• Journal of Sensor Science and Technology
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• v.10 no.5
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• pp.292-303
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• 2001

This work reports the tunneling effects of the lateral field emitters. Tunneling effect is applicable to the VMFS(vacuum magnetic field sensors). VMFS uses the fact that the trajectory of the emitted electrons are curved by the magnetic field due to Lorentz force. Polysilicon was used as field emitters and anode materials. Thickness of the emitter and the anode were $2\;{\mu}m$, respectively. PSG(phospho-silicate-glass) was used as a sacrificial layer and it was etched by HF at a releasing step. Cantilevers were doped with $POCl_3(10^{20}cm^{-3})$. $2{\mu}m$-thick cantilevers were fabricated onto PSG($2{\mu}m$-thick). Sublimation drying method was used at releasing step to avoid stiction. Then, device was vacuum sealed. Device was fixed to a sodalime-glass #1 with silver paste and it was wire bonded. Glass #1 has a predefined hole and a sputtered silicon-film at backside. The front-side of the device was sealed with sodalime-glass #2 using the glass frit. After getter insertion via the hole, backside of the glass #1 was bonded electrostatically with the sodalime-glass #3 at $10^{-6}\;torr$. After sealing, getter was activated. Sealing was successful to operate the tunneling device. The packaged VMFS showed very small reduced emission current compared with the chamber test prior to sealing. The emission currents were changed when the magnetic field was induced. The sensitivity of the device was about 3%/T at about 1 Tesla magnetic field.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.3
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• pp.372-379
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• 2013

In this study, we investigated the traits of the clad metals used in hot-rolled clad steel plates. We examined the sensitization and mechanical properties of STS 316 steel plate and carbon steel (A516) under the specific circumstances of post heat treatment and whether a weld was multilayered and thick or repeated because of repairs. The test conditions were as follows. The clad steel plates were butt-welded using FCAW/SAW, and the heat treatment was conducted at $625^{\circ}C$, for 80, 160, 320, 640, or 1280 min. The change in the corrosion resistance was evaluated in these specimens. In the case of the carbon steel (A516), as the heat treatment time increased, the annealing effect caused the tensile strength to decrease. The micro- hardness gradually increased and then decreased after 640 min. The elongation and contraction of the area increased gradually. An oxalic acid etch test and EPR test on STS316, a clad metal, showed a STEP structure and no sensitization. From the test results for the multi-layered and repair welds, it could be concluded that there is no effect on the corrosion resistance of clad metals. In summary, the purpose of this study was to suggest some considerations when developing on-site techniques and evaluate the sensitization of stainless steels.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1543-1546
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• 2005

This paper presents a method to measure a large surface shape using atomic force microscopy, which has been used mostly for measuring over very tiny surfaces. Experiments are performed to measure a step height and a slope of a test sample. The proposed method is rigorously compared with the coordinate measuring machine. The repetition accuracy and the effects of the set point are also studied. The experimental results show that the proposed method is reliable and should be effective to measure both the nano-accuracy surface profile as well as the micro-accuracy global shape of a macro/micro parts using atomic force microscope.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1036-1042
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• 2003

The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process , simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.6
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• pp.39-46
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• 2010

Linear induction motor is adopted as an actuator of the planar stage. An inherently poor characteristic at zero or ultra-low speed zone of the induction motor is remarkably improved due to a recent development of power electronic semiconductor technology and a spatial vector control theory. At present, a servo response speed of the induction motor reaches 90 percent of one of PM synchronous or BLDC motor. Specially, as a secondary of the induction motor can be constructed using uniform conducting sheets, there is no periodic force ripple as in PM motors. So, the induction motor can be superior to another driving means under a certain condition. This paper discusses the overall development procedure of non-contact planar stage with a big workspace using linear induction motors.

• Journal of the Microelectronics and Packaging Society
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• v.17 no.4
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• pp.61-66
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• 2010

Cu-Cu thermo-compression bonding process was successfully developed as functions of the deposited Cu thickness and $Ar+H_2$ forming gas annealing conditions before and after bonding step in order to find the low temperature bonding conditions of 3-D integrated technology where the interfacial toughness was measured by 4-point bending test. Pre-annealing with $Ar+H_2$ gas at $300^{\circ}C$ is effective to achieve enough interfacial adhesion energy irrespective of Cu film thickness. Successful Cu-Cu bonding process achieved in this study results in delamination at $Ta/SiO_2$ interface rather than Cu/Cu interface.

• Journal of Welding and Joining
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• v.31 no.5
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• pp.47-53
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• 2013

We have investigated the traits of clad metals in hot-rolled clad steel plates, including the sensitization and mechanical properties of STS 316 steel plate and carbon steel (A516), under various specific circumstances regarding post heat treatment, multilayered welds, and thick or repeated welds for repair. For evaluations, sectioned weldments and external surfaces were investigated to reveal the degree of sensitization by micro vickers hardness, tensile, and etching tests the results were compared with those of EPR tests. The clad steel plates were butt-welded using FCAW and SAW with the time of heat treatment as the variable, a that was conducted at $625^{\circ}C$, for 80, 160, 320, 640, and 1280 min. Then, the change in corrosion resistance was evaluated in these specimens. With carbon steel (A516), as the heat treatment time increased, the annealing effect caused the tensile strength to decrease. The micro-hardness gradually increased and decreased after 640 min. The elongation and contraction of the area also increased gradually. The oxalic acid etch test and EPR test on STS316 and the clad metal showed STEP structure and no sensitization. From the test results on multi-layered and repair welds, it could be concluded that there is no effect on the corrosion resistance of clad metals. The purpose of this study was to suggest some considerations for developing on-site techniques to evaluate the sensitization of stainless steels.

• Earthquakes and Structures
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• v.24 no.2
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• pp.127-140
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• 2023

The vibration of microtubule in human cells is the source of electrical field around it and inside cell structure. The induction of electrical field is a direct result of the existence of dipoles on the surface of the microtubules. Measuring the electrical fields could be performed using nano-scale sensors and the data could be transformed to other computers using internet of things (IoT) technology. Processing these data is feasible by artificial intelligence-based methods. However, the first step in analyzing the vibrational behavior is to study the mechanics of microtubules. In this regard, the vibrational behavior of the microtubules is investigated in the present study. A shell model is utilized to represent the microtubules' structure. The displacement field is assumed to obey first order shear deformation theory and classical theory of elasticity for anisotropic homogenous materials is utilized. The governing equations obtained by Hamilton's principle are further solved using analytical method engaging Navier's solution procedure. The results of the analytical solution are used to train, validate and test of the deep neural network. The results of the present study are validated by comparing to other results in the literature. The results indicate that several geometrical and material factors affect the vibrational behavior of microtubules.

• Applied Chemistry for Engineering
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• v.18 no.4
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• pp.381-385
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• 2007

High density activated carbons electrode materials, for supercapacitor were prepared by chemical KOH activation of cokes as the starting material under Ar atmosphere. By controlling the synthesis conditions and reducing KOH quantity in the activation step, the specific surface area of the product was decreased. BET surface area was measured to be $500{\sim}1260m^2/g$, and the electrode density was in the range of $0.68{\sim}0.83g/cm^3$. Volumetric specific capacitance (unit cell test) was as high as 20 F/cc, which corresponds to gravimetric specific capacitance of about 95 F/cc on the basis of half cell test. It should be noted that the specific capacitance of the activated carbons prepared in this study is superior to that of commercial activated carbons.

• Journal of Electrical Engineering and Technology
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• v.13 no.5
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• pp.2059-2066
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• 2018

This study explored the feasibility of utilizing an SWCNT-coated fabric sensor for the development of a wearable motion sensing device. The extent of variation in electric resistance of the sensor material was evaluated by varying the fiber composition of the SWCNT-coated base fabrics, attachment methods, number of layers, and sensor width and length. 32 sensors were fabricated by employing different combinations of these variables. Using a custom-built experimental jig, the amount of voltage change in a fabric sensor as a function of the length was measured as the fabric sensors underwent loading-unloading test with induced strains of 30 %, 40 %, and 50 % at a frequency of 0.5 Hz. First-step analysis revealed the following: characteristics of the strain-voltage curves of the fabric sensors confirmed that 14 out of 32 sensors were evaluated as more suitable for measuring human joint movement, as they yield stable resistance values under tension-release conditions; furthermore, significantly stable resistance values were observed at each level of strain. Secondly, we analyzed the averaged maximum, minimum, and standard deviations at various strain levels. From this analysis, it was determined that the two-layer sensor structure and welding attachment method contributed to the improvement of sensing accuracy.