• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.34 no.4
• /
• pp.262-268
• /
• 2021

For the past several decades, various next-generation patterning methods have been developed to obtain well-designed nano-to-micro structures, such as imprint lithography, nanotransfer printing (nTP), directed self-assembly (DSA), E-beam lithography, and so on. Especially, nTP process has much attention due to its low processing cost, short processing time, and good compatibility with other patterning techniques in achieving the formation of high-resolution functional patterns. To transfer functional patterns onto desirable substrates, the use of soft materials is required for precise replication of master mold. Here, we introduce a simple and practical nTP method to create highly ordered structures using various polymeric replica materials. We found that polymethyl methacrylate (PMMA), polystyrene (PS), and polyvinylpyridine (PVP) are possible candidates for replica materials for reliable duplication of Si master mold based on systematic analysis of pattern visualization. Furthermore, we successfully obtained well-defined metal and oxide nanostructures with functionality on target substrates by using replica patterns, through deposition and transfer process. We expect that the several candidates of replica materials can be exploited for effective nanofabrication of complex electronic devices.

• Proceedings of the KSME Conference
• /
• 2003.04a
• /
• pp.1036-1042
• /
• 2003

The hot embossing process has been mentioned as one of major nanoreplication techniques. This is due to its simple process, low cost, high replication fidelity and relatively high throughput. As the initial step of quantitating the embossing process , simple parametric study about embossing time have been carried out using high-resolution masters which patterned by the DRIE process and laser machining. Under the various embossing time, the viscous flow of thin PMMA films into microcavities during compression force has been investigated. Also, a study about simulating the viscous flow during embossing process has planned and continuum scale FDM analysis was applied on this simulation. With currently available test data and condition, simple FDM analysis using FLOW3D was made attempt to match simulation and experiment.

• Journal of the Korean Ceramic Society
• /
• v.42 no.12 s.283
• /
• pp.865-871
• /
• 2005

Submicron thick solid electrolyte membrane is essential to the implementation of low temperature solid oxide fuel cell, and, therefore, development of new electrode structures is necessary for the submicron thick solid electrolyte deposition while providing functions as current collector and fuel transport channel. In this research, a nickel membrane with multi-stage nano hole array has been produced via modified two step replication process. The obtained membrane has practical size of 12mm diameter and $50{\mu}m$ thickness. The multi-stage nature provides 20nm pores on one side and 200nm on the other side. The 20nm side provides catalyst layer and $30\~40\%$ planar porosity was measured. The successful deposition of submicron thick yttria stabilized zirconia membrane on the substrate shows the possibility of achieving a low temperature solid oxide fuel cell.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2011.05a
• /
• pp.37.1-37.1
• /
• 2011

Miniaturization of lenses has been widely researched by various scientific and engineering techniques. As a result, micro scaled lens structure could be easily achieved from various fabrication techniques; nevertheless it is still challenging to make nano scaled lenses. This paper reports a novel fabrication method of silicon nanotemplate for nanolens array. The inverse structure of nanolens array was fabricated on silicon substrate by reactive ion etching (RIE) process. This technique has a flexibility to produce different tip shapes using different pattern masks. Once the silicon nano-tip array structure is well-defined using an optimized recipe, it is followed by polymer molding to duplicate nanolens array from the template. Finally, the nanostructures formed on silicon nanotemplate and polymer replica were investigated using FE-SEM and AFM measurements. The nano scaled lens can be manufactured from the same template, also using other replication techniques such as imprinting, injection molding and so on.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.467-467
• /
• 2011

Reflecting the growing importance of nanomaterials in science and technology, controlling the porosity combined with well-defined structural properties has been an ever-demanding pursuit in the related fields of frontier researches. A number of reports have focused on the synthesis of various nanoporous materials so far and, recently, the nanomaterials with multimodal porosity are getting an emerging importance due to their improved material properties compared with the mono porous materials. However, most of those materials are obtained in bulk phases while the spherical nanoparticles are one of the most practical platforms in a great number of applications. Here, we report on the synthesis of the core-shell silica nanoparticles with double mesoporous shells (DMSs). The DMS nsnoparticles are spherical and monodispersive and have two different mesoporous shells, i.e., the bimodal porosity. It is the first example of the core-shell silica nanoparticles with the different mesopores coexisting in the individual nanoparticles. Furthermore, the carbon and silica hollow capsules were also fabricated via a serial replication process.

• Composites Research
• /
• v.20 no.2
• /
• pp.17-20
• /
• 2007

Superhydrophobic polytetrafluoroethylene ($Teflon^{(R)}$, Dupont) sub-micro and nanostructures were fabricated by the dipping method, based on anodization process in oxalic acid. The polymer sticking phenomenon during the replication creates the sub-microstructures on the negative polytetrafluoroethylene nanostructure replica. This process gives a hierarchical structure with nanostructures on sub-microstructures, which looks like the same structures as lotus leaf and enables commercialization. The diameter and the height of the replicated nano pillars were 40 nm and 40 um respectively. The aspect ratio is approximately 1000. The fabricated surface has a semi-permanent superhydrophobicity, the apparent contact angle of the polytetrafluoroethylene sub-micro and nanostructures is about $160^{\circ}$, and the sliding angle is less than $1^{\circ}$.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.22 no.5
• /
• pp.831-836
• /
• 2013

This study demonstrates the process of fabricating patterns using tribonanolithography (TNL),with laboratory-made micro polycrystalline diamond (PCD) tools that are attached to an atomic force microscope (AFM). The various patterns are easily fabricated using mechanical scratching, under various normal loads, using the PCD tool on single crystal silicon, which is the master mold for replication in this study. Then, polydimethylsiloxane (PDMS) replica molds are fabricated using precise pattern transfer processes. The transferred patterns show high dimensional accuracy as compared with those of TNL-processed silicon micro molds. TNL can reduce the need for high cost and complicated apparatuses required for conventional lithography methods. TNL shows great potential in that it allows for the rapid fabrication of duplicated patterns through simple mechanical micromachining on brittle sample surfaces.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.100-104
• /
• 2005

The injection molding is very effective process for various plastic products due to its high productivity. It is also good fur precise products like optical parts. Various thermoplastic materials are also available with this injection molding process. In recent, however, as the overall size of the product increases and micro or nano scale of patterns are applied to the products, we now have some problems such as low fidelity of the replication of the pattern, high molding pressure, or warpage from the in-mold stress. Injection/compression molding is studied to overcome those problems in molding large thin plate with micro pattern array on its surface. An injection compression mold is designed to 3 pieces mold for side gate. We install 4 pressure transducers and 9 thermocouples to measure the melt pressure and surface temperature in the cavity during the process. As a result, the maximum molding pressure for injection compression molding is reduced to 1/3 compared to injection molding and the uniformity of the pressure in the cavity is enhanced by about 15%.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.24 no.1
• /
• pp.38-42
• /
• 2015

Polydimethylsiloxane (PDMS) is a widely used material for replicating micro-structures because of its transparency, deformability, and easy fabrication. At the nanoscale, however, it is hard to fill a nanohole template with uncured PDMS. This paper introduces several simple methods by changing the surface energy of a nanohole template and PDMS elastomer for replicating 100nm-scale structures. In the case of template, pristine anodic aluminum oxide (AAO), hydrophobically treated AAO, and hydrophillically treated AAO are used. For the surface energy change of the PDMS elastomer, a hydrophilic additive and dilution solvent are added in the PDMS prepolymer. During the molding process, a simple casting method is used for all combinations of the treated template and modified PDMS. The nanostructured PDMS surface was investigated with a scanning electron microscope after the molding process for verification.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2009.10a
• /
• pp.45-52
• /
• 2009

The research on miniature devices based on non-silicon materials, in particular polymeric materials has been attracting more and more attention in the research field of the micro/nano fabrication in recent years. Lost of applications and many literatures have been reported. However, the study on the micro thermal imprint process of glassy polymer is still not systematic and inadequate. The aim of this research I to obtain a numerical material model for an amorphous glassy polymer, polycarbonate (PC), which can be used in finite element analysis (FEA) of the micro thermal imprint process near the glass transition temperature (Tg). An understanding of the deformation behavior of the PC specimens was acquired by performing tensile stress relaxation tests. The viscoelastic material model based on generalized Maxwell model was introduced for the material near Tg to establish the FE model based on the commercial FEA code ABAQUS/Standard with a suitable set of parameters obtained for this material model form the test data. As a result, the feasibility of the established viscoelastic model for PC near Tg was confirmed and this material model can be used in FE analysis for the prediction and improvement of the micro thermal imprint process for pattern replication.