• Polymer(Korea)
• /
• v.29 no.4
• /
• pp.418-421
• /
• 2005

Three-dimensional (3D) microfabrication process using two-photon polymerization (TPP) is developed to fabricate the curved microstructures in a layer, which can be applied potentially to optical MEMS, nano/micro-devices, etc. A 3D curved structure can be expressed using the same height-contours that are defined by symbolic colors which consist of 14 colors. Then, the designed bitmap figure is transformed into a multi-exposure voxel matrix (MVM). In this work a multi-exposure voxel matrix scanning method is used to generate various heights of voxels according to each laser exposure time that is assigned to the symbolic colors. An objective lens with a numerical aperture of 1.25 is employed to enlarge the variation of a voxel height in the range of 1.2 to 6.4 um which can be controlled easily using the various exposure time. Though this work some 3D curved micro-shapes are fabricated directly to demonstrate the usefulness of the process without a laminating process that is generally required in a micro-stereolithography process.

• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.1
• /
• pp.130-137
• /
• 2008

Two-photon stereolithography (TPS) is recognized as a useful process for the fabrication of three-dimensional microstructures. Recently, the need for a two-photon curable resin with high strength increases as 3-D moicrostructures of high aspect ratio or large scale of several hundreds micrometers are required for applications of nano/micro devices in IT/BT. In this work, process parameters of TPS employing the SU-8 which is a representative two-photon curable resin with high strength have been studied for the precise fabrication of 3-D microstructures with high strength. The pre-baking and post-baking processes are studied and the parameter study of the SU-8 in TPS is conducted. Through this work, very small roughness of 12 nm and the minimum aspect ratio of ${\sim}1$ which provides a precise accumulation of layers could be obtained. Using the conditions studied in this work, some 3-D examples are fabricated.

• Macromolecular Research
• /
• v.14 no.5
• /
• pp.559-564
• /
• 2006

The improvement of spatial resolution is a fundamental issue in the two-photon, polymerization-based, laser writing. In this study, a voxel tuning method using a radical quencher was proposed to increase the resolution, and the quenching effect according to the amount of radical quencher was experimentally investigated. Employing the proposed method, the lateral resolution of the line patterns was improved almost to 100 nm. However, a shortcoming of the quenching effect was the low mechanical strength of polymerized structures due to their short chain lengths. Nano-indentation tests were conducted to evaluate quantitatively the relationship between mechanical strength and the mixture ratio of the radical quencher into the resins. The elastic modulus was dramatically reduced from an average value of 3.015 to 2.078 GPa when 5 wt% of radical quencher was mixed into the resin. Three-dimensional woodpile structures were fabricated to compare the strength between the resin containing radical quencher and the original resin.

• Journal of the Korean Chemical Society
• /
• v.49 no.3
• /
• pp.292-299
• /
• 2005

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.34 no.3
• /
• pp.251-258
• /
• 2010

This paper presents the technology for the design, fabrication, and characterization of a microfluidic system interface (MSI); the purpose of this technology is to enable the integration of complex microfluidic systems. The MSI technology can be applied in a simple manner for realizing complex arrangements of microfluidic interconnects, integrated microvalves for fluid control, and optical windows for on-chip optical processes. A microfluidic system for the preparation of genetic samples was used as the test vehicle to prove the effectiveness of the MSI technology for packaging complex microfluidic systems with multiple functionalities. The miniaturized genetic sample preparation system comprised several functional compartments, including compartments for cell purification, cell separation, cell lysis, solid-phase DNA extraction, polymerase chain reaction, and capillary electrophoresis. Additionally, the functional operation of the solid-phase extraction and PCR thermocycling compartments was demonstrated by using the MSI.

• Polymer(Korea)
• /
• v.29 no.2
• /
• pp.146-150
• /
• 2005

A nano-stereolithouaphy (NSL) apparatus has been developed for fabrication of microstructures with the resolution of 150 nanometers. In the NSL process, a complicated 3D structure can be fabricated by building layer by layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D laminated structure was finished, unsolidified liquid-stage resins were removed to develop the fabricated structure by dropping several droplets of solvent, then the polymerized structure was only left on the glass substrate. A microstructure is fabricated by vector scanning method to save the fabrication time. The shell thickness of a structure is very thin within 200 nm, when it is fabricated by a single contour scanning (SCS) path. So, a fabricated structure can be deformed easily in the developing process. In this work, a double contour scanning (DCS) method was proposed to reinforce the strength of a shell typed structure, and a microcup was fabricated to show the usefulness of the developed NSL system and the DCS method.