• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.12
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• pp.1139-1143
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• 2007

A simple method for the fabrication of 3D micro-nano hybrid patterns was presented. In conventional fabrication methods of the micro-nano hybrid patterns, micro-patterns were firstly fabricated and then nano-patterns were formatted on the micro-patterns. Moreover, these micro-nano hybrid patterns could be fabricated on the flat substrate. In this paper, we suggested the fabrication method of 3D micro-nano hybrid patterns using micro-indentation on the anodized aluminum substrate. Since diameter of the hemispherical nano-pattern can be controlled by electrolyte and applied voltage in the anodizing process, we can easily fabricated nano-patterns of diameter of loom to 300nm. Nano-patterns were firstly formatted on the aluminum substrate, and then micro-patterns were fabricated by deforming the nano-patterned aluminum substrate. Hemispherical nano-patterns of diameter of 150nm were fabricated by anodizing process, and then micro-pyramid patterns of the side-length of $50{\mu}m$ were formatted on the nano-patterns using micro-indentation. Finally we successfully replicated 3D micro-nano hybrid patterns by hot-embossing process. 3D micro-nano hybrid patterns can be applied to nano-photonic device and nano-biochip application.

• Journal of Powder Materials
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• v.12 no.3
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• pp.186-191
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• 2005

A formation of aluminum hydroxide by hydrolysis of nano and micro aluminum powder has been studied. The nano aluminum powder of 80 to 100 nm in diameter was fabricated by a pulsed wire evaporation (PWE) method. The micro powder was commercial product with more than $10\;{\mu}m$ in diameter. The hydroxide type and morphology depending on size of the aluminum powder were examined by several analyses such as XRD, TEM, and BET. The hydrolysis procedure of micro aluminum powder was different from that of nano aluminum powder. The nano aluminum powder after immersing in the water was transformed rapidly to a nano fibrous boehmite, accompanying with a remarkable temperature increase, and then further transformed slowly to a stable bayerite. However, the micro powder was changed to the stable bayerite slowly and directly. The formation of fibrous aluminum hydroxide from nano aluminum powder might be due to the fine cracks which were formed by hydrogen gas pressure on the surface hydroxide layer during hydrolysis. The nano powder with large specific surface area and small size reacted more actively and faster than the micro powder, and transformed to meta-stable hydroxide in relatively short reaction time. Therefore, the formation of fibrous boehmite is special characteristic of hydrolysis of nano aluminum powder.

• Journal of the Korean institute of surface engineering
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• v.45 no.4
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• pp.151-154
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• 2012

A hydrophobic surface has been fabricated on aluminum by two-step surface treatment processes consisting of structure modification and surface coating. Nature inspired micro nano scale structures were artificially created on the aluminum surface by a blasting and Ar ion beam etching. And a hydrophobic thin film was coated by a trimethylsilane ($(CH_3)_3SiH$) plasma deposition to minimize the surface energy of the micro nano structure surface. The contact angle of micro nano structured aluminum surface with the trimethylsilane coating was $123^{\circ}$ (surface energy: 9.05 $mJ/m^2$), but the contact angle of only trimethylsilane coated sample without the micro nano surface structure was $92^{\circ}$ (surface energy: 99.15 $mJ/m^2$). In the hydrophobic treatment of aluminum surface, a trimethylsilane coated sample having the micro nano structure was more effective than only trimethylsilane coated sample without the micro nano structure.

• Journal of the Korean Institute of Gas
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• v.18 no.5
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• pp.20-25
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• 2014

Explosion characteristics of micro-sized aluminum dusts had been studied by many researchers, but the research of nano-sized aluminum dusts were very insufficient. In this study, an experimental investigation was carried out on the influences of nano and micro-sized aluminum dusts (70 nm, 100 nm, $6{\mu}m$, $15{\mu}m$) on dust explosion properties of aluminum particles by using 20 L explosion apparatus. With decreasing of particle size in suspended aluminum dusts, the LEC (lower explosion concentration) of nano-sized aluminum is lower than that of micro-sized aluminum. The particle size change of nano-sized aluminum dusts seems no obvious explosion differences than that of micro-sized aluminum dusts. From the observation of nano-sized aluminum particles by TEM (Transmission Electron Microscopy), it is estimated that increase of particles aggregation may have effects on the explosion characteristics of aluminum nanopowders.

• Journal of the Korean Society of Propulsion Engineers
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• v.15 no.6
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• pp.15-25
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• 2011

One dimensional combustion modeling of aluminum combustion behavior is proposed. Combustion model is assumed that region consists as follows ; preheat, reaction, post reaction region. Flame speed as a function of particle size, equivalence ratio for unitary particles and fraction ratio of micro to nano particle size for binary particles were investigated for lean burn condition at 1 atm. Results were compared with experimental data. For unitary particles, flame speed increase as particle size decreases, but opposite trend with equivalence ratio. For binary particles, flame speed increases proportionally as nano particle fraction increases. For flame structure, separated or overlapping flames are observed, depending on the fraction of nano sized particles.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2012.05a
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• pp.429-434
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• 2012

Ignition delay of micro/nano aluminum particles is caused by aluminum oxide shell. The method of minimizing this ignition delay is proposed in the study. Generating and heating of particles are processed at the same time. As soon as heated particles are produced, they immediately contact with oxygen. Chemical reaction is induced on the contact surface instead of crystallization of oxide shell. Finally particles are ignited. Aluminum particles are generated by laser ablation on an aluminum plate using Nd:YAG pulse laser. Injected particles are confirmed through visualization of particles using scattering method. $CO_2$ continuous laser supplies heat to aluminum plate and generated particles. Trace of burning particles is observed in the experiment.

• Composites Research
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• v.32 no.3
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• pp.141-147
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• 2019

In this study, micro-sized and nano-sized pure aluminum (Al) powders were compressed by unidirectional pressure at room temperature. Although neither type of Al bulk was heated, they had a high relative density and improved mechanical properties. The microstructural analysis showed a difference in the process of densification according to particle size, and the mechanical properties were measured by the Vickers hardness test and the nano indentation test. The Vickers hardness of micro Al and nano Al fabricated in this study was five to eight times that of ordinary Al. The grain refinement effect was considered to be one of the strengthening factors, and the Hall-Petch equation was introduced to analyze the improved hardness caused by grain size reduction. In addition, the effect of particle size and dispersion of aluminum oxide in the bulk were additionally considered. Based on these results, the present study facilitates the examination of the effect of particle size on the mechanical properties of compacted bulk fabricated by the powder metallurgy method and suggests the possible way to improve the mechanical properties of nano-crystalline powders.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.1
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• pp.63-68
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• 2015

Micro/nano patterns for optical concentration and diffusion have been studied in the various fields such as displays, optics, and sensors. Conventional micro patterns were continuous and linear shapes due to using linear-type light sources, however, recently non-continuous patterns have been applied as point sources are used for dot-type light sources such as LEDs and OLEDs. In this study, a hybrid machining technology combining an indentation machining method and an AAO process was developed for manufacturing the non-continuous micro patterns having nano patterns. First, mirror-like surfaces ($R_a<20nm$) of pure Aluminum substrates were obtained by optimizing cutting conditions. Then, The letter of 'K' consisting of the arrays of the micro patterns was manufactured by the indentation machining method which has a similar principle to indentation hardness testing. Finally, nano patterns were machined by AAO process on the micro patterns. Conclusively, a specific letter having nano-micro hybrid patterns was manufactured in this study.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.144-149
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometerscale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective method to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.1
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.