• 한국재료학회지
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• 제14권2호
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• pp.133-140
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• 2004

We carried out anodic aluminum oxide (AAO) on a Si and a sapphire substrate. For anodic oxidation of Al two types of specimens prepared were Al(0.5 $\mu\textrm{m}$)!Si and Al(0.5 $\mu\textrm{m}$)/Ti(0.1 $\mu\textrm{m}$)$SiO_2$(0.1 $\mu\textrm{m}$)/GaN(2 $\mu\textrm{m}$)/Sapphire. Surface morphology of Al film was analyzed depending on the deposition methods such as sputtering, thermal evaporation, and electron beam evaporation. Without conventional electron lithography, we obtained ordered nano-pattern of porous alumina by in- situ process. Electropolishing of Al layer was carried out to improve the surface morphology and evaluated. Two step anodizing was adopted for ordered regular array of AAO formation. The applied electric voltage was 40 V and oxalic acid was used as an electrolyte. The reference electrode was graphite. Through the optimization of process parameters such as electrolyte concentration, temperature, and process time, a regular array of AAO was formed on Si and sapphire substrate. In case of Si substrate the diameter of pore and distance between pores was 50 and 100 nm, respectively. In case of sapphire substrate, the diameter of pore and distance between pores was 40 and 80 nm, respectively

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.100-101
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• 2007

Polymer thick film capacitors were successfully fabricated by using ink-jet printing and screen printing technology. First, a bottom electrode was patterned by ink-jet printing of a nano-sized silver ink. Next, a dielectric layer was formed by the screen printing, then a top electrode was pattern by ink-jet printing of a nano-sized silver ink. The printed area of the dielectric layers were changed into $2{\times}2m^2$and $4{\times}2m^2$, and also the area of the electrodes were patterned with $1{\times}1mm^2$ and $1{\times}3mm^2$. The thickness of the printed dielectric layer was ranged from 1.1 to $1.4{\mu}m$. The analysis of capacitances verified that the capacitances was proportional to the area of the printed electrode. The capacitances of the fabricated capacitors resulted in one third of the calculated capacitances.

• 한국전기전자재료학회논문지
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• 제24권10호
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• pp.790-793
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• 2011

In this study, the surface modification for a silicon(Si) mold using $CHF_3$ inductively coupled plasma(ICP). The conditions under that plasma was treated a input ICP power 600 W, an operating gas pressure of 10 mTorr and plasma exposure time of 30 sec. The Si mold surface became hydrophobic after plasma treatment in order to $CF_x$(X= 1,2,3) polymer. However, as the de-molding process repeated, it was investigated that the contact angle of Si surface was decreased. So, we attempted to investigate the degradation mechanism of the accurate pattern transfer with increasing the count of the de-molding process using scanning electron microscope (SEM), contact angle, and x-ray photoelectron spectroscopy (XPS) analysis of Si mold surface.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 춘계학술대회 논문집
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• pp.273-276
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• 2008

Thermoplastic resin takes place stress relaxation and creep according to temperature and time. In room temperature, time dependent deformation (TDD) of polymer was carried out at previous study. In this study, it evaluates time dependent deformation to relate temperature. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is important to control pattern depth for change of indent depth by creep when using Nanoindenter. For evaluating TDD at high temperature, it is occurred thermal-nanoindentation test by changing hold time at maximum load. Temperature is putted at $90^{\circ}C$, hold time at maximum loads are putted at 1, 10, 50, 100, 200, 300 and 500s.

• 한국재료학회지
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• 제9권6호
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• pp.615-621
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• 1999

The new process in order to fabricate of Ni catalyst with high activity by the mechanochemical(MC) method which was combined the mechanical alloying(MA) and the chemical treatment process. The microstructure and characterization of mechanically alloyed Ni-5-wt% Al powder and Ni catalyst gained by alkali leaching were investigated byt he various analysis such as XRD, SEM-EDS, HRTEM and laser particle analyzer. The steady state powder with 1~2$\mu\textrm{m}$ mean particle size was obtained after 30hr milling with the PCA of 2 wt% stearic acid under the condition of grinding stainless steel ball to powder ratio of 60:1 and rotating speed fo 300rpm. According to result of HRTEM diffraction pattern, MA powder of the steady state was nanocrystalline $Al_3$$Ni_2$ intermetallic compound. Ni catalyst was obtained after KOH leaching of the steady state powder was about 20nm nanocrystalline which contained about 8 wt % Al.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• Advances in nano research
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• 제15권6호
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• pp.551-565
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• 2023

Coupled porous curved beams, due to their low weight and high flexibility, have many applications in engineering. This study investigates the vibration behavior of coupled porous curved beams in different boundary conditions. The system consists of two curved beams connected by a mid-layer of elastic springs. These beams are made of various materials, such as homogenous steel foam, and composite materials with PMMA (polymethyl methacrylate) and SWCNT (single-walled carbon nanotube) used as the matrix and nanofillers, respectively. To obtain equivalent material properties, the role of mixture (RoM) was employed, followed by the implementation of the porosity function. The system's governing equations were obtained by employing FSDT and Hamilton's law. To investigate thermal vibration, temperature was implemented as a load in the governing equations. The GDQ method was used to solve these equations. To demonstrate the applicability of the GDQ method in calculating the frequencies of the system and the correctness of the developed program, a validation study was conducted. After validation, numerous examples were presented to investigate the behavior of single and coupled curved beams in various material properties and boundary conditions. The results indicate that the frequencies of the curved beams and the system depend highly on the amount of porosity (n) and the distribution pattern. The system frequencies decreased with an increase in the porosity coefficient. The stiffness of the springs had no effect on the first mode frequency but increased frequencies of other modes in a specific range. The frequencies of the system decreased with an increase in environmental temperature.

• 한국분말재료학회지
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• 제22권1호
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• pp.46-51
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• 2015

A precipitation behavior of nano-oxide particle in Fe-$5Y_2O_3$ alloy powders is studied. The mechanically alloyed Fe-$5Y_2O_3$ powders are pressed at $750^{\circ}C$ for 1h, $850^{\circ}C$ for 1h and $1150^{\circ}C$ for 1h, respectively. The results of Xray diffraction pattern analysis indicate that the $Y_2O_3$ diffraction peak disappear after mechanically alloying process, but $Y_2O_3$ and $YFe_2O_4$ complex oxide precipitates peak are observed in the powders pressed at $1150^{\circ}C$. The differential scanning calorimetry study results reveal that the formation of precipitates occur at around $1054^{\circ}C$. Based on the transmission electron microscopy analysis result, the oxide particles with a composition of Y-Fe-O are found in the Fe-$5Y_2O_3$ alloy powders pressed at 1150oC. It is thus conclude that the mechanically alloyed Fe-$5Y_2O_3$ powders have no precipitates and the oxide particles in the powders are formed by a high temperature heat-treatment.

• Composites Research
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• 제26권6호
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• pp.355-362
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• 2013

복합재료 중 가장 많이 사용되는 탄소계 나노복합재의 성능 향상에 대한 연구가 수행되었다. 나노 사이즈의 탄소나노튜브(CNT)와 마이크로 사이즈의 그레파이트(Graphite) 입자를 일정한 형태로 배열하여 나노복합재를 제작하였다. 입자를 배열하기 위하여 전기장을 활용하였다. 일정한 방향 혹은 형태로 배열된 입자는 에폭시 기지 속에서 섬유강화 복합재 처럼 일정한 방향으로 강성의 향상을 나타낸다. 복합재의 구조적 강성이나 물리적 특성은 강화 입자의 배열상태에 따라 매우 달라지게 된다. 본 연구에서는 특히 탄소나노튜브와 그레파이트 강화입자의 전기장 배열에 의해서 만들어진 나노복합재의 강성 및 방사능 차폐특성을 규명하였다. 전기장에 의한 입자의 배열로 만들어진 탄소계 복합재는 구조적 성능뿐만 아니라 물리적인 방사능 차폐에서도 훌륭한 특성을 나타내었다.

• 한국재료학회지
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• 제22권5호
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• pp.249-252
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• 2012

Fe doped $TiO_2$ nanoparticles were prepared under high temperature and pressure conditions by mixture of metal nitrate solution and $TiO_2$ sol. Fe doped $TiO_2$ particles were reacted in the temperature range of 170 to $200^{\circ}C$ for 6 h. The microstructure and phase of the synthesized Fe doped $TiO_2$ nanoparticles were studied by SEM (FE-SEM), TEM, and XRD. Thermal properties of the synthesized Fe doped $TiO_2$ nanoparticles were studied by TG-DTA analysis. TEM and X-ray diffraction pattern shows that the synthesized Fe doped $TiO_2$ nanoparticles were crystalline. The average size and distribution of the synthesized Fe doped $TiO_2$ nanoparticles were about 10 nm and narrow, respectively. The average size of the synthesized Fe doped $TiO_2$ nanoparticles increased as the reaction temperature increased. The overall reduction in weight of Fe doped $TiO_2$ nanoparticles was about 16% up to ${\sim}700^{\circ}C$; water of crystallization was dehydrated at $271^{\circ}C$. The transition of Fe doped $TiO_2$ nanoparticle phase from anatase to rutile occurred at almost $561^{\circ}C$. The amount of rutile phase of the synthesized Fe doped $TiO_2$ nanoparticles increased with decreasing Fe concentration. The effects of synthesis parameters, such as the concentration of the starting solution and the reaction temperature, are discussed.