장치를 사용하여 실험적으로 조사하였다. 부유 상태의 알루미늄 분진의 입자 크기가 감소하면, 나노 크기에서의 알루미늄 분진의 폭발하한농도(LEC)는 마이크로 크기의 알루미늄분진보다 감소하였다. 나노 크기의 알루미늄 분진에서의 폭발특성은 마이크로 크기의 알루미늄 분진과 명확한 폭발성의 차이를 보이지 않았다. 투과 전자 현미경(TEM )에 의해 나노 크기의 알루미늄 입자의 관찰로부터 입자 간의 응집성의 증가가 나노 알루미늄 분진의 폭발성에 영향을 미칠 수 있을 것으로 추정되었다.

• 한국추진공학회지
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• 제15권6호
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• pp.15-25
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• 2011

금속 연료 중 널리 사용되는 알루미늄의 연소 특성에 관하여 1차원 연소모델링을 제안하였다. 연소 모델링은 예열영역, 반응영역, 반응 후 영역, 세 영역으로 나누어 수행하였다. 또한 희박연소로 가정하여 단일 입자의 경우 입자크기와 당량비에 따른 화염속도, 나노와 마이크로 입자의 혼합물의 경우 혼합 비율에 따른 화염속도를 압력이 1기압 조건에서 계산하여 실험결과와 비교하였다. 단일입자의 경우, 입자의 크기가 작아질수록 화염속도가 빨라지고, 당량비가 낮아질수록 화염속도가 느려지는 현상이 관찰되었다. 나노와 마이크로 입자의 혼합물의 경우, 나노 입자의 함유량에 따라 화염속도는 빨라지며, 화염구조는 분리화염과 중첩화염이 나타남이 관찰되었다.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2012년도 제38회 춘계학술대회논문집
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• pp.429-434
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• 2012

금속 연료로 사용되는 마이크로/나노 알루미늄 입자를 산화피막에 의한 점화 지연을 최소화 하는 점화 방법을 제시 하였다. 알루미늄 입자를 생성시킴과 동시에 가열하여 입자가 생성된 직후 산소와 접촉시 격렬한 산화 반응을 유도하여 점화를 시키는 방법이다. 1064 nm 파장의 Nd:YAG 펄스 레이저를 이용한 레이저 삭마(laser ablation)를 알루미늄 시편에 발생시켜 입자를 생성하였으며, 산란 기법(scattering method)을 이용하여 입자를 가시화하여 생성을 확인하였다. 10.6 ${\mu}m$ 파장의 $CO_2$ 연속 레이저를 사용하여 알루미늄 시편을 가열하고 생성된 입자의 점화 열원으로 사용하여 알루미늄 입자가 점화되고 연소되어 이동하는 궤적을 확인하였다.

• Composites Research
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• 제32권3호
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• pp.141-147
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• 2019

In this study, micro-sized and nano-sized pure aluminum (Al) powders were compressed by unidirectional pressure at room temperature. Although neither type of Al bulk was heated, they had a high relative density and improved mechanical properties. The microstructural analysis showed a difference in the process of densification according to particle size, and the mechanical properties were measured by the Vickers hardness test and the nano indentation test. The Vickers hardness of micro Al and nano Al fabricated in this study was five to eight times that of ordinary Al. The grain refinement effect was considered to be one of the strengthening factors, and the Hall-Petch equation was introduced to analyze the improved hardness caused by grain size reduction. In addition, the effect of particle size and dispersion of aluminum oxide in the bulk were additionally considered. Based on these results, the present study facilitates the examination of the effect of particle size on the mechanical properties of compacted bulk fabricated by the powder metallurgy method and suggests the possible way to improve the mechanical properties of nano-crystalline powders.

• 한국정밀공학회지
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• 제32권1호
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• pp.63-68
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• 2015

Micro/nano patterns for optical concentration and diffusion have been studied in the various fields such as displays, optics, and sensors. Conventional micro patterns were continuous and linear shapes due to using linear-type light sources, however, recently non-continuous patterns have been applied as point sources are used for dot-type light sources such as LEDs and OLEDs. In this study, a hybrid machining technology combining an indentation machining method and an AAO process was developed for manufacturing the non-continuous micro patterns having nano patterns. First, mirror-like surfaces ($R_a<20nm$) of pure Aluminum substrates were obtained by optimizing cutting conditions. Then, The letter of 'K' consisting of the arrays of the micro patterns was manufactured by the indentation machining method which has a similar principle to indentation hardness testing. Finally, nano patterns were machined by AAO process on the micro patterns. Conclusively, a specific letter having nano-micro hybrid patterns was manufactured in this study.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.144-149
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometerscale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective method to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권1호
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.