Deposition of c-BN Films on Tungsten Carbide Insert Tool by Microwave Plasma Enhanced Chemical Vapor Deposition(MPECVD) (MPECVD법에 의한 초경인서트 공구의 c-BN 박막 증착)
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- Journal of the Korean institute of surface engineering
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- v.41 no.2
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- pp.43-47
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- 2008