• Design & Manufacturing
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• 제2권4호
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• pp.48-53
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• 2008

We injection molded a thin type of plate and wedge type of plate with micro prizm patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, melt temperature, injection rate or packing pressure. The size of the $90^{\circ}$ prizm pattern is $50{\mu}m$ and the size of the plate is about $335mm{\times}213mm$ and $400mm{\times}400mm$. The thicknesses are 2.6mm and 0.7mm at each edge of the wedge type of plate and 1mm at each edge of the thin type of plate. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns on the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1531-1534
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• 2005

Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

• 한국표면공학회지
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• 제41권6호
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• pp.331-334
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• 2008

The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{\circ}C$ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.

• 대한기계학회논문집B
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• 제41권1호
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• pp.63-67
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• 2017

일반적인 세포 배양 기술은 평평한 표면에 세포 부착을 위한 화학적, 생화학적 표면처리를 하는 것이 기본이지만, 요즘 들어 마이크로나 나노 크기의 구조체를 형성하여 세포 부착을 하는 연구들이 많이 진행되고 있다. 본 연구에서는 전도성 고분자인 피롤과 나노임프린트 기술을 이용하여 300 nm 선 패턴과 150 nm 원기둥 패턴의 나노구조체 제작 후 대표적인 암세포인 HeLa 세포를 배양하여, 주사전자현미경과 공초점 현미경을 이용하여 세포의 부착 특성을 연구하였다. 상용 페트리 접시와 평면 피롤에서는 세포들이 부정형의 형태로 부착 및 배양되었지만, 선폭 300 nm 선패턴 상에서는 길이 방향으로 세포가 부착되고 세포 내의 핵과 액틴 역시 배열되어 있고, 지름 150 nm 원기둥 패턴 상에서는 단일 세포로 고정되고 세포 내 액틴은 방사상으로 나노구조체에 고정되어 있는 것을 확인할 수 있었다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.83-86
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• 2005

In this study, SAM (self-assembled monolayer) was applied as an anti-adhesion layer in the nano molding process, to reduce the surface energy between the nano-stamper and the moldeded polymeric nano patterns. Before depositing SAM on the stamper, the nickel stamper was pretreated to remove oxide on the nickel stamper surface. Then, using the solution deposition method, alkanethiol SAM as an anti-adhesion layer was deposited on nickel surface. To examine the effectiveness of the SAM deposition on the metallic nano stamper, the contact angle and the lateral friction force were measured at the actual processing temperature and pressure for the case of nano compression molding and at the actual UV dose for the case of nano UV molding. The surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the high hydrophobic quality of SAM on the nickel stamper maintained under the actual molding environments.

• 마이크로전자및패키징학회지
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• 제25권3호
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• pp.49-53
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• 2018

정렬된 미세 패턴을 형성하는 기술은 차세대 전자소자를 제작함에 있어서 기틀이 되는 기반기술이기 때문에, 최근 더욱 미세한 패턴을 구현하기 위하여 많은 노력들이 이루어지고 있다. 그 중, 본 연구에서는 패터닝 공정에 있어서 비용이 저렴하고 단시간 내에 고해상도 미세패턴의 형성이 가능한 장점을 갖는 나노 패턴전사 프린팅 공정을 이용하였다. 투명하고 유연한 기판 위에 250 nm, 500 nm, 그리고 $1{\mu}m$의 선폭을 갖는 Pt 금속 라인 패턴을 성공적으로 형성하였으며, 벤딩기기를 사용하여 500회 벤딩평가 후 패턴의 파괴가 일어나는지에 대한 내구성을 평가하였고, 전자현미경을 통하여 분석하였다. 벤딩 전과 후의 패턴에 대한 손상 여부에 대하여 확인한 결과, 다양한 선폭의 금속 라인 패턴이 초기 상태와 변함없이 형상을 유지할 뿐만 아니라, 패턴주기 또한 안정적으로 유지됨을 확인할 수 있었다. 이러한 결과를 볼 때, 나노 패턴 전사 프린팅 공정은 다양한 금속 패턴을 형성하는데 매우 유용하다고 판단되며, 향후 차세대 유연 전자소자 또는 배선 및 인터커넥션 기술로 응용이 가능할 것으로 기대된다.

• 한국산업융합학회 논문집
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• 제24권6_2호
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• pp.729-735
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• 2021

Recently Artificial Intelligence(AI) has been developed and used in various fields. Especially AI recognition technology can perceive and distinguish images so it should plays a significant role in quality inspection process. For stability of autonomous driving technology, semiconductors inside automobiles must be protected from external electromagnetic wave(EM wave). As a shield film, a thin polymeric material with hole shaped micro-patterns created by a laser processing could be used for the protection. The shielding efficiency of the film can be increased by the hole structure with appropriate pitch and size. However, since the sensitivity of micro-machining for some parameters, the shape of every single hole can not be same, even it is possible to make defective patterns during process. And it is absolutely time consuming way to inspect all patterns by just using optical microscope. In this paper, we introduce a AI inspection system which is based on web site AI tool. And we evaluate the usefulness of AI model by calculate Area Under ROC curve(Receiver Operating Characteristics). The AI system can classify the micro-patterns into normal or abnormal ones displaying the text of the result on real-time images and save them as image files respectively. Furthermore, pressing the running button, the Hardware of robot arm with two Arduino motors move the film on the optical microscopy stage in order for raster scanning. So this AI system can inspect the entire micro-patterns of a film automatically. If our system could collect much more identified data, it is believed that this system should be a more precise and accurate process for the efficiency of the AI inspection. Also this one could be applied to image-based inspection process of other products.

• 한국포장학회지
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• 제24권1호
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• pp.27-34
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• 2018

In this work, nano ZnO was introduced into low density poly ethylene (LDPE) composites films with various contents (0, 0.5, 1.0, 3.0 and 5.0 wt%) by melt-extrusion. Their basic properties such as crystallinity, chemical bonds and surface morphology were examined by XRD, FTIR and SEM. XRD patterns and FTIR peaks intensity were increased in proportion to the ZnO contents. SEM images showed well dispersed nano ZnO in LDPE composite films. Antimicrobial functionality of LDPE-nano ZnO composite films was also studied and the presence of nano ZnO resulted in significant improvement of antimicrobial functionality compared to the pure LDPE film. To evaluate influence of nano ZnO on LDPE properties required as packaging material, thermal, mechanical, gas barrier and optical properties of LDPE-nano ZnO composite films were characterized with various analytical techniques including TGA, UTM, OTR, WVTR and UV-Vis spectroscopy. As a result, except optical and mechanical properties of LDPE, no significant effects were found in other properties. Opacity of pure LDPE was greatly increased with increasing concentration of nano ZnO and tensile strength was also improved at 0.5wt% ZnO content.

• Smart Structures and Systems
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• 제20권3호
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• pp.329-342
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• 2017

In this paper, the dispersion characteristics of elastic waves propagation in sandwich nano-beams with functionally graded (FG) face-sheets reinforced with carbon nanotubes (CNTs) is investigated based on various high order shear deformation beam theories (HOSDBTs) as well as nonlocal strain gradient theory (NSGT). In order to align CNTs as symmetric and asymmetric in top and bottom face-sheets with respect to neutral geometric axis of the sandwich nano-beam, various patterns are employed in this analysis. The sandwich nano-beam resting on Pasternak foundation is subjected to thermal, magnetic and electrical fields. In order to involve small scale parameter in governing equations, the NSGT is employed for this analysis. The governing equations of motion are derived using Hamilton's principle based on various HSDBTs. Then the governing equations are solved using analytical method. A detailed parametric study is conducted to study the effects of length scale parameter, different HSDBTs, the nonlocal parameter, various aligning of CNTs in thickness direction of face-sheets, different volume fraction of CNTs, foundation stiffness, applied voltage, magnetic intensity field and temperature change on the wave propagation characteristics of sandwich nano-beam. Also cut-off frequency and phase velocity are investigated in detail. According to results obtained, UU and VA patterns have the same cut-off frequency value but AV pattern has the lower value with respect to them.

• 폴리머
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• 제28권4호
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• pp.305-313
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• 2004

본 연구는 나노 복화공정을 이용하여 마이크로 혹은 나노공정에 응용이 가능한 형상모형 제작공정 개발과 폴리디메틸실록산 (polydimethylsiloxane)를 이용하여 만들어진 형상모형의 몰드로 나노급 정밀도의 폴리디메틸실록산 형상을 복제하는 공정에 관한 것이다. 본 연구에서 제안한 나노 복화공정은 복잡한 형상모형 (pattern)이나 2차원 형상을 CAD 파일 없이 비트맵 그림파일을 이용하여 직접적으로 200nm 정밀도를 가지는 형상으로 만들 수 있다. 형상모형은 펨토초 레이저를 이용하여 이광자 흡수 중합법으로 제작하기 때문에 형상의 정밀도는 레이저 범의 회절한계 이하로 얻을 수 있다. 이렇게 제작된 마스터 형상모형은 본 연구에서 제안한 진공압력차이법으로 폴리디메틸실록산 몰드를 제작하여 기존의 제작방법에 비하여 정밀한 제작이 가능함을 보였으며 또한 제작된 몰드를 이용하여 양각의 플리디메틸실록산 스탬프를 제작하였다.