• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.8
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• pp.705-710
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• 2003

MoO$_3$thin films were deposited on electrode of alumina substrates in $O_2$atmosphere by RF reactive sputtering using molybdenum metal target. The deposition was performed at 30$0^{\circ}C$ with 350 W of a forward power in an Ar-O$_2$atmosphere. The working pressure was maintained at 3$\times$10$^{-2}$ torr and all deposited films were annealed at 50$0^{\circ}C$ for 5 hours. The surface morphology of films was observed by using a SEM and crystalline phases were analyzed by using a XRD. To investigate gas sensing characteristics of the doped MoO$_3$thin film, Co, Ni and Pt were used as dopants. The sensing properties were investigated in term of gas concentration under exposure of reducing gases such as H$_2$, NH$_3$and CO at optimum working temperature. Co-doped MoO3 thin film shows the maximum 46.8 % of sensitivity in NH$_3$ and Ni-doped MoO$_3$thin film exhibits 49.7 % of sensitivity in H$_2$.

• Journal of Sensor Science and Technology
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• v.9 no.1
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• pp.36-43
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• 2000

In oder to enhance the selectivity of TMA(trimethylamine) gas, the ZnO-based films which were doped with $Al_2O_3$, $TiO_2, $In_2O_3$ and $V_2O_5$ catalysts with various weight percents were deposited in oxygen by RF magnetron sputtering method. To improve electrical stability of sensors, the ZnO-based films were annealed in oxygen at $700^{\circ}C$ for 1 hour. The TMA selectivity of sensors was defined by the magnitude($S_{TMA}/S_{DMA}$ and $S_{TMA}/S_{NH3}$) of TMA sensitivity relative to DMA and sensitivity ammonia($NH_3$) sensitivity, respectively. The $ZnO+Al_2O_3(4\;wt.%)+TiO_2(1\;wt.%)+In_2O_3(1\;wt.%)$ sensor showed high $S_{TMA}/S_{DMA}$ of 5.9 and $S_{TMA}/S_{NH3}$ of 26 to 160 ppm at the working temperature of $300^{\circ}C$ respectively.

• Journal of Sensor Science and Technology
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• v.13 no.2
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• pp.96-100
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• 2004

Optical fiber sensors have been used to detect small amounts of chemical species. In this work, a new thin polymer-clad fiber sensor is developed. Polyaniline is chemically synthesized and thin clad layers of the polymer are easily deposited on optical fiber by dip-coating technique. The optical property of polyaniline as a sensing material is analyzed by UV-Vis-NIR. The light source is stabilized He-Ne laser at 635 nm wavelength with 1 mW power. The light power transmitted through the optical fiber is measured with a spectrophotometer. By selecting a fixed incident angle, variation of transmitted light intensity through the optical fiber can be detected as gas molecules absorbed in the polyaniline clad layer. Among the various gases, the fabricated optical fiber sensor shows good sensitivity to $NH_{3}$ gas. The optical fiber sensors was shown more improved properties than polymer based sensors which measure conductivity changes.

• Journal of the Korean Chemical Society
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• v.36 no.2
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• pp.218-222
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• 1992

Rose tissue containing cytidine deaminase converts cytidine to uridine and ammonia gas. Rose tissue sensor was constructed by immobilizing 50mg of a rose petal tissue on an NH3 gas sensor and the optimum condition of the sensor for the determination of cytidine was investigated. The tissue sensor showed a linear range of$7.0 {\times} 10^{-4}$∼$1.0{\times} 10^{-2}$M cytidine with a slope of 53 mV/decade in 0.2 M phosphate buffer, pH 8.4 at 37$^{\circ}C$. The detection limits were $3.0{\times}10^{-4}$ M and relative standard deviation was 3.4%. This sensor showed an excellent selectivity among various nucleosides and amino acids.

• Journal of Sensor Science and Technology
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• v.25 no.6
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• pp.423-430
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• 2016

This study used a single metal oxide semiconductor (MOS) sensor to classify the major odorous gases hydrogen sulfide ($H_2S$), ammonia ($NH_3$) and toluene ($C_6H_5CH_3$). In order to classify these odorous substances, the voltage on the MOS sensor heater was gradually reduced in 0.5 V steps 5.0 V to examine the changes to the response by the cooling effect on the sensor as the voltage decreased. The hydrogen sulfide gas showed the highest sensitivity compared to odorless air under approximately 2.5 V and the ammonia and toluene gases showed the highest sensitivity under approximately 5.0 V. In other words, the hydrogen sulfide gas reacted better in the low temperature range of the MOS sensor, and the ammonia and toluene gases reacted better in the high-temperature range. In order to analyze the response characteristics of the MOS sensor by temperature in a pattern, a two-dimensional (2D) x-y pattern analysis was introduced to clearly classify the hydrogen sulfide, ammonia, and toluene gases. The hydrogen sulfide gas was identified by a straight line with a slope of 1.73, whereas the ammonia gas had a slope of 0.05 and the toluene gas had a slope of 0.52. Therefore, the 2D x-y pattern analysis is suggested as a new way to classify these odorous substances.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2251-2253
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• 2000

MEMS기술을 이용하여 단층 실리콘 나이트라이드($Si_{3}N_4$) 다이아프램을 제조하고, 이 다이아프램상에 저항성 가열 진공증착법과 고주파 마그네트론 스퍼터링법을 이용하여 차례로 In막과 ZnO막을 증착하고, In의 도핑을 위해 열처리하여 $NH_3$ 가스 감지용 마이크로센서를 제작하였다. 감지막의 열처리온도에 따른 구조적 및 전기적 특성은 XRD, SEM, AFM, 4-point probe 및 Electrometer를 통하여 각각 조사하였다. 제작된 센서의 열처리온도와 인가전력에 따라 $NH_3$ 가스에 대한 감도, 선택성 및 시간응답 특성을 조사하였다. 감지막 두께 3000 ${\AA}$, 열처리온도 400$^{\circ}C$로 제조된 마이크로 센서가 히터 인가전력 366 mW에서 100 ppm의 $NH_3$ 가스농도에서 대하여 16 %, 350 ppm의 가스농도에서 대하여 23 %의 가장 우수한 감도를 나타내었다. 그러나 CO 가스 및 $NO_x$ 가스에 대한 감지특성은 관찰되지 않았다.

• Journal of Sensor Science and Technology
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• v.8 no.3
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• pp.274-282
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• 1999

The In doped ZnO(ZnO:In)thin films sensitive to $NH_3$ gas were prepared by the double layer depositions of In film by vacuum evaporation and ZnO film by rf magnetron sputtering method onto a $SiO_2$/Si wafer substrate, and subsequent heat treatment process. The structural and electrical characteristics of the ZnO:In thin films were studied as a function of heat treatment temperature by x-ray diffraction, scanning electron microscope and 4 point probing method. And the dependence of the sensitivity, the selectivity and the time response of the thin films on heat treatment temperature was investigated. The thin film heat-treated at $400^{\circ}C$ showed the highest sensitivity of 140% at an operating temperature of $300^{\circ}C$. The sensitivity towards CO, $NO_x$, gases observed in the same temperature.

• Proceedings of the Materials Research Society of Korea Conference
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• 2004.05a
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• pp.86-86
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• 2004

• Journal of the Institute of Electronics and Information Engineers
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• v.52 no.9
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• pp.141-146
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• 2015

Recently, people are consuming more fermented food for its health benefits. When we think of fermented food, skate comes to mind. However, there are different preferences depending on the degree of fermentation. Thus, if there is a system that shows the degree of the fermentation on skate, people can eat according to their taste. This paper proposes a design of skate fermentation monitoring system for consumer taste using the smart RFID tag. The proposed system consists of the RFID tag, $NH_3$ sensor, reader, and server. In order to confirm the usefulness of the proposed system, we performed experiments on the skate fermentation. The proposed monitoring system can show the skate fermentation at 4 grades: None, Low, Medium, and Strong. With the smart RFID tag, we successfully estimated the skate fermentation.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.43 no.4 s.310
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• pp.21-29
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• 2006

A fuzzy ARTMAP neural network and a fuzzy ART neural network are proposed to identify $H_2S,\;NH_3$, and their mixtures and to estimate their concentrations, respectively. Features are extracted from a tin oxide gas sensor operated in a thermal modulation plan. After dimensions of the features are reduced by a preprocessing scheme, the features are fed into the proposed fuzzy neural networks. By computer simulations, the proposed method is shown to be fast in learning and stable in concentration estimating compared with other methods.